BR0016095A - Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos - Google Patents

Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos

Info

Publication number
BR0016095A
BR0016095A BR0016095-4A BR0016095A BR0016095A BR 0016095 A BR0016095 A BR 0016095A BR 0016095 A BR0016095 A BR 0016095A BR 0016095 A BR0016095 A BR 0016095A
Authority
BR
Brazil
Prior art keywords
silicone
relief
vector
wave
nanostructure
Prior art date
Application number
BR0016095-4A
Other languages
English (en)
Inventor
Valery K Smirnov
Dmitri S Kibalov
Original Assignee
Sceptre Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sceptre Electronics Ltd filed Critical Sceptre Electronics Ltd
Publication of BR0016095A publication Critical patent/BR0016095A/pt

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/014—Manufacture or treatment of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron transistors [SET] or Coulomb blockade transistors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/812—Single quantum well structures
    • H10D62/813—Quantum wire structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Film Transistor (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

"MéTODOS PARA A MOLDAGEM DE UMA NANOESTRUTURA DE SILICONE, UM VETOR DE FIOS QUâNTICOS DE SILICONE E DISPOSITIVOS BASEADOS NOS MESMOS". Um processo para a moldagem controlável de nanoestruturas de silicone tais como um vetor de fios quanticos de silicone. Uma superfície de silicone é borrifada por um fluxo uniforme de íons moleculares de nitrogênio dentro de um vácuo extremo de maneira a formar um alívio periódico similar a uma onda no qual os recóncavos do referido alívio estão nivelados com a fronteira entre o silicone e o isolante do material SOI. A energia iónica, o ângulo de incidência iónica em relação à superfície do referido material, a temperatura da camada de silicone, a profundidade de moldagem do alívio similar a uma onda, a altura do referido alívio similar a uma onda e a faixa de penetração iónica dentro do silicone são todos determinados com base num comprimento de onda selecionado do alívio similar a uma onda dentro da faixa de 9 a 120 nm. Uma máscara de nitreto de silicone apresentando bordas pendentes é utilizada para definir a área da superfície de silicone sobre a qual o vetor é formado. As impurezas são removidas da superfície de silicone dentro da janela de máscara antes do espirramento. A fim de moldar um vetor de fios quânticos de silicone, a espessura da camada de silicone SOI é selecionada para ser maior do que a soma das referidas profundidade de moldagem, da referida altura e da referida faixa de penetração iónica, sendo a fabricação dos fios de silicone controlada por um valor limite de um sinal de emissão de íon secundário a partir do isolante SOI. A nano-estrutura pode ser empregada em dispositivos opto-electrónicos e nano-eletrónicos tais como um FET.
BR0016095-4A 1999-11-25 2000-10-02 Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos BR0016095A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU99124768/28A RU2173003C2 (ru) 1999-11-25 1999-11-25 Способ образования кремниевой наноструктуры, решетки кремниевых квантовых проводков и основанных на них устройств
PCT/IB2000/001397 WO2001039259A1 (en) 1999-11-25 2000-10-02 Methods of formation of a silicon nanostructure, a silicon quantum wire array and devices based thereon

Publications (1)

Publication Number Publication Date
BR0016095A true BR0016095A (pt) 2004-03-23

Family

ID=20227346

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0016095-4A BR0016095A (pt) 1999-11-25 2000-10-02 Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos

Country Status (23)

Country Link
US (1) US6274007B1 (pt)
EP (1) EP1104011A1 (pt)
JP (1) JP2001156050A (pt)
KR (1) KR20020069195A (pt)
CN (1) CN1399791A (pt)
AU (1) AU7547400A (pt)
BG (1) BG106739A (pt)
BR (1) BR0016095A (pt)
CA (1) CA2392307A1 (pt)
CZ (1) CZ20021824A3 (pt)
EE (1) EE200200261A (pt)
HR (1) HRP20020459A2 (pt)
HU (1) HUP0203517A2 (pt)
IL (1) IL149832A0 (pt)
IS (1) IS6393A (pt)
MX (1) MXPA02005281A (pt)
NO (1) NO20022427L (pt)
PL (1) PL355890A1 (pt)
RU (1) RU2173003C2 (pt)
SK (1) SK7442002A3 (pt)
WO (1) WO2001039259A1 (pt)
YU (1) YU38202A (pt)
ZA (1) ZA200204822B (pt)

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US6274007B1 (en) 2001-08-14
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