PL374710A1 - Katoda do urządzenia do obróbki przez napylanie próżniowe - Google Patents

Katoda do urządzenia do obróbki przez napylanie próżniowe

Info

Publication number
PL374710A1
PL374710A1 PL03374710A PL37471003A PL374710A1 PL 374710 A1 PL374710 A1 PL 374710A1 PL 03374710 A PL03374710 A PL 03374710A PL 37471003 A PL37471003 A PL 37471003A PL 374710 A1 PL374710 A1 PL 374710A1
Authority
PL
Poland
Prior art keywords
catching
cathode
frame
target plate
elements
Prior art date
Application number
PL03374710A
Other languages
English (en)
Other versions
PL207702B1 (pl
Inventor
Michel Aulagner
Lionel Labalme
Original Assignee
Tecmachine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tecmachine filed Critical Tecmachine
Publication of PL374710A1 publication Critical patent/PL374710A1/pl
Publication of PL207702B1 publication Critical patent/PL207702B1/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Nozzles (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Connection Of Plates (AREA)
PL374710A 2002-07-10 2003-07-08 Katoda do urządzenia do napylania próżniowego PL207702B1 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0208868A FR2842347B1 (fr) 2002-07-10 2002-07-10 Cathode pour machine de traitement par pulverisation sous vide
PCT/FR2003/002110 WO2004008478A2 (fr) 2002-07-10 2003-07-08 Cathode pour machine de traitement par pulverisation sous vide

Publications (2)

Publication Number Publication Date
PL374710A1 true PL374710A1 (pl) 2005-10-31
PL207702B1 PL207702B1 (pl) 2011-01-31

Family

ID=29763835

Family Applications (1)

Application Number Title Priority Date Filing Date
PL374710A PL207702B1 (pl) 2002-07-10 2003-07-08 Katoda do urządzenia do napylania próżniowego

Country Status (14)

Country Link
US (1) US7235162B2 (pl)
EP (1) EP1523757B1 (pl)
JP (1) JP4377324B2 (pl)
CN (1) CN100489148C (pl)
AT (1) ATE341830T1 (pl)
AU (1) AU2003264692A1 (pl)
BR (2) BRPI0312578B1 (pl)
CA (1) CA2492172C (pl)
DE (1) DE60308871T2 (pl)
FR (1) FR2842347B1 (pl)
MX (1) MXPA05000455A (pl)
PL (1) PL207702B1 (pl)
TW (1) TWI265205B (pl)
WO (1) WO2004008478A2 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101588760B (zh) 2007-01-26 2012-05-09 奥林巴斯医疗株式会社 把持装置及把持器具
SE542687C2 (en) 2018-06-27 2020-06-23 Impact Coatings Ab Publ Arc source system for a cathode

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596920A1 (fr) * 1986-04-03 1987-10-09 Saint Roch Sa Glaceries Cathode de pulverisation
US5269894A (en) * 1991-05-08 1993-12-14 Balzers Aktiengesellschaft Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
US5147521A (en) * 1991-05-20 1992-09-15 Tosoh Smd, Inc. Quick change sputter target assembly
DE29512094U1 (de) * 1995-07-27 1996-02-01 Heron Sondermaschinen Und Steuerungen Ges.M.B.H., Lustenau Klemmvorrichtung für Schutzeinrichtungen an Maschinen u.dgl.
DE19535894A1 (de) * 1995-09-27 1997-04-03 Leybold Materials Gmbh Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
US5863397A (en) * 1997-07-11 1999-01-26 Taiwan Semiconductor Manufacturing Co Ltd. Target mounting apparatus for vapor deposition system

Also Published As

Publication number Publication date
DE60308871T2 (de) 2007-05-10
TWI265205B (en) 2006-11-01
BR0312578A (pt) 2005-04-12
FR2842347B1 (fr) 2004-12-03
CN1679137A (zh) 2005-10-05
MXPA05000455A (es) 2005-07-22
WO2004008478A2 (fr) 2004-01-22
BRPI0312578B8 (pt) 2018-04-24
PL207702B1 (pl) 2011-01-31
CA2492172C (fr) 2014-04-15
WO2004008478A3 (fr) 2004-04-01
CN100489148C (zh) 2009-05-20
JP2005532479A (ja) 2005-10-27
US7235162B2 (en) 2007-06-26
FR2842347A1 (fr) 2004-01-16
AU2003264692A1 (en) 2004-02-02
DE60308871D1 (de) 2006-11-16
CA2492172A1 (fr) 2004-01-22
ATE341830T1 (de) 2006-10-15
BRPI0312578B1 (pt) 2017-04-11
US20050133366A1 (en) 2005-06-23
EP1523757A2 (fr) 2005-04-20
TW200401838A (en) 2004-02-01
EP1523757B1 (fr) 2006-10-04
JP4377324B2 (ja) 2009-12-02

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