PL3825003T3 - Sposób wytwarzania urządzenia mikroprzepływowego - Google Patents

Sposób wytwarzania urządzenia mikroprzepływowego

Info

Publication number
PL3825003T3
PL3825003T3 PL19210724.1T PL19210724T PL3825003T3 PL 3825003 T3 PL3825003 T3 PL 3825003T3 PL 19210724 T PL19210724 T PL 19210724T PL 3825003 T3 PL3825003 T3 PL 3825003T3
Authority
PL
Poland
Prior art keywords
producing
microfluidic device
microfluidic
Prior art date
Application number
PL19210724.1T
Other languages
English (en)
Inventor
Tobias Bauert
Daniel Grogg
Original Assignee
Imt Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imt Ag filed Critical Imt Ag
Publication of PL3825003T3 publication Critical patent/PL3825003T3/pl

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/73Etching of wafers, substrates or parts of devices using masks for insulating materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • B01L2300/0645Electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
PL19210724.1T 2019-11-21 2019-11-21 Sposób wytwarzania urządzenia mikroprzepływowego PL3825003T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210724.1A EP3825003B1 (de) 2019-11-21 2019-11-21 Verfahren zur fertigung einer mikrofluidischen vorrichtung

Publications (1)

Publication Number Publication Date
PL3825003T3 true PL3825003T3 (pl) 2022-08-22

Family

ID=68653390

Family Applications (1)

Application Number Title Priority Date Filing Date
PL19210724.1T PL3825003T3 (pl) 2019-11-21 2019-11-21 Sposób wytwarzania urządzenia mikroprzepływowego

Country Status (3)

Country Link
US (1) US11607683B2 (pl)
EP (1) EP3825003B1 (pl)
PL (1) PL3825003T3 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4102543A1 (en) * 2021-06-09 2022-12-14 IMEC vzw A method for transferring a layer to a substrate
US20260121390A1 (en) * 2024-10-28 2026-04-30 Adeia Semiconductor Bonding Technologies Inc. Transparent electrically conductive layers for fluidic cavities

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5562838A (en) 1993-03-29 1996-10-08 Martin Marietta Corporation Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
US5554488A (en) * 1994-07-28 1996-09-10 Northern Telecom Limited Semiconductor device structure and method of formation thereof
US6180536B1 (en) * 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
US8563325B1 (en) * 2009-09-29 2013-10-22 Sandia Corporation Coaxial microreactor for particle synthesis
GB2515571A (en) * 2013-06-28 2014-12-31 Ibm Fabrication of microfluidic chips having electrodes level with microchannel walls
US9620373B1 (en) * 2015-12-31 2017-04-11 Globalfoundries Singaporepte. Ltd. Methods for fabricating semiconductor or micromachined devices with metal structures and methods for forming self-aligned deep cavity metal structures
US9728444B2 (en) * 2015-12-31 2017-08-08 International Business Machines Corporation Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch

Also Published As

Publication number Publication date
EP3825003B1 (de) 2022-06-01
US20210154660A1 (en) 2021-05-27
US11607683B2 (en) 2023-03-21
EP3825003A1 (de) 2021-05-26

Similar Documents

Publication Publication Date Title
PL3666525T3 (pl) Sposób wytwarzania strukturyzowanej powierzchni
PL3478400T3 (pl) Ciągły sposób wytwarzania aerożelu
DK3411212T3 (da) Fremgangsmåde til fremstilling af en drivrem
DK3152022T3 (da) Fremgangsmåde til fremstilling af en gipsplade og den gipsplade som opnås derved
IL272530A (en) Pellicle and method for producing pellicle
IL265016B (en) Methods for purifying antibodies
EP3462694A4 (en) UNDER-FRAME CONFIGURATION PROCESS AND RELATED DEVICES
HUE051940T2 (hu) Eljárás texturált protein elõállítására
EP4046129C0 (fr) Procédé de fabrication
IL271142A (en) An apparatus and method for controlling execution of instructions
EP3470546A4 (en) FILM FORMING METHOD
EP3435685A4 (en) MEMBRANE AND MANUFACTURING METHOD FOR MEMBRANE
PL3120710T3 (pl) Sposób wytwarzania chipsów serowych
DK3519394T3 (da) Fremgangsmåde til fremstilling af den krystallinske form af modifikation a af calcobutrol
EP3685994C0 (de) Stereolithographie-vorrichtung
EP3345649A4 (en) METHOD FOR PRODUCING MICRONED NEEDLES
PL3272480T3 (pl) Sposób wytwarzania płyty pilśniowej
SE1651513A1 (sv) Method for making a film comprising mfc
SI3274092T1 (sl) Postopek izdelave mikrofluidne naprave
IL285984A (en) Method for producing influenza ha split vaccine
DK3252143T3 (da) Metode til produktion af en platelet-lysat-indeholdende gel
PL3877193T3 (pl) Sposób wytwarzania cechy bezpieczeństwa
DK3721980T3 (da) Mikrofluidindretning til emulsionsfremstilling
DK3386703T3 (da) Fremgangsmåde til fremstilling af et prækursormateriale
IL288899A (en) Method for producing dihydroisoxazole