PL355890A1 - Sposób formowania nanostruktury krzemowej, układukrzemowych kwantowych nanodrutów i urządzenia oparte na nim - Google Patents

Sposób formowania nanostruktury krzemowej, układukrzemowych kwantowych nanodrutów i urządzenia oparte na nim

Info

Publication number
PL355890A1
PL355890A1 PL00355890A PL35589000A PL355890A1 PL 355890 A1 PL355890 A1 PL 355890A1 PL 00355890 A PL00355890 A PL 00355890A PL 35589000 A PL35589000 A PL 35589000A PL 355890 A1 PL355890 A1 PL 355890A1
Authority
PL
Poland
Prior art keywords
silicon
devices based
nanostructure
quantum nanowires
forming
Prior art date
Application number
PL00355890A
Other languages
English (en)
Inventor
Valery Konstantinovich Smirnov
Dmitry Stanislavovich Kibalov
Original Assignee
Sceptre Electronics Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sceptre Electronics Limited filed Critical Sceptre Electronics Limited
Publication of PL355890A1 publication Critical patent/PL355890A1/pl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/014—Manufacture or treatment of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron transistors [SET] or Coulomb blockade transistors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/812—Single quantum well structures
    • H10D62/813—Quantum wire structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Film Transistor (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
PL00355890A 1999-11-25 2000-10-02 Sposób formowania nanostruktury krzemowej, układukrzemowych kwantowych nanodrutów i urządzenia oparte na nim PL355890A1 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU99124768/28A RU2173003C2 (ru) 1999-11-25 1999-11-25 Способ образования кремниевой наноструктуры, решетки кремниевых квантовых проводков и основанных на них устройств

Publications (1)

Publication Number Publication Date
PL355890A1 true PL355890A1 (pl) 2004-05-31

Family

ID=20227346

Family Applications (1)

Application Number Title Priority Date Filing Date
PL00355890A PL355890A1 (pl) 1999-11-25 2000-10-02 Sposób formowania nanostruktury krzemowej, układukrzemowych kwantowych nanodrutów i urządzenia oparte na nim

Country Status (23)

Country Link
US (1) US6274007B1 (pl)
EP (1) EP1104011A1 (pl)
JP (1) JP2001156050A (pl)
KR (1) KR20020069195A (pl)
CN (1) CN1399791A (pl)
AU (1) AU7547400A (pl)
BG (1) BG106739A (pl)
BR (1) BR0016095A (pl)
CA (1) CA2392307A1 (pl)
CZ (1) CZ20021824A3 (pl)
EE (1) EE200200261A (pl)
HR (1) HRP20020459A2 (pl)
HU (1) HUP0203517A2 (pl)
IL (1) IL149832A0 (pl)
IS (1) IS6393A (pl)
MX (1) MXPA02005281A (pl)
NO (1) NO20022427L (pl)
PL (1) PL355890A1 (pl)
RU (1) RU2173003C2 (pl)
SK (1) SK7442002A3 (pl)
WO (1) WO2001039259A1 (pl)
YU (1) YU38202A (pl)
ZA (1) ZA200204822B (pl)

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Publication number Publication date
IS6393A (is) 2002-05-24
JP2001156050A (ja) 2001-06-08
CZ20021824A3 (cs) 2004-10-13
RU2173003C2 (ru) 2001-08-27
WO2001039259A1 (en) 2001-05-31
CN1399791A (zh) 2003-02-26
KR20020069195A (ko) 2002-08-29
US6274007B1 (en) 2001-08-14
NO20022427L (no) 2002-06-25
HRP20020459A2 (en) 2005-10-31
IL149832A0 (en) 2002-11-10
NO20022427D0 (no) 2002-05-22
EE200200261A (et) 2003-08-15
HUP0203517A2 (en) 2003-07-28
ZA200204822B (en) 2003-11-26
CA2392307A1 (en) 2001-05-31
SK7442002A3 (en) 2003-05-02
AU7547400A (en) 2001-06-04
EP1104011A1 (en) 2001-05-30
BG106739A (bg) 2003-08-29
BR0016095A (pt) 2004-03-23
YU38202A (sh) 2006-08-17
MXPA02005281A (es) 2006-02-10

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