NL8600685A - Apparaat voor energie selectieve afbeelding. - Google Patents

Apparaat voor energie selectieve afbeelding. Download PDF

Info

Publication number
NL8600685A
NL8600685A NL8600685A NL8600685A NL8600685A NL 8600685 A NL8600685 A NL 8600685A NL 8600685 A NL8600685 A NL 8600685A NL 8600685 A NL8600685 A NL 8600685A NL 8600685 A NL8600685 A NL 8600685A
Authority
NL
Netherlands
Prior art keywords
image
analyzer
lens
filter
energy
Prior art date
Application number
NL8600685A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8600685A priority Critical patent/NL8600685A/nl
Priority to DE8787200401T priority patent/DE3772084D1/de
Priority to EP87200401A priority patent/EP0241060B1/de
Priority to US07/026,716 priority patent/US4789780A/en
Priority to JP62061389A priority patent/JP2661908B2/ja
Publication of NL8600685A publication Critical patent/NL8600685A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL8600685A 1986-03-18 1986-03-18 Apparaat voor energie selectieve afbeelding. NL8600685A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL8600685A NL8600685A (nl) 1986-03-18 1986-03-18 Apparaat voor energie selectieve afbeelding.
DE8787200401T DE3772084D1 (de) 1986-03-18 1987-03-05 Geraet zur energieselektiven visualisierung.
EP87200401A EP0241060B1 (de) 1986-03-18 1987-03-05 Gerät zur energieselektiven Visualisierung
US07/026,716 US4789780A (en) 1986-03-18 1987-03-17 Apparatus for energy-selective visualization
JP62061389A JP2661908B2 (ja) 1986-03-18 1987-03-18 エネルギー選択可視化装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8600685 1986-03-18
NL8600685A NL8600685A (nl) 1986-03-18 1986-03-18 Apparaat voor energie selectieve afbeelding.

Publications (1)

Publication Number Publication Date
NL8600685A true NL8600685A (nl) 1987-10-16

Family

ID=19847731

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8600685A NL8600685A (nl) 1986-03-18 1986-03-18 Apparaat voor energie selectieve afbeelding.

Country Status (5)

Country Link
US (1) US4789780A (de)
EP (1) EP0241060B1 (de)
JP (1) JP2661908B2 (de)
DE (1) DE3772084D1 (de)
NL (1) NL8600685A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245734A (ja) * 1988-08-05 1990-02-15 Mitsubishi Heavy Ind Ltd 自動組織解析処理装置
DE4002849A1 (de) * 1990-02-01 1991-08-08 Finnigan Mat Gmbh Verfahren und massenspektrometer zur massenspektroskopischen bzw. massenspektrometrischen untersuchung von teilchen
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
US5578823A (en) * 1994-12-16 1996-11-26 Hitachi, Ltd. Transmission electron microscope and method of observing element distribution by using the same
US5640012A (en) * 1995-08-25 1997-06-17 Gatan, Inc. Precision-controlled slit mechanism for electron microscope
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP2006040777A (ja) * 2004-07-29 2006-02-09 Jeol Ltd 電子顕微鏡
EP3065160B1 (de) * 2015-11-02 2017-12-20 FEI Company Nachsäulenfilter mit verbessertem energiebereich

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB961112A (en) * 1962-03-27 1964-06-17 Hitachi Ltd Energy-selecting electron microscopes
JPS5535667B2 (de) * 1972-06-30 1980-09-16
JPS532755B2 (de) * 1973-08-22 1978-01-31
JPS5815732B2 (ja) * 1974-04-22 1983-03-28 株式会社日立製作所 シツリヨウブンセキソウチ
GB1530277A (en) * 1975-01-02 1978-10-25 Commissariat Energie Atomique Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
NL7610171A (nl) * 1976-09-14 1978-03-16 Philips Nv Energieanalyserende elektronenmikroskoop.
JPS5442195A (en) * 1977-09-09 1979-04-03 Shimadzu Corp Sample analyzing apparatus by charged particle beams
JPS5673468A (en) * 1979-11-21 1981-06-18 Toshiba Corp Mos type semiconductor device
US4399360A (en) * 1980-08-08 1983-08-16 University Patents, Inc. Transmission electron microscope employing sequential pixel acquistion for display
JPS60138833A (ja) * 1983-12-26 1985-07-23 Jeol Ltd 質量分析装置

Also Published As

Publication number Publication date
JPS62229749A (ja) 1987-10-08
EP0241060A1 (de) 1987-10-14
DE3772084D1 (de) 1991-09-19
US4789780A (en) 1988-12-06
EP0241060B1 (de) 1991-08-14
JP2661908B2 (ja) 1997-10-08

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Legal Events

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A1B A search report has been drawn up
BV The patent application has lapsed