NO300078B1 - Fotoakustisk gassdetektor - Google Patents

Fotoakustisk gassdetektor Download PDF

Info

Publication number
NO300078B1
NO300078B1 NO950505A NO950505A NO300078B1 NO 300078 B1 NO300078 B1 NO 300078B1 NO 950505 A NO950505 A NO 950505A NO 950505 A NO950505 A NO 950505A NO 300078 B1 NO300078 B1 NO 300078B1
Authority
NO
Norway
Prior art keywords
chamber
gas
gas detector
membrane
detector according
Prior art date
Application number
NO950505A
Other languages
English (en)
Norwegian (no)
Other versions
NO950505D0 (no
NO950505L (no
Inventor
Ralph W Bernstein
Per A Oehlckers
Alain Ferber
Original Assignee
Sinvent As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sinvent As filed Critical Sinvent As
Priority to NO950505A priority Critical patent/NO300078B1/no
Publication of NO950505D0 publication Critical patent/NO950505D0/no
Priority to EP96903273A priority patent/EP0871860B1/de
Priority to DE69610225T priority patent/DE69610225T2/de
Priority to AT96903273T priority patent/ATE196197T1/de
Priority to PCT/NO1996/000024 priority patent/WO1996024831A1/en
Priority to US08/875,883 priority patent/US6082178A/en
Priority to AU47334/96A priority patent/AU4733496A/en
Publication of NO950505L publication Critical patent/NO950505L/no
Publication of NO300078B1 publication Critical patent/NO300078B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Landscapes

  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Drying Of Semiconductors (AREA)
NO950505A 1995-02-10 1995-02-10 Fotoakustisk gassdetektor NO300078B1 (no)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NO950505A NO300078B1 (no) 1995-02-10 1995-02-10 Fotoakustisk gassdetektor
EP96903273A EP0871860B1 (de) 1995-02-10 1996-02-02 Photoakustischer gasdetektor
DE69610225T DE69610225T2 (de) 1995-02-10 1996-02-02 Photoakustischer gasdetektor
AT96903273T ATE196197T1 (de) 1995-02-10 1996-02-02 Photoakustischer gasdetektor
PCT/NO1996/000024 WO1996024831A1 (en) 1995-02-10 1996-02-02 Photoacoustic gas detector
US08/875,883 US6082178A (en) 1995-02-10 1996-02-02 Photoacoustic gas detector
AU47334/96A AU4733496A (en) 1995-02-10 1996-02-02 Photoacoustic gas detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO950505A NO300078B1 (no) 1995-02-10 1995-02-10 Fotoakustisk gassdetektor

Publications (3)

Publication Number Publication Date
NO950505D0 NO950505D0 (no) 1995-02-10
NO950505L NO950505L (no) 1996-08-12
NO300078B1 true NO300078B1 (no) 1997-04-01

Family

ID=19897915

Family Applications (1)

Application Number Title Priority Date Filing Date
NO950505A NO300078B1 (no) 1995-02-10 1995-02-10 Fotoakustisk gassdetektor

Country Status (7)

Country Link
US (1) US6082178A (de)
EP (1) EP0871860B1 (de)
AT (1) ATE196197T1 (de)
AU (1) AU4733496A (de)
DE (1) DE69610225T2 (de)
NO (1) NO300078B1 (de)
WO (1) WO1996024831A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO963924A (no) * 1996-09-19 1997-12-15 Nyfotek As Foto-akustisk infrarød detektor
DE19650257A1 (de) * 1996-12-04 1998-06-10 Gerhart Schroff Verfahren und Anordnung zur integralen Dichtheitsprüfung
US5869749A (en) * 1997-04-30 1999-02-09 Honeywell Inc. Micromachined integrated opto-flow gas/liquid sensor
FR2768813B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Spectrometre photoacoustique miniaturise
NO308228B1 (no) * 1997-11-26 2000-08-14 Presens As Dynamisk trykksensor
US6227036B1 (en) 1998-10-28 2001-05-08 The Regents Of The University Of Michigan Multiple microphone photoacoustic leak detection and localization system and method
US6662627B2 (en) 2001-06-22 2003-12-16 Desert Research Institute Photoacoustic instrument for measuring particles in a gas
FI116859B (fi) * 2002-09-30 2006-03-15 Noveltech Solutions Ltd Fotoakustinen detektori
AT6894U3 (de) * 2004-01-28 2005-01-25 Avl List Gmbh Messkammer für photoakustische sensoren
NO321281B1 (no) * 2004-09-15 2006-04-18 Sintef Infrarod kilde
DE102006048839B4 (de) * 2006-10-16 2010-01-07 Eads Deutschland Gmbh Photoakustische Gassensor-Vorrichtung mit mehreren Messzellen
US8022595B2 (en) * 2008-09-02 2011-09-20 Delaware Capital Formation, Inc. Asymmetric composite acoustic wave sensor
DE102008047658B3 (de) 2008-09-12 2010-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gassensor und Verwendung eines Gassensors
DE102009029002B3 (de) 2009-08-28 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Sensor sowie Verfahren zu seiner Herstellung und Verwendung
DE102009045724B3 (de) 2009-10-15 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Gassensor sowie Verfahren zu seiner Herstellung und Verwendung
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
US20130174645A1 (en) * 2012-01-06 2013-07-11 Martin Willett Photoacoustic method for oxygen sensing
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
US9513261B2 (en) * 2013-10-14 2016-12-06 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
EP3265766B1 (de) 2015-03-05 2023-09-27 Honeywell International Inc. Verwendung ausgewählter glastypen und glasdicken im optischen pfad zur beseitigung von querempfindlichkeit auf wasserabsorptionsspitzen
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
CN108351293A (zh) 2015-09-10 2018-07-31 霍尼韦尔国际公司 具有归一化响应和改进灵敏度的气体检测器
WO2017062626A1 (en) 2015-10-09 2017-04-13 Honeywell International Inc. Electromagnetic radiation detector using a planar golay cell
DE102016103646B4 (de) * 2016-01-22 2023-03-02 Infineon Technologies Ag Integriertes photoakustisches gassensormodul
US10451589B2 (en) 2016-06-03 2019-10-22 Infineon Technologies Ag Acoustic wave detector
US10302554B2 (en) * 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
DE102018120061B4 (de) * 2018-08-17 2026-04-16 Infineon Technologies Ag Ein Detektormodul für einen photoakustischen Gassensor, Verfahren zur Herstellung desselben und photoakustischer Gassensor
EP3754325B1 (de) * 2019-06-19 2022-02-16 Infineon Technologies AG Photo-akustischer gassensor
EP3786616A1 (de) * 2019-08-29 2021-03-03 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Mems basierte photoakustische zelle

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412445A (en) * 1981-08-27 1983-11-01 Optimetrics, Inc. Resonant spectrophone system noise elimination
US4740086A (en) * 1984-02-07 1988-04-26 Oskar Oehler Apparatus for the photoacoustic detection of gases
US4598201A (en) * 1984-08-09 1986-07-01 Mine Safety Appliances Company Infrared fluid analyzer employing a pneumatic detector
US4622845A (en) * 1985-03-21 1986-11-18 Westinghouse Electric Corp. Method and apparatus for the detection and measurement of gases
USH651H (en) * 1986-10-30 1989-07-04 The United States Of America As Represented By The Secretary Of The Army Gas phase photoacoustic detector for infrared spectroscopy
DE9006169U1 (de) * 1990-05-31 1991-07-18 Siemens AG, 1000 Berlin und 8000 München Gasanalysator
IT1248992B (it) * 1990-06-25 1995-02-11 Cise Spa Cella optoacustica per la misura di concentrazioni di specie chimiche in fluidi in genere
US5668303A (en) * 1992-04-30 1997-09-16 Forschung E.V Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Sensor having a membrane as part of an electromechanical resonance circuit forming receiver and transmitter converter with interdigital structures spaced apart from one another
US5747808A (en) * 1994-02-14 1998-05-05 Engelhard Sensor Technologies NDIR gas sensor
KR100332742B1 (ko) * 1994-10-26 2002-11-23 엘지전자주식회사 가스센서의제조방법
EP0801296A1 (de) * 1996-03-25 1997-10-15 Cerberus Ag Photoakustischer Gassensor
US5869749A (en) * 1997-04-30 1999-02-09 Honeywell Inc. Micromachined integrated opto-flow gas/liquid sensor

Also Published As

Publication number Publication date
ATE196197T1 (de) 2000-09-15
NO950505D0 (no) 1995-02-10
EP0871860A1 (de) 1998-10-21
NO950505L (no) 1996-08-12
DE69610225T2 (de) 2001-01-04
AU4733496A (en) 1996-08-27
EP0871860B1 (de) 2000-09-06
US6082178A (en) 2000-07-04
WO1996024831A1 (en) 1996-08-15
DE69610225D1 (de) 2000-10-12

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