PL3825003T3 - Sposób wytwarzania urządzenia mikroprzepływowego - Google Patents
Sposób wytwarzania urządzenia mikroprzepływowegoInfo
- Publication number
- PL3825003T3 PL3825003T3 PL19210724.1T PL19210724T PL3825003T3 PL 3825003 T3 PL3825003 T3 PL 3825003T3 PL 19210724 T PL19210724 T PL 19210724T PL 3825003 T3 PL3825003 T3 PL 3825003T3
- Authority
- PL
- Poland
- Prior art keywords
- producing
- microfluidic device
- microfluidic
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/73—Etching of wafers, substrates or parts of devices using masks for insulating materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19210724.1A EP3825003B1 (de) | 2019-11-21 | 2019-11-21 | Verfahren zur fertigung einer mikrofluidischen vorrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL3825003T3 true PL3825003T3 (pl) | 2022-08-22 |
Family
ID=68653390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL19210724.1T PL3825003T3 (pl) | 2019-11-21 | 2019-11-21 | Sposób wytwarzania urządzenia mikroprzepływowego |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11607683B2 (pl) |
| EP (1) | EP3825003B1 (pl) |
| PL (1) | PL3825003T3 (pl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4102543A1 (en) * | 2021-06-09 | 2022-12-14 | IMEC vzw | A method for transferring a layer to a substrate |
| US20260121390A1 (en) * | 2024-10-28 | 2026-04-30 | Adeia Semiconductor Bonding Technologies Inc. | Transparent electrically conductive layers for fluidic cavities |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5562838A (en) | 1993-03-29 | 1996-10-08 | Martin Marietta Corporation | Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography |
| US5554488A (en) * | 1994-07-28 | 1996-09-10 | Northern Telecom Limited | Semiconductor device structure and method of formation thereof |
| US6180536B1 (en) * | 1998-06-04 | 2001-01-30 | Cornell Research Foundation, Inc. | Suspended moving channels and channel actuators for microfluidic applications and method for making |
| US8563325B1 (en) * | 2009-09-29 | 2013-10-22 | Sandia Corporation | Coaxial microreactor for particle synthesis |
| GB2515571A (en) * | 2013-06-28 | 2014-12-31 | Ibm | Fabrication of microfluidic chips having electrodes level with microchannel walls |
| US9620373B1 (en) * | 2015-12-31 | 2017-04-11 | Globalfoundries Singaporepte. Ltd. | Methods for fabricating semiconductor or micromachined devices with metal structures and methods for forming self-aligned deep cavity metal structures |
| US9728444B2 (en) * | 2015-12-31 | 2017-08-08 | International Business Machines Corporation | Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch |
-
2019
- 2019-11-21 EP EP19210724.1A patent/EP3825003B1/de active Active
- 2019-11-21 PL PL19210724.1T patent/PL3825003T3/pl unknown
-
2020
- 2020-11-16 US US17/098,470 patent/US11607683B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3825003B1 (de) | 2022-06-01 |
| US20210154660A1 (en) | 2021-05-27 |
| US11607683B2 (en) | 2023-03-21 |
| EP3825003A1 (de) | 2021-05-26 |
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