NO20073688L - Oscillerende mikromekanisk vinkelhastighetssensor - Google Patents

Oscillerende mikromekanisk vinkelhastighetssensor

Info

Publication number
NO20073688L
NO20073688L NO20073688A NO20073688A NO20073688L NO 20073688 L NO20073688 L NO 20073688L NO 20073688 A NO20073688 A NO 20073688A NO 20073688 A NO20073688 A NO 20073688A NO 20073688 L NO20073688 L NO 20073688L
Authority
NO
Norway
Prior art keywords
angular velocity
velocity sensor
oscillating micromechanical
oscillating
springs
Prior art date
Application number
NO20073688A
Other languages
English (en)
Other versions
NO339420B1 (no
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of NO20073688L publication Critical patent/NO20073688L/no
Publication of NO339420B1 publication Critical patent/NO339420B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)

Abstract

Oppfinnelsen vedrører måleinnretninger som benyttes ved måling av vinkelhastigheter, og mer særskilt vedrører oppfinnelsen oscillerende mikromekaniske vinkelhastighetssensorer. I en vinkelhastighetssensor ifølge oppfinnelsen er seismikkmasser (1, 2, 36, 37) forbundet med bæreområder ved hjelp av fjærer eller ved hjelp av fjærer og stive hjelpestrukturer, hvorved massene (1, 2, 36, 37) får en frihetsgrad i forhold til en rotasjonsakse perpendikulært på planet til den skiven som dannes av massen, og i forhold til minst én rotasjonsakse parallelt med skiveplanet. Strukturen til vinkelhastighetssensoren muliggjør en pålitelig og effektiv måling, særlig med kompakte og oscillerende mikromekaniske vinkelhastighetssensorer.
NO20073688A 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor NO339420B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
PCT/FI2005/000557 WO2006070059A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
NO20073688L true NO20073688L (no) 2007-10-01
NO339420B1 NO339420B1 (no) 2016-12-12

Family

ID=33548065

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20073688A NO339420B1 (no) 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor

Country Status (11)

Country Link
US (1) US7454971B2 (no)
EP (2) EP1831643B1 (no)
JP (4) JP5006208B2 (no)
KR (1) KR100936638B1 (no)
CN (1) CN101120232B (no)
CA (1) CA2586707C (no)
ES (1) ES2477570T3 (no)
FI (1) FI116543B (no)
IL (1) IL183573A (no)
NO (1) NO339420B1 (no)
WO (1) WO2006070059A1 (no)

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JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6627911B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
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Also Published As

Publication number Publication date
JP5006208B2 (ja) 2012-08-22
EP1831643A4 (en) 2010-09-01
EP1831643A1 (en) 2007-09-12
JP2011145298A (ja) 2011-07-28
CN101120232B (zh) 2011-07-06
JP5514384B2 (ja) 2014-06-04
EP1831643B1 (en) 2012-08-01
US7454971B2 (en) 2008-11-25
CA2586707A1 (en) 2006-07-06
KR20070094920A (ko) 2007-09-27
JP2008527318A (ja) 2008-07-24
JP2011149944A (ja) 2011-08-04
JP2011137826A (ja) 2011-07-14
EP2527789B1 (en) 2014-04-09
FI116543B (fi) 2005-12-15
FI20041708A0 (fi) 2004-12-31
CA2586707C (en) 2011-02-08
KR100936638B1 (ko) 2010-01-14
WO2006070059A1 (en) 2006-07-06
NO339420B1 (no) 2016-12-12
ES2477570T3 (es) 2014-07-17
IL183573A0 (en) 2007-09-20
US20060156814A1 (en) 2006-07-20
EP2527789A1 (en) 2012-11-28
IL183573A (en) 2011-03-31
CN101120232A (zh) 2008-02-06

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Legal Events

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CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA ELECTRONICS OY, FI

CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA MANUFACTURING CO., JP

CREP Change of representative

Representative=s name: PLOUGMANN VINGTOFT, POSTBOKS 1003 SENTRUM, 0104