PL2171394T3 - Sposób kompensacji błędów pomiarowych wynikających z odkształceń łoża maszyny pomiarowej spowodowanych obciążeniem wywieranym przez mierzony przedmiot oraz maszyna pomiarowa pracująca według tego sposobu - Google Patents

Sposób kompensacji błędów pomiarowych wynikających z odkształceń łoża maszyny pomiarowej spowodowanych obciążeniem wywieranym przez mierzony przedmiot oraz maszyna pomiarowa pracująca według tego sposobu

Info

Publication number
PL2171394T3
PL2171394T3 PL07805733T PL07805733T PL2171394T3 PL 2171394 T3 PL2171394 T3 PL 2171394T3 PL 07805733 T PL07805733 T PL 07805733T PL 07805733 T PL07805733 T PL 07805733T PL 2171394 T3 PL2171394 T3 PL 2171394T3
Authority
PL
Poland
Prior art keywords
measuring machine
bed
deformation
measured object
measurement errors
Prior art date
Application number
PL07805733T
Other languages
English (en)
Other versions
PL2171394T5 (pl
Inventor
Lorenzo Merlo
Original Assignee
Hexagon Metrology Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39473631&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL2171394(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hexagon Metrology Spa filed Critical Hexagon Metrology Spa
Publication of PL2171394T3 publication Critical patent/PL2171394T3/pl
Publication of PL2171394T5 publication Critical patent/PL2171394T5/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0016—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to weight
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Numerical Control (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
PL07805733.8T 2007-07-24 2007-07-24 Sposób kompensacji błędów pomiarowych wynikających z odkształceń łoża maszyny pomiarowej spowodowanych obciążeniem wywieranym przez mierzony przedmiot oraz maszyna pomiarowa pracująca według tego sposobu PL2171394T5 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07805733.8A EP2171394B2 (en) 2007-07-24 2007-07-24 Method for compensating measurement errors caused by deformations of a measuring machine bed under the load of a workpiece and measuring machine operating according to said method
PCT/IT2007/000521 WO2009013769A1 (en) 2007-07-24 2007-07-24 Method for compensating measurement errors caused by deformations of a measuring machine bed under the load of a workpiece and measuring machine operating according to said method

Publications (2)

Publication Number Publication Date
PL2171394T3 true PL2171394T3 (pl) 2013-11-29
PL2171394T5 PL2171394T5 (pl) 2021-02-22

Family

ID=39473631

Family Applications (1)

Application Number Title Priority Date Filing Date
PL07805733.8T PL2171394T5 (pl) 2007-07-24 2007-07-24 Sposób kompensacji błędów pomiarowych wynikających z odkształceń łoża maszyny pomiarowej spowodowanych obciążeniem wywieranym przez mierzony przedmiot oraz maszyna pomiarowa pracująca według tego sposobu

Country Status (7)

Country Link
US (1) US9212888B2 (pl)
EP (1) EP2171394B2 (pl)
CN (1) CN101896790B (pl)
ES (1) ES2428219T5 (pl)
PL (1) PL2171394T5 (pl)
TW (1) TWI468644B (pl)
WO (1) WO2009013769A1 (pl)

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DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
WO2011090888A2 (en) 2010-01-20 2011-07-28 Faro Technologies, Inc. Coordinate measuring machine having an illuminated probe end and method of operation
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
DE112011100294B4 (de) 2010-01-20 2019-06-13 Faro Technologies Inc. Tragbares Gelenkarm-Koordinatenmessgerät mit einer Multibus-Armtechnologie
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
DE112011100292B4 (de) 2010-01-20 2016-11-24 Faro Technologies Inc. Anzeige für ein Koordinatenmessgerät
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
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US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
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TW201326741A (zh) * 2011-12-20 2013-07-01 Metal Ind Res & Dev Ct 探針量測補償方法
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US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
GB201308467D0 (en) 2013-05-10 2013-06-19 Renishaw Plc Method and Apparatus for Inspecting Workpieces
DE102015201583B4 (de) 2015-01-29 2018-07-26 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Ermittlung eines auf eine Drehvorrichtung einwirkenden Moments oder einer auf eine Drehvorrichtung einwirkenden Kraft
JP6352833B2 (ja) * 2015-02-26 2018-07-04 住友重機械工業株式会社 形状計測装置、加工装置及び形状計測方法
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JP6171259B1 (ja) * 2016-03-31 2017-08-02 株式会社東京精密 表面形状測定装置及び表面形状測定方法
CN110657743B (zh) * 2018-06-28 2021-08-31 上海微电子装备（集团）股份有限公司 一种栅格误差的测量方法、测量装置以及光学设备
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Also Published As

Publication number Publication date
US20100286941A1 (en) 2010-11-11
ES2428219T5 (es) 2021-02-18
CN101896790A (zh) 2010-11-24
ES2428219T3 (es) 2013-11-06
EP2171394A1 (en) 2010-04-07
EP2171394B9 (en) 2014-01-01
PL2171394T5 (pl) 2021-02-22
EP2171394B1 (en) 2013-06-26
CN101896790B (zh) 2013-05-29
US9212888B2 (en) 2015-12-15
EP2171394B2 (en) 2020-07-15
TWI468644B (zh) 2015-01-11
ES2428219T9 (es) 2014-05-09
TW200916721A (en) 2009-04-16
WO2009013769A1 (en) 2009-01-29

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