ATE196197T1 - Photoakustischer gasdetektor - Google Patents

Photoakustischer gasdetektor

Info

Publication number
ATE196197T1
ATE196197T1 AT96903273T AT96903273T ATE196197T1 AT E196197 T1 ATE196197 T1 AT E196197T1 AT 96903273 T AT96903273 T AT 96903273T AT 96903273 T AT96903273 T AT 96903273T AT E196197 T1 ATE196197 T1 AT E196197T1
Authority
AT
Austria
Prior art keywords
chamber
pct
elements
sec
radiation
Prior art date
Application number
AT96903273T
Other languages
English (en)
Inventor
Ralph Bernstein
Per A Oehlckers
Alain Ferber
Original Assignee
Nyfotek As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nyfotek As filed Critical Nyfotek As
Application granted granted Critical
Publication of ATE196197T1 publication Critical patent/ATE196197T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Drying Of Semiconductors (AREA)
AT96903273T 1995-02-10 1996-02-02 Photoakustischer gasdetektor ATE196197T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO950505A NO300078B1 (no) 1995-02-10 1995-02-10 Fotoakustisk gassdetektor
PCT/NO1996/000024 WO1996024831A1 (en) 1995-02-10 1996-02-02 Photoacoustic gas detector

Publications (1)

Publication Number Publication Date
ATE196197T1 true ATE196197T1 (de) 2000-09-15

Family

ID=19897915

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96903273T ATE196197T1 (de) 1995-02-10 1996-02-02 Photoakustischer gasdetektor

Country Status (7)

Country Link
US (1) US6082178A (de)
EP (1) EP0871860B1 (de)
AT (1) ATE196197T1 (de)
AU (1) AU4733496A (de)
DE (1) DE69610225T2 (de)
NO (1) NO300078B1 (de)
WO (1) WO1996024831A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO963924A (no) 1996-09-19 1997-12-15 Nyfotek As Foto-akustisk infrarød detektor
DE19650257A1 (de) * 1996-12-04 1998-06-10 Gerhart Schroff Verfahren und Anordnung zur integralen Dichtheitsprüfung
US5869749A (en) * 1997-04-30 1999-02-09 Honeywell Inc. Micromachined integrated opto-flow gas/liquid sensor
FR2768813B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Spectrometre photoacoustique miniaturise
NO308228B1 (no) * 1997-11-26 2000-08-14 Presens As Dynamisk trykksensor
US6227036B1 (en) 1998-10-28 2001-05-08 The Regents Of The University Of Michigan Multiple microphone photoacoustic leak detection and localization system and method
US6662627B2 (en) 2001-06-22 2003-12-16 Desert Research Institute Photoacoustic instrument for measuring particles in a gas
FI116859B (fi) * 2002-09-30 2006-03-15 Noveltech Solutions Ltd Fotoakustinen detektori
AT6894U3 (de) * 2004-01-28 2005-01-25 Avl List Gmbh Messkammer für photoakustische sensoren
NO321281B1 (no) * 2004-09-15 2006-04-18 Sintef Infrarod kilde
DE102006048839B4 (de) * 2006-10-16 2010-01-07 Eads Deutschland Gmbh Photoakustische Gassensor-Vorrichtung mit mehreren Messzellen
US8022595B2 (en) * 2008-09-02 2011-09-20 Delaware Capital Formation, Inc. Asymmetric composite acoustic wave sensor
DE102008047658B3 (de) * 2008-09-12 2010-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gassensor und Verwendung eines Gassensors
DE102009029002B3 (de) 2009-08-28 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Sensor sowie Verfahren zu seiner Herstellung und Verwendung
DE102009045724B3 (de) 2009-10-15 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Gassensor sowie Verfahren zu seiner Herstellung und Verwendung
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
US20130174645A1 (en) * 2012-01-06 2013-07-11 Martin Willett Photoacoustic method for oxygen sensing
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
US9513261B2 (en) 2013-10-14 2016-12-06 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
US10883875B2 (en) 2015-03-05 2021-01-05 Honeywell International Inc. Use of selected glass types and glass thicknesses in the optical path to remove cross sensitivity to water absorption peaks
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
EP3347698A1 (de) 2015-09-10 2018-07-18 Honeywell International Inc. Gasdetektor mit normalisierter antwort und verbesserter empfindlichkeit
EP3359933A1 (de) 2015-10-09 2018-08-15 Honeywell International Inc. Detektor für elektromagnetische strahlung mit einer planaren golay-zelle
DE102016103646B4 (de) * 2016-01-22 2023-03-02 Infineon Technologies Ag Integriertes photoakustisches gassensormodul
US10451589B2 (en) 2016-06-03 2019-10-22 Infineon Technologies Ag Acoustic wave detector
US10302554B2 (en) * 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
DE102018120061A1 (de) * 2018-08-17 2020-02-20 Infineon Technologies Ag Ein Detektormodul für einen photoakustischen Gassensor
EP3754325B1 (de) * 2019-06-19 2022-02-16 Infineon Technologies AG Photo-akustischer gassensor
EP3786616A1 (de) 2019-08-29 2021-03-03 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Mems basierte photoakustische zelle

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412445A (en) * 1981-08-27 1983-11-01 Optimetrics, Inc. Resonant spectrophone system noise elimination
WO1985003574A1 (fr) * 1984-02-07 1985-08-15 Oskar Oehler Installation pour la detection photo-acoustique de gaz
US4598201A (en) * 1984-08-09 1986-07-01 Mine Safety Appliances Company Infrared fluid analyzer employing a pneumatic detector
US4622845A (en) * 1985-03-21 1986-11-18 Westinghouse Electric Corp. Method and apparatus for the detection and measurement of gases
USH651H (en) * 1986-10-30 1989-07-04 The United States Of America As Represented By The Secretary Of The Army Gas phase photoacoustic detector for infrared spectroscopy
DE9006169U1 (de) * 1990-05-31 1991-07-18 Siemens AG, 1000 Berlin und 8000 München Gasanalysator
IT1248992B (it) * 1990-06-25 1995-02-11 Cise Spa Cella optoacustica per la misura di concentrazioni di specie chimiche in fluidi in genere
US5668303A (en) * 1992-04-30 1997-09-16 Forschung E.V Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Sensor having a membrane as part of an electromechanical resonance circuit forming receiver and transmitter converter with interdigital structures spaced apart from one another
US5747808A (en) * 1994-02-14 1998-05-05 Engelhard Sensor Technologies NDIR gas sensor
KR100332742B1 (ko) * 1994-10-26 2002-11-23 엘지전자주식회사 가스센서의제조방법
EP0801296A1 (de) * 1996-03-25 1997-10-15 Cerberus Ag Photoakustischer Gassensor
US5869749A (en) * 1997-04-30 1999-02-09 Honeywell Inc. Micromachined integrated opto-flow gas/liquid sensor

Also Published As

Publication number Publication date
DE69610225T2 (de) 2001-01-04
NO300078B1 (no) 1997-04-01
DE69610225D1 (de) 2000-10-12
US6082178A (en) 2000-07-04
EP0871860A1 (de) 1998-10-21
AU4733496A (en) 1996-08-27
WO1996024831A1 (en) 1996-08-15
NO950505L (no) 1996-08-12
EP0871860B1 (de) 2000-09-06
NO950505D0 (no) 1995-02-10

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