NL8006410A - Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze. - Google Patents

Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze. Download PDF

Info

Publication number: NL8006410A
Authority: NL; Netherlands
Prior art keywords: substrate; grooves; glass; circuits; integrated optical
Prior art date: 1980-11-25

Application number

NL8006410A

Other languages

English (en)

Dutch (nl)

Original Assignee

Philips Nv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1980-11-25

Filing date

1980-11-25

Publication date

1982-06-16

1980-11-25 Application filed by Philips Nv filed Critical Philips Nv

1980-11-25 Priority to NL8006410A priority Critical patent/NL8006410A/nl

1981-10-30 Priority to EP81201225A priority patent/EP0052901A1/fr

1981-11-09 Priority to US06/319,774 priority patent/US4384038A/en

1981-11-19 Priority to CA000390437A priority patent/CA1191108A/fr

1981-11-25 Priority to JP56187933A priority patent/JPS57118201A/ja

1982-06-16 Publication of NL8006410A publication Critical patent/NL8006410A/nl

Links

238000000034 method Methods 0.000 title claims description 33
230000003287 optical effect Effects 0.000 title claims description 10
238000004519 manufacturing process Methods 0.000 title claims description 7
239000004020 conductor Substances 0.000 title 1
239000000758 substrate Substances 0.000 claims description 58
239000011521 glass Substances 0.000 claims description 34
238000005530 etching Methods 0.000 claims description 7
239000000126 substance Substances 0.000 claims 1
238000005019 vapor deposition process Methods 0.000 claims 1
238000005229 chemical vapour deposition Methods 0.000 description 9
239000000463 material Substances 0.000 description 8
239000000203 mixture Substances 0.000 description 8
238000000151 deposition Methods 0.000 description 6
230000008021 deposition Effects 0.000 description 5
239000007789 gas Substances 0.000 description 5
238000006243 chemical reaction Methods 0.000 description 4
238000005498 polishing Methods 0.000 description 4
239000000843 powder Substances 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
239000012071 phase Substances 0.000 description 3
235000012239 silicon dioxide Nutrition 0.000 description 3
229910004298 SiO 2 Inorganic materials 0.000 description 2
230000005495 cold plasma Effects 0.000 description 2
238000010276 construction Methods 0.000 description 2
239000007792 gaseous phase Substances 0.000 description 2
238000003825 pressing Methods 0.000 description 2
239000010453 quartz Substances 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
108010010803 Gelatin Proteins 0.000 description 1
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
241000271897 Viperidae Species 0.000 description 1
230000004913 activation Effects 0.000 description 1
239000000654 additive Substances 0.000 description 1
230000000996 additive effect Effects 0.000 description 1
230000009286 beneficial effect Effects 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
229910052681 coesite Inorganic materials 0.000 description 1
229910052906 cristobalite Inorganic materials 0.000 description 1
238000005137 deposition process Methods 0.000 description 1
150000008049 diazo compounds Chemical class 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
239000002019 doping agent Substances 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
238000007524 flame polishing Methods 0.000 description 1
229920000159 gelatin Polymers 0.000 description 1
239000008273 gelatin Substances 0.000 description 1
235000019322 gelatine Nutrition 0.000 description 1
235000011852 gelatine desserts Nutrition 0.000 description 1
238000000227 grinding Methods 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
230000002452 interceptive effect Effects 0.000 description 1
229910017604 nitric acid Inorganic materials 0.000 description 1
229920003986 novolac Polymers 0.000 description 1
239000002245 particle Substances 0.000 description 1
238000001556 precipitation Methods 0.000 description 1
229920005989 resin Polymers 0.000 description 1
239000011347 resin Substances 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
239000007858 starting material Substances 0.000 description 1
229910052682 stishovite Inorganic materials 0.000 description 1
150000003459 sulfonic acid esters Chemical class 0.000 description 1
229910052905 tridymite Inorganic materials 0.000 description 1
239000012808 vapor phase Substances 0.000 description 1
238000004017 vitrification Methods 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Chemical & Material Sciences (AREA)
Optics & Photonics (AREA)
General Physics & Mathematics (AREA)
Chemical Kinetics & Catalysis (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Geochemistry & Mineralogy (AREA)
General Chemical & Material Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Optical Integrated Circuits (AREA)

NL8006410A 1980-11-25 1980-11-25 Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze. NL8006410A (nl)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
NL8006410A NL8006410A (nl)	1980-11-25	1980-11-25	Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze.
EP81201225A EP0052901A1 (fr)	1980-11-25	1981-10-30	Procédé de fabrication de circuits de guides d'ondes optiques intégrés et circuits obtenus par ledit procédé de fabrication
US06/319,774 US4384038A (en)	1980-11-25	1981-11-09	Method of producing integrated optical waveguide circuits and circuits obtained by this method
CA000390437A CA1191108A (fr)	1980-11-25	1981-11-19	Methode de production de circuits guides d'ondes optiques integres, et circuits ainsi produits
JP56187933A JPS57118201A (en)	1980-11-25	1981-11-25	Formation of light integrated wave guide circuit

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
NL8006410A NL8006410A (nl)	1980-11-25	1980-11-25	Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze.
NL8006410		1980-11-25

Publications (1)

Publication Number	Publication Date
NL8006410A true NL8006410A (nl)	1982-06-16

Family

ID=19836235

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL8006410A NL8006410A (nl)	1980-11-25	1980-11-25	Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze.

Country Status (5)

Country	Link
US (1)	US4384038A (fr)
EP (1)	EP0052901A1 (fr)
JP (1)	JPS57118201A (fr)
CA (1)	CA1191108A (fr)
NL (1)	NL8006410A (fr)

Families Citing this family (43)

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US4520485A (en) *	1981-03-17	1985-05-28	Matsushita Electric Industrial Co., Ltd.	Semiconductor device
US4509824A (en) *	1982-02-01	1985-04-09	Nippon Sheet Glass Co., Ltd.	Plate lens and a method for manufacturing the same
DE3230657A1 (de) *	1982-08-18	1984-02-23	Philips Kommunikations Industrie AG, 8500 Nürnberg	Optischer multiplexer
FR2534034B1 (fr) *	1982-10-05	1986-02-28	Lyonnaise Transmiss Optiques	Guide d'ondes lumineuses, et procedes de fabrication de celui-ci
US4426440A (en)	1982-11-18	1984-01-17	The United States Of America As Represented By The Secretary Of The Army	Integrated optical grating device by thermal SiO2 growth on Si
DE3329512A1 (de) *	1983-08-16	1985-02-28	Philips Patentverwaltung Gmbh, 2000 Hamburg	Stablinse aus mehreren glasschichten
DE3329511A1 (de) *	1983-08-16	1985-02-28	Philips Patentverwaltung Gmbh, 2000 Hamburg	Verfahren zur herstellung von mikrolinsen
DE3329510A1 (de) *	1983-08-16	1985-02-28	Philips Patentverwaltung Gmbh, 2000 Hamburg	Verfahren zur herstellung eines lichtbeugenden bauelementes
EP0146196A3 (fr) *	1983-12-17	1987-01-21	Philips Patentverwaltung GmbH	Elément constitutif de dispositif d'optique intégré
DE3345717A1 (de) *	1983-12-17	1985-06-27	Philips Patentverwaltung Gmbh, 2000 Hamburg	Integriert-optisches bauelement
US4762728A (en) *	1985-04-09	1988-08-09	Fairchild Semiconductor Corporation	Low temperature plasma nitridation process and applications of nitride films formed thereby
JPS61284704A (ja) *	1985-06-11	1986-12-15	Sumitomo Electric Ind Ltd	石英系光導波路用ガラス多層膜及びその製造方法
GB8515814D0 (en) *	1985-06-21	1985-07-24	British Telecomm	Fabrication of optical waveguides
GB2181861B (en) *	1985-10-16	1989-09-13	Zeiss Stiftung	Method of making a planar lightwave guide
DE3536780A1 (de) *	1985-10-16	1987-04-16	Schott Glaswerke	Verfahren zur herstellung eines planaren lichtwellenleiters
JPH0764940B2 (ja) *	1986-09-16	1995-07-12	三菱レイヨン株式会社	帯電防止性に優れた合成樹脂成形品の製造法
US4906837A (en) *	1988-09-26	1990-03-06	The Boeing Company	Multi-channel waveguide optical sensor
US5019301A (en) *	1989-01-12	1991-05-28	Codenoll Technology Corporation	Method of injection molding star-couplers
ATE151538T1 (de) *	1989-01-12	1997-04-15	Codenoll Technology Corp	Durch einspritzgiessformung erzeugte sternkoppler und verfahren zur herstellung
US4953933A (en) *	1989-07-10	1990-09-04	The Boeing Company	Optical encoder reading device
US5064684A (en) *	1989-08-02	1991-11-12	Eastman Kodak Company	Waveguides, interferometers, and methods of their formation
JP2894866B2 (ja) *	1991-04-26	1999-05-24	日本電気株式会社	光コネクタ
US5343544A (en) *	1993-07-02	1994-08-30	Minnesota Mining And Manufacturing Company	Integrated optical fiber coupler and method of making same
US5382272A (en) *	1993-09-03	1995-01-17	Rodel, Inc.	Activated polishing compositions
US5371598A (en) *	1993-10-07	1994-12-06	Motorola, Inc.	Optical displacement sensor and method for sensing linear displacements in a shock absorber
US5432877A (en) *	1994-06-03	1995-07-11	Photonic Integration Research, Inc.	Integrated optical circuit having a waveguide end of lens geometry, and method for making same
FR2722304B1 (fr) *	1994-07-06	1996-08-14	Commissariat Energie Atomique	Procede de realisation de guides d'onde circulares et enterres, et dispositifs associes.
AUPN258095A0 (en) *	1995-04-21	1995-05-18	Unisearch Limited	Low temperature fabrication of silica-based pecvd channel waveguides
EP0933656A3 (fr) *	1998-02-02	2000-02-09	Matsushita Electric Industrial Co., Ltd.	Composant guide d'ondes optiques et procédé pour sa fabrication
EP0961140A1 (fr) *	1998-05-27	1999-12-01	Corning Incorporated	Procede et appareil pour aligner reseau de guides d'ondes optiques
US7068870B2 (en) *	2000-10-26	2006-06-27	Shipley Company, L.L.C.	Variable width waveguide for mode-matching and method for making
WO2002095453A2 (fr) *	2000-12-14	2002-11-28	Shipley Company, L.L.C.	Terminaison de guide d'onde optique avec forme de mode vertical et horizontal
US7251406B2 (en) *	2000-12-14	2007-07-31	Shipley Company, L.L.C.	Optical waveguide termination with vertical and horizontal mode shaping
US7158701B2 (en) *	2001-02-21	2007-01-02	Shipley Company, L.L.C.	Method for making optical devices with a moving mask and optical devices made thereby
US6912345B2 (en) *	2001-03-30	2005-06-28	Shipley Company, L.L.C.	Tapered optical fiber for coupling to diffused optical waveguides
US6614977B2 (en)	2001-07-12	2003-09-02	Little Optics, Inc.	Use of deuterated gases for the vapor deposition of thin films for low-loss optical devices and waveguides
US7043133B2 (en) *	2001-07-12	2006-05-09	Little Optics, Inc.	Silicon-oxycarbide high index contrast, low-loss optical waveguides and integrated thermo-optic devices
US6624077B2 (en) *	2001-12-17	2003-09-23	Applied Materials, Inc.	Integrated circuit waveguide
DE10222609B4 (de) *	2002-04-15	2008-07-10	Schott Ag	Verfahren zur Herstellung strukturierter Schichten auf Substraten und verfahrensgemäß beschichtetes Substrat
EP1435533A1 (fr) *	2002-12-30	2004-07-07	STMicroelectronics S.r.l.	Guide d'ondes et procédé de fabrication d'un guide d'ondes
US7024082B2 (en) *	2003-05-16	2006-04-04	Eastman Kodak Company	Apparatus and method for forming an optical converter
WO2008005736A1 (fr) *	2006-06-30	2008-01-10	3M Innovative Properties Company	Circuit flexible
DE102010004442B4 (de) *	2010-01-13	2015-08-20	Leoni Kabel Holding Gmbh	Optisches Bauelement zur Lichtwellenleitung, optisches Steckverbindungssystem mit einem solchen Bauelement und Verfahren zur Herstellung eines solchen Bauelements

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US3719462A (en) *	1970-12-21	1973-03-06	Bell Telephone Labor Inc	Light guide paths comprising densified regions in a transparent medium;and method of producing
AT327425B (de) *	1971-10-11	1976-01-26	Inst Kib Akademii Nauk Gruzins	Verfahren zum herstellen von lichtleitern mit wenigstens zwei lichtleitenden pfaden
DE2444100C3 (de)	1974-09-14	1979-04-12	Philips Patentverwaltung Gmbh, 2000 Hamburg	Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
JPS5370839A (en) *	1976-12-07	1978-06-23	Fujitsu Ltd	Production of optical wave guide circuit
DE2913843A1 (de) *	1979-04-06	1980-10-23	Philips Patentverwaltung	Verfahren zur herstellung von mikrolinsen und kopplungselement mit einer nach diesem verfahren hergestellten mikrolinse

1980
- 1980-11-25 NL NL8006410A patent/NL8006410A/nl not_active Application Discontinuation
1981
- 1981-10-30 EP EP81201225A patent/EP0052901A1/fr not_active Ceased
- 1981-11-09 US US06/319,774 patent/US4384038A/en not_active Expired - Fee Related
- 1981-11-19 CA CA000390437A patent/CA1191108A/fr not_active Expired
- 1981-11-25 JP JP56187933A patent/JPS57118201A/ja active Pending

Also Published As

Publication number	Publication date
JPS57118201A (en)	1982-07-23
US4384038A (en)	1983-05-17
EP0052901A1 (fr)	1982-06-02
CA1191108A (fr)	1985-07-30

Legal Events

Date	Code	Title	Description
1982-06-16	A1B	A search report has been drawn up
1983-07-01	BV	The patent application has lapsed

Publication	Publication Date	Title
NL8006410A (nl)	1982-06-16	Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze.
US11161773B2 (en)	2021-11-02	Methods of fabricating photosensitive substrates suitable for optical coupler
KR102456738B1 (ko)	2022-10-21	통합 디바이스를 갖는 다층 광 정의형 유리
EP0318267B1 (fr)	1994-01-26	Procédé de production d'un composant optique intégré
GB2160226A (en)	1985-12-18	Manufacture of integrated optical waveguides
US4296143A (en)	1981-10-20	Method of producing microlenses
WO2003027736A1 (fr)	2003-04-03	Guide d'onde optique et procede de fabrication associe
JPH07140336A (ja)	1995-06-02	光導波路
JPS6157601B2 (fr)	1986-12-08
US4931077A (en)	1990-06-05	Method of manufacturing a planar optical component
JPS60123807A (ja)	1985-07-02	測地光学素子の製造方法
JPH07239407A (ja)	1995-09-12	レプリカ回折格子
JPS552263A (en)	1980-01-09	Production of optical guide circuits
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JPH05215929A (ja)	1993-08-27	ガラス導波路の製造方法
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