NO932221D0 - Plasmareaktorhode og elektrodeenhet - Google Patents

Plasmareaktorhode og elektrodeenhet

Info

Publication number
NO932221D0
NO932221D0 NO932221A NO932221A NO932221D0 NO 932221 D0 NO932221 D0 NO 932221D0 NO 932221 A NO932221 A NO 932221A NO 932221 A NO932221 A NO 932221A NO 932221 D0 NO932221 D0 NO 932221D0
Authority
NO
Norway
Prior art keywords
plasma
electrode unit
actor head
actor
head
Prior art date
Application number
NO932221A
Other languages
English (en)
Other versions
NO932221L (no
Inventor
Eric Hansell
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO932221D0 publication Critical patent/NO932221D0/no
Publication of NO932221L publication Critical patent/NO932221L/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
NO932221A 1992-06-17 1993-06-16 Plasmareaktorhode og elektrodeenhet NO932221L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US89980092A 1992-06-17 1992-06-17

Publications (2)

Publication Number Publication Date
NO932221D0 true NO932221D0 (no) 1993-06-16
NO932221L NO932221L (no) 1993-12-20

Family

ID=25411582

Family Applications (1)

Application Number Title Priority Date Filing Date
NO932221A NO932221L (no) 1992-06-17 1993-06-16 Plasmareaktorhode og elektrodeenhet

Country Status (4)

Country Link
EP (1) EP0575126A1 (no)
JP (1) JPH0730469B2 (no)
IL (1) IL106017A0 (no)
NO (1) NO932221L (no)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001273536A1 (en) * 2000-07-20 2002-02-05 Tokyo Electron Limited Automated electrode replacement apparatus for a plasma processing system
US6753498B2 (en) 2000-07-20 2004-06-22 Tokyo Electron Limited Automated electrode replacement apparatus for a plasma processing system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534816A (en) * 1984-06-22 1985-08-13 International Business Machines Corporation Single wafer plasma etch reactor
US5074456A (en) * 1990-09-18 1991-12-24 Lam Research Corporation Composite electrode for plasma processes

Also Published As

Publication number Publication date
EP0575126A1 (en) 1993-12-22
JPH0657456A (ja) 1994-03-01
JPH0730469B2 (ja) 1995-04-05
NO932221L (no) 1993-12-20
IL106017A0 (en) 1993-10-20

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