PT2080228T - Dispositivo de alimentação de transístor pseudomórfico de alta mobilidade de eletrões (phemt) com tensão de alimentação única e processo para o fabrico do mesmo - Google Patents

Dispositivo de alimentação de transístor pseudomórfico de alta mobilidade de eletrões (phemt) com tensão de alimentação única e processo para o fabrico do mesmo

Info

Publication number
PT2080228T
PT2080228T PT68217231T PT06821723T PT2080228T PT 2080228 T PT2080228 T PT 2080228T PT 68217231 T PT68217231 T PT 68217231T PT 06821723 T PT06821723 T PT 06821723T PT 2080228 T PT2080228 T PT 2080228T
Authority
PT
Portugal
Prior art keywords
phemt
manufacturing
power device
voltage supply
same
Prior art date
Application number
PT68217231T
Other languages
English (en)
Original Assignee
Leonardo Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leonardo Spa filed Critical Leonardo Spa
Publication of PT2080228T publication Critical patent/PT2080228T/pt

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/40FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having two-dimensional [2D] charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H10D30/4732High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material
    • H10D30/4738High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material having multiple donor layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/815Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
    • H10D62/8161Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices
    • H10D62/8162Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation
    • H10D62/8164Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation comprising only semiconductor materials 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251Source or drain electrodes for field-effect devices
    • H10D64/254Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes extend entirely through the semiconductor bodies, e.g. via-holes for back side contacts
PT68217231T 2006-10-04 2006-10-04 Dispositivo de alimentação de transístor pseudomórfico de alta mobilidade de eletrões (phemt) com tensão de alimentação única e processo para o fabrico do mesmo PT2080228T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IT2006/000705 WO2008041249A1 (en) 2006-10-04 2006-10-04 Single voltage supply pseudomorphic high electron mobility transistor (phemt) power device and process for manufacturing the same

Publications (1)

Publication Number Publication Date
PT2080228T true PT2080228T (pt) 2020-12-23

Family

ID=38043017

Family Applications (1)

Application Number Title Priority Date Filing Date
PT68217231T PT2080228T (pt) 2006-10-04 2006-10-04 Dispositivo de alimentação de transístor pseudomórfico de alta mobilidade de eletrões (phemt) com tensão de alimentação única e processo para o fabrico do mesmo

Country Status (9)

Country Link
US (1) US8120066B2 (pt)
EP (1) EP2080228B1 (pt)
JP (1) JP2010506397A (pt)
CN (1) CN101636843B (pt)
ES (1) ES2837454T3 (pt)
PL (1) PL2080228T3 (pt)
PT (1) PT2080228T (pt)
TW (1) TWI433317B (pt)
WO (1) WO2008041249A1 (pt)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7573078B2 (en) * 2004-05-11 2009-08-11 Cree, Inc. Wide bandgap transistors with multiple field plates
US7550783B2 (en) * 2004-05-11 2009-06-23 Cree, Inc. Wide bandgap HEMTs with source connected field plates
US9773877B2 (en) * 2004-05-13 2017-09-26 Cree, Inc. Wide bandgap field effect transistors with source connected field plates
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7791434B2 (en) * 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US11791385B2 (en) * 2005-03-11 2023-10-17 Wolfspeed, Inc. Wide bandgap transistors with gate-source field plates
JP5105160B2 (ja) * 2006-11-13 2012-12-19 クリー インコーポレイテッド トランジスタ
US7884394B2 (en) * 2009-02-09 2011-02-08 Transphorm Inc. III-nitride devices and circuits
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
WO2010151721A1 (en) * 2009-06-25 2010-12-29 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Transistor with enhanced channel charge inducing material layer and threshold voltage control
US8324661B2 (en) * 2009-12-23 2012-12-04 Intel Corporation Quantum well transistors with remote counter doping
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8860120B2 (en) * 2010-09-22 2014-10-14 Nxp, B.V. Field modulating plate and circuit
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
JP5776217B2 (ja) * 2011-02-24 2015-09-09 富士通株式会社 化合物半導体装置
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9099983B2 (en) 2011-02-28 2015-08-04 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9024357B2 (en) * 2011-04-15 2015-05-05 Stmicroelectronics S.R.L. Method for manufacturing a HEMT transistor and corresponding HEMT transistor
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
CN102280476B (zh) * 2011-08-08 2012-12-19 中国电子科技集团公司第五十五研究所 一种赝配高电子迁移率晶体管及其制作方法
CN102299170B (zh) * 2011-08-08 2013-07-24 中国电子科技集团公司第五十五研究所 一种砷化镓赝配高电子迁移率晶体管外延材料
US8772833B2 (en) * 2011-09-21 2014-07-08 Electronics And Telecommunications Research Institute Power semiconductor device and fabrication method thereof
US9958416B2 (en) 2011-11-23 2018-05-01 The General Hospital Corporation Analyte detection using magnetic hall effect
CN103187249B (zh) * 2011-12-30 2016-05-25 中国科学院物理研究所 一种半导体纳米材料器件的制作方法
US9385684B2 (en) 2012-10-23 2016-07-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having guard ring
KR102024290B1 (ko) * 2012-11-08 2019-11-04 엘지이노텍 주식회사 전력 반도체 소자
CN103123933A (zh) * 2012-12-25 2013-05-29 中国电子科技集团公司第五十五研究所 砷化镓赝配高电子迁移率晶体管
US9018056B2 (en) * 2013-03-15 2015-04-28 The United States Of America, As Represented By The Secretary Of The Navy Complementary field effect transistors using gallium polar and nitrogen polar III-nitride material
US9679981B2 (en) 2013-06-09 2017-06-13 Cree, Inc. Cascode structures for GaN HEMTs
US9847411B2 (en) 2013-06-09 2017-12-19 Cree, Inc. Recessed field plate transistor structures
US9041061B2 (en) * 2013-07-25 2015-05-26 International Business Machines Corporation III-V device with overlapped extension regions using replacement gate
CN103943677B (zh) * 2014-04-16 2016-08-17 中国科学院半导体研究所 一种芯片尺寸级氮化镓基晶体管及其制备方法
JP6659871B2 (ja) * 2017-04-14 2020-03-04 ダイナックス セミコンダクター インコーポレイテッドDynax Semiconductor,Inc. 半導体デバイス及びその製造方法
CN106960874A (zh) * 2017-04-29 2017-07-18 复旦大学 一种提高AlGaN/GaN高电子迁移率场效应器件击穿电压的方法
CN109103243A (zh) * 2018-07-24 2018-12-28 厦门市三安集成电路有限公司 一种高值电阻的phemt器件
TWI734257B (zh) * 2018-11-16 2021-07-21 美商安托梅拉公司 包含用於降低接觸電阻之源極/汲極摻雜物擴散阻擋超晶格的半導體元件及相關方法
US11081485B2 (en) * 2019-10-23 2021-08-03 Win Semiconductors Corp. Monolithic integrated circuit device having gate-sinking pHEMTs
US12206014B2 (en) 2019-11-29 2025-01-21 Nippon Telegraph And Telephone Corporation Field-effect transistor and method for manufacturing the same
JPWO2021186653A1 (pt) * 2020-03-18 2021-09-23
JPWO2021186652A1 (pt) * 2020-03-18 2021-09-23
US20230083321A1 (en) * 2020-03-18 2023-03-16 Nippon Telegraph And Telephone Corporation Voltage Current Conversion Device
CN113363254B (zh) * 2021-06-02 2024-06-18 厦门市三安集成电路有限公司 一种半导体器件及其制备方法
CN113363255B (zh) * 2021-06-02 2024-02-27 厦门市三安集成电路有限公司 一种半导体器件及其制备方法
US11876128B2 (en) * 2021-09-13 2024-01-16 Walter Tony WOHLMUTH Field effect transistor
CN115995488A (zh) * 2021-10-19 2023-04-21 吴华特 场效晶体管
CN114373804A (zh) * 2021-12-14 2022-04-19 华为技术有限公司 赝配高迁移率晶体管、低噪声放大器及相关装置
WO2023191776A1 (en) * 2022-03-30 2023-10-05 Monde Wireless Inc. N-polar iii-nitride device structures with a p-type layer
CN116960150A (zh) * 2022-04-19 2023-10-27 联华电子股份有限公司 高电子迁移率晶体管

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0491441A (ja) * 1990-08-02 1992-03-24 Nikko Kyodo Co Ltd 電界効果トランジスタの製造方法
US5140386A (en) 1991-05-09 1992-08-18 Raytheon Company High electron mobility transistor
JPH05152347A (ja) * 1991-11-28 1993-06-18 Sanyo Electric Co Ltd 化合物半導体装置
JP3163822B2 (ja) * 1993-02-23 2001-05-08 セイコーエプソン株式会社 トランジスタ及びその製造方法
JPH1056168A (ja) * 1996-08-08 1998-02-24 Mitsubishi Electric Corp 電界効果トランジスタ
US5811844A (en) * 1997-07-03 1998-09-22 Lucent Technologies Inc. Low noise, high power pseudomorphic HEMT
JP3534624B2 (ja) 1998-05-01 2004-06-07 沖電気工業株式会社 半導体装置の製造方法
WO2000007248A1 (en) * 1998-07-31 2000-02-10 Raytheon Company High electron mobility transistor
US6307221B1 (en) * 1998-11-18 2001-10-23 The Whitaker Corporation InxGa1-xP etch stop layer for double recess pseudomorphic high electron mobility transistor structures
JP3353764B2 (ja) * 1999-11-12 2002-12-03 日本電気株式会社 半導体装置の製造方法
US6489639B1 (en) * 2000-05-24 2002-12-03 Raytheon Company High electron mobility transistor
TWI257179B (en) * 2000-07-17 2006-06-21 Fujitsu Quantum Devices Ltd High-speed compound semiconductor device operable at large output power with minimum leakage current
US6703638B2 (en) * 2001-05-21 2004-03-09 Tyco Electronics Corporation Enhancement and depletion-mode phemt device having two ingap etch-stop layers
KR100438895B1 (ko) 2001-12-28 2004-07-02 한국전자통신연구원 고전자 이동도 트랜지스터 전력 소자 및 그 제조 방법
JP2003206199A (ja) * 2002-01-16 2003-07-22 Nikko Materials Co Ltd 化合物半導体結晶
JP2004055788A (ja) * 2002-07-19 2004-02-19 Sony Corp 半導体装置
AU2003278828A1 (en) 2002-09-13 2004-04-30 Arizona Board Of Regents Active electronic devices based on gallium nitride and its alloys grown on silicon substrates with buffer layers of sicain
US7078743B2 (en) * 2003-05-15 2006-07-18 Matsushita Electric Industrial Co., Ltd. Field effect transistor semiconductor device
US20080064155A1 (en) * 2004-08-31 2008-03-13 Koninklijke Philips Electronics, N.V. Method for Producing a Multi-Stage Recess in a Layer Structure and a Field Effect Transistor with a Multi-Recessed Gate
US11791385B2 (en) * 2005-03-11 2023-10-17 Wolfspeed, Inc. Wide bandgap transistors with gate-source field plates

Also Published As

Publication number Publication date
PL2080228T3 (pl) 2021-04-19
EP2080228B1 (en) 2020-12-02
CN101636843A (zh) 2010-01-27
EP2080228A1 (en) 2009-07-22
TW200834917A (en) 2008-08-16
CN101636843B (zh) 2012-06-13
TWI433317B (zh) 2014-04-01
US20100102358A1 (en) 2010-04-29
WO2008041249A8 (en) 2008-08-14
WO2008041249A1 (en) 2008-04-10
ES2837454T3 (es) 2021-06-30
JP2010506397A (ja) 2010-02-25
US8120066B2 (en) 2012-02-21

Similar Documents

Publication Publication Date Title
PL2080228T3 (pl) Urządzenie mocy pseudomorficznego tranzystora o wysokiej ruchliwości elektronów (phemt) z zasilaniem jednonapięciowym i sposób jego wytwarzania
GB0710324D0 (en) Organic thin-film transistor material, organic thin-film transistor, field effect transistor, switching device, organic semiconductor material, and organic
GB0816666D0 (en) Semiconductor field effect transistor and method for fabricating the same
GB2423199B (en) Power supply systems for electrical devices
EP2206216A4 (en) STATIC TRANSFER SWITCH DEVICE, POWER APPARATUS USING THE SWITCH DEVICE, AND SWITCHING METHOD
GB2453492A (en) Organic el device and manufacturing method thereof
EP2175492A4 (en) Semiconductor device and method for manufacturing the same
TWI372445B (en) Semiconductor device and method for making the same
GB0506273D0 (en) Tri-gate low power device and method for manufacturing the same
SI2149902T1 (sl) Močnostni polprevodniški moduli in naprava za električni oblok, ki le-tega uporablja
TWI368279B (en) Method for fabricating high voltage drift in semiconductor device
TWI371836B (en) Semiconductor device and method for fabricating the same
ZA200805415B (en) High voltage bushing and high voltage device comprising such bushing
GB2400980B (en) Organic EL device and method for manufacturing same
GB2471405A (en) Electronic device
TWI316293B (en) Semiconductor device and method for manufacturing the same
EP1820218A4 (en) ORGANIC FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR EQUIPMENT THEREWITH
EP1691584A4 (en) ORGANIC ELECTROLUMINESCENT DEVICE AND METHOD FOR MANUFACTURING THE SAME
SG119329A1 (en) Semiconductor device and method for manufacturing the same
TWI371844B (en) Semiconductor device and method for manufacturing the same
TWI371849B (en) Transistor of semiconductor device and method for fabricating the same
TWI318798B (en) Organic thin film transistor and method for manufacturing the same
TW200641971A (en) High voltage metal-oxide-semiconductor transistor devices and method of making the same
TWI351074B (en) Semiconductor device and method for manufacturing semiconductor device
TWI351108B (en) Semiconductor device having recess channel structure and method for manufacturing the same