Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W15/00—Highly-doped buried regions of integrated devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
  • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
  • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
  • H10P14/6302—Non-deposition formation processes
  • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
  • H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
  • H10P14/6308—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
  • H10P14/6309—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
  • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
  • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
  • H10P14/6302—Non-deposition formation processes
  • H10P14/6322—Formation by thermal treatments
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W15/00—Highly-doped buried regions of integrated devices
  • H10W15/01—Manufacture or treatment

Applications Claiming Priority (1)

Publications (2)

Family

ID=22516512

Family Applications (1)

Country Status (11)

Families Citing this family (1)

• 1971
  • 1971-12-06 CA CA129402A patent/CA921620A/en not_active Expired
• 1972
  • 1972-05-16 SE SE7206397A patent/SE372137B/xx unknown
  • 1972-05-19 GB GB2358472A patent/GB1397338A/en not_active Expired
  • 1972-05-19 BE BE783709A patent/BE783709A/xx not_active IP Right Cessation
  • 1972-05-19 IT IT68603/72A patent/IT959298B/it active
  • 1972-05-19 DE DE2224467A patent/DE2224467B2/de not_active Withdrawn
  • 1972-05-23 CH CH756172A patent/CH535494A/de not_active IP Right Cessation
  • 1972-05-23 FR FR7218367A patent/FR2138932B1/fr not_active Expired
  • 1972-05-23 NL NL7206913.A patent/NL159531B/xx not_active IP Right Cessation
  • 1972-05-24 JP JP47050844A patent/JPS5138582B1/ja active Pending
• 1976
  • 1976-06-10 HK HK360/76*UA patent/HK36076A/xx unknown

Also Published As

Similar Documents

Legal Events