NL6817089A - - Google Patents

Info

Publication number
NL6817089A
NL6817089A NL6817089A NL6817089A NL6817089A NL 6817089 A NL6817089 A NL 6817089A NL 6817089 A NL6817089 A NL 6817089A NL 6817089 A NL6817089 A NL 6817089A NL 6817089 A NL6817089 A NL 6817089A
Authority
NL
Netherlands
Application number
NL6817089A
Other versions
NL162254B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL6817089.A priority Critical patent/NL162254B/xx
Priority to ES373779A priority patent/ES373779A1/es
Priority to BR214557/69A priority patent/BR6914557D0/pt
Priority to CH1758969A priority patent/CH518006A/de
Priority to GB1295650D priority patent/GB1295650A/en
Priority to SE16256/69A priority patent/SE363700B/xx
Priority to AT1103969A priority patent/AT316894B/de
Priority to SE7302231A priority patent/SE384437B/xx
Priority to BE742331D priority patent/BE742331A/xx
Priority to DE1959527A priority patent/DE1959527C3/de
Priority to FR6941355A priority patent/FR2024961A1/fr
Publication of NL6817089A publication Critical patent/NL6817089A/xx
Priority to ES400839A priority patent/ES400839A1/es
Publication of NL162254B publication Critical patent/NL162254B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00—Variable-resistance transducers
    • H04R21/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • H04R7/22—Clamping rim of diaphragm or cone against seating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Recrystallisation Techniques (AREA)
NL6817089.A 1968-11-29 1968-11-29 Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan. NL162254B (nl)

Priority Applications (12)

Application Number Priority Date Filing Date Title
NL6817089.A NL162254B (nl) 1968-11-29 1968-11-29 Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan.
ES373779A ES373779A1 (es) 1968-11-29 1969-11-21 Un metodo de fabricar dispositivos semiconductores.
SE16256/69A SE363700B (de) 1968-11-29 1969-11-26
CH1758969A CH518006A (de) 1968-11-29 1969-11-26 Verfahren zur Herstellung einer Halbleitervorrichtung mit nebeneinanderliegenden Bereichen unterschiedlicher Dicke, nach dem Verfahren hergestellte Halbleitervorrichtung und Verwendung derselben zur Umwandlung mechanischer Kräfte in Elektrische Signale
GB1295650D GB1295650A (de) 1968-11-29 1969-11-26
BR214557/69A BR6914557D0 (pt) 1968-11-29 1969-11-26 Aperfeicoamentos em ou relativos a processo de fabricacao de dispositivos semicondutores
AT1103969A AT316894B (de) 1968-11-29 1969-11-26 Halbleitervorrichtung und Verfahren zur Herstellung derselben
SE7302231A SE384437B (sv) 1968-11-29 1969-11-26 Halvledaranordning for omvandling av mekaniska pakenningar till elektriska signaler
BE742331D BE742331A (de) 1968-11-29 1969-11-27
DE1959527A DE1959527C3 (de) 1968-11-29 1969-11-27 Halbleiterbauelement zur Umwandlung mechanischer Spannungen in elektrische Signale, Verfahren zu seiner Herstellung und Verwendung
FR6941355A FR2024961A1 (de) 1968-11-29 1969-12-01
ES400839A ES400839A1 (es) 1968-11-29 1972-03-16 Un dispositivo semiconductor para convertir tensiones meca-nicas en senales electricas.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6817089.A NL162254B (nl) 1968-11-29 1968-11-29 Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan.

Publications (2)

Publication Number Publication Date
NL6817089A true NL6817089A (de) 1970-06-02
NL162254B NL162254B (nl) 1979-11-15

Family

ID=19805282

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6817089.A NL162254B (nl) 1968-11-29 1968-11-29 Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan.

Country Status (10)

Country Link
AT (1) AT316894B (de)
BE (1) BE742331A (de)
BR (1) BR6914557D0 (de)
CH (1) CH518006A (de)
DE (1) DE1959527C3 (de)
ES (2) ES373779A1 (de)
FR (1) FR2024961A1 (de)
GB (1) GB1295650A (de)
NL (1) NL162254B (de)
SE (2) SE384437B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071838A (en) 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
DE2841312C2 (de) * 1978-09-22 1985-06-05 Robert Bosch Gmbh, 7000 Stuttgart Monolithischer Halbleiter-Drucksensor und Verfahren zu dessen Herstellung
JPS5550668A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Semiconductor pressure converter
IT1212404B (it) * 1979-02-22 1989-11-22 Rca Corp Metodo comportante un singolo attacco per la formazione di un mesa presentante una parete a piu'gradini.
DE3874884T2 (de) * 1988-04-21 1993-04-29 Marelli Autronica Elektrischer kraft- und/oder verformungsmessfuehler, insbesondere zum gebrauch als druckmessfuehler.
US4904978A (en) * 1988-04-29 1990-02-27 Solartron Electronics, Inc. Mechanical sensor for high temperature environments
JP2719448B2 (ja) * 1991-01-24 1998-02-25 三菱電機株式会社 半導体圧力検出装置
WO2006023753A2 (en) * 2004-08-20 2006-03-02 Semitool, Inc. System for thinning a semiconductor workpiece
CN113555346B (zh) * 2020-08-21 2023-05-23 友达光电股份有限公司 电路基板以及电路基板的应变量的测量方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
US3277698A (en) * 1963-11-15 1966-10-11 Bell Telephone Labor Inc Stress sensing semiconductive devices
NL153947B (nl) * 1967-02-25 1977-07-15 Philips Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen, waarbij een selectief elektrolytisch etsproces wordt toegepast en halfgeleiderinrichting verkregen met toepassing van de werkwijze.
BE711537A (de) * 1968-03-01 1968-09-02

Also Published As

Publication number Publication date
SE363700B (de) 1974-01-28
DE1959527C3 (de) 1981-12-10
GB1295650A (de) 1972-11-08
SE384437B (sv) 1976-05-03
BE742331A (de) 1970-05-27
ES373779A1 (es) 1972-05-16
NL162254B (nl) 1979-11-15
ES400839A1 (es) 1975-02-01
DE1959527B2 (de) 1981-03-19
BR6914557D0 (pt) 1973-01-02
AT316894B (de) 1974-07-25
DE1959527A1 (de) 1970-06-11
FR2024961A1 (de) 1970-09-04
CH518006A (de) 1972-01-15

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee