NO20073687L - Oscillerende mikro-mekanisk vinkelhastighetssensor - Google Patents

Oscillerende mikro-mekanisk vinkelhastighetssensor

Info

Publication number
NO20073687L
NO20073687L NO20073687A NO20073687A NO20073687L NO 20073687 L NO20073687 L NO 20073687L NO 20073687 A NO20073687 A NO 20073687A NO 20073687 A NO20073687 A NO 20073687A NO 20073687 L NO20073687 L NO 20073687L
Authority
NO
Norway
Prior art keywords
angular velocity
velocity sensor
electrode pair
mass
velocity sensors
Prior art date
Application number
NO20073687A
Other languages
English (en)
Other versions
NO340780B1 (no
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of NO20073687L publication Critical patent/NO20073687L/no
Publication of NO340780B1 publication Critical patent/NO340780B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)

Abstract

Oppfinnelsen vedrører måleinnretninger som kan brukes for måling av vinkelhastigheter, og vedrører med særskilt oscillerende mikromekaniske vinkelhastighetssensorer. I vinkelhastighetssensorer ifølge oppfinnelsen er det anordnet minst ett elektrodepar i tilknytning til en kant på en seismikkmasse (1, 9, 10, 20, 30, 31). Elektrodeparet danner sammen med overflaten til massen (1, 9, 20, 30, 31) to kapasitanser, slik at den ene av kapasitansene til elektrodeparet vil øke mens de andre kapasitansen til elektrodeparet vil synke, som en funksjon av rotasjonsvinkelen til primærbevegelsen for massen (1, 9, 10, 20, 30, 31). Strukturen til en vinkelhastighetssensor ifølge oppfinnelsen muliggjør en pålitelig og effektiv måling, særlig i kompakte løsninger med oscillerende mikromekaniske vinkelhastighetssensorer.
NO20073687A 2004-12-31 2007-07-17 Oscillerende mikro-mekanisk vinkelhastighetssensor NO340780B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041709A FI116544B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
PCT/FI2005/000558 WO2006070060A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
NO20073687L true NO20073687L (no) 2007-10-01
NO340780B1 NO340780B1 (no) 2017-06-19

Family

ID=33548066

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20073687A NO340780B1 (no) 2004-12-31 2007-07-17 Oscillerende mikro-mekanisk vinkelhastighetssensor

Country Status (10)

Country Link
US (1) US7325451B2 (no)
EP (2) EP2653832B1 (no)
JP (2) JP4719751B2 (no)
KR (1) KR100936640B1 (no)
CN (1) CN101151507B (no)
CA (1) CA2586549C (no)
FI (1) FI116544B (no)
IL (1) IL183574A (no)
NO (1) NO340780B1 (no)
WO (1) WO2006070060A1 (no)

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DE112007000637T5 (de) * 2006-03-13 2009-01-02 Yishay Sensors Ltd. 2-achsiges Resonatorgyroskop
FI119895B (fi) 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE202009007836U1 (de) * 2009-06-03 2009-08-20 Sensordynamics Ag MEMS-Sensor
EP2378246A1 (en) 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS Structure for an Angular Rate Sensor
FI125695B (en) * 2013-09-11 2016-01-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
FI125696B (en) 2013-09-11 2016-01-15 Murata Manufacturing Co Gyroscope structure and gyroscope with improved quadrature compensation
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
DE102015213450A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh MEMS Drehratensensor mit kombiniertem Antrieb und Detektion
FI127042B (en) 2015-09-09 2017-10-13 Murata Manufacturing Co An electrode for a microelectromechanical device
TWI668412B (zh) * 2017-05-08 2019-08-11 日商村田製作所股份有限公司 電容式微機電加速度計及相關方法
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
CN113175923A (zh) * 2021-05-19 2021-07-27 瑞声开泰科技(武汉)有限公司 一种mems波动陀螺仪
GB2624843A (en) 2022-07-08 2024-06-05 Autorient Tech As Micromechanical devices and methods of manufacturing thereof

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US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
WO1998001722A1 (en) * 1996-07-10 1998-01-15 Wacoh Corporation Angular velocity sensor
US5945599A (en) 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
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WO2000068640A2 (en) 1999-04-21 2000-11-16 The Regents Of The University Of California Micro-machined angle-measuring gyroscope
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Also Published As

Publication number Publication date
CA2586549A1 (en) 2006-07-06
EP1831644A1 (en) 2007-09-12
KR20070092738A (ko) 2007-09-13
EP2653832B1 (en) 2016-08-03
US7325451B2 (en) 2008-02-05
FI20041709A0 (fi) 2004-12-31
IL183574A0 (en) 2007-09-20
WO2006070060A1 (en) 2006-07-06
IL183574A (en) 2011-03-31
CN101151507A (zh) 2008-03-26
CN101151507B (zh) 2011-04-06
NO340780B1 (no) 2017-06-19
US20060156813A1 (en) 2006-07-20
JP2011141281A (ja) 2011-07-21
JP2008527319A (ja) 2008-07-24
EP2653832A1 (en) 2013-10-23
JP4719751B2 (ja) 2011-07-06
CA2586549C (en) 2012-03-20
KR100936640B1 (ko) 2010-01-14
FI116544B (fi) 2005-12-15
EP1831644A4 (en) 2011-08-10
EP1831644B1 (en) 2013-10-16

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Legal Events

Date Code Title Description
CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA ELECTRONICS OY, FI

CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA MANUFACTURING CO., JP

CREP Change of representative

Representative=s name: PLOUGMANN VINGTOFT, POSTBOKS 1003 SENTRUM, 0104