PL379198A1 - Sposób wytwarzania struktur krzemowych z warstwą zagrzebaną - Google Patents

Sposób wytwarzania struktur krzemowych z warstwą zagrzebaną

Info

Publication number
PL379198A1
PL379198A1 PL379198A PL37919806A PL379198A1 PL 379198 A1 PL379198 A1 PL 379198A1 PL 379198 A PL379198 A PL 379198A PL 37919806 A PL37919806 A PL 37919806A PL 379198 A1 PL379198 A1 PL 379198A1
Authority
PL
Poland
Prior art keywords
production
buried layer
siliceous structures
siliceous
structures
Prior art date
Application number
PL379198A
Other languages
English (en)
Other versions
PL206858B1 (pl
Inventor
Andrzej Misiuk
Irina V. Antonowa
Marek Prujszczyk
Original Assignee
Instytut Technologii Elektronowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Technologii Elektronowej filed Critical Instytut Technologii Elektronowej
Priority to PL379198A priority Critical patent/PL206858B1/pl
Priority claimed from PL379198A external-priority patent/PL206858B1/pl
Publication of PL379198A1 publication Critical patent/PL379198A1/pl
Publication of PL206858B1 publication Critical patent/PL206858B1/pl

Links

PL379198A 2006-03-14 Sposób wytwarzania struktur krzemowych z warstw a zagrzeban a PL206858B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL379198A PL206858B1 (pl) 2006-03-14 Sposób wytwarzania struktur krzemowych z warstw a zagrzeban a

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL379198A PL206858B1 (pl) 2006-03-14 Sposób wytwarzania struktur krzemowych z warstw a zagrzeban a

Publications (2)

Publication Number Publication Date
PL379198A1 true PL379198A1 (pl) 2007-09-17
PL206858B1 PL206858B1 (pl) 2010-09-30

Family

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