PT2483700T - Dispositivo para condicionamento de chips semicondutores e processo de teste com emprego do dispositivo - Google Patents
Dispositivo para condicionamento de chips semicondutores e processo de teste com emprego do dispositivoInfo
- Publication number
- PT2483700T PT2483700T PT107570921T PT10757092T PT2483700T PT 2483700 T PT2483700 T PT 2483700T PT 107570921 T PT107570921 T PT 107570921T PT 10757092 T PT10757092 T PT 10757092T PT 2483700 T PT2483700 T PT 2483700T
- Authority
- PT
- Portugal
- Prior art keywords
- test method
- semiconductor chips
- conditioning semiconductor
- conditioning
- chips
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49139—Assembling to base an electrical component, e.g., capacitor, etc. by inserting component lead or terminal into base aperture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009045291A DE102009045291A1 (de) | 2009-10-02 | 2009-10-02 | Vorrichtung zur Konditionierung von Halbleiterchips und Testverfahren unter Verwendung der Vorrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PT2483700T true PT2483700T (pt) | 2017-03-29 |
Family
ID=43304084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PT107570921T PT2483700T (pt) | 2009-10-02 | 2010-09-22 | Dispositivo para condicionamento de chips semicondutores e processo de teste com emprego do dispositivo |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9599662B2 (pt) |
| EP (1) | EP2483700B1 (pt) |
| JP (1) | JP5829610B2 (pt) |
| KR (1) | KR101791886B1 (pt) |
| CN (1) | CN102667511B (pt) |
| DE (1) | DE102009045291A1 (pt) |
| ES (1) | ES2622570T3 (pt) |
| PT (1) | PT2483700T (pt) |
| WO (1) | WO2011039087A1 (pt) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5938932B2 (ja) * | 2012-02-14 | 2016-06-22 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| JP5942459B2 (ja) | 2012-02-14 | 2016-06-29 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| CN104871020A (zh) * | 2012-12-21 | 2015-08-26 | 瑞典爱立信有限公司 | 电子负载模块和方法及其系统 |
| US10781518B2 (en) * | 2014-12-11 | 2020-09-22 | Applied Materials, Inc. | Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel |
| KR102138879B1 (ko) * | 2015-11-13 | 2020-07-29 | 주식회사 아이에스시 | 테스트 모듈 및 이를 포함하는 반도체 소자 테스트 장치 |
| JP6256523B2 (ja) * | 2016-05-16 | 2018-01-10 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| JP6256526B2 (ja) * | 2016-05-25 | 2018-01-10 | セイコーエプソン株式会社 | ハンドラー、及び部品検査装置 |
| DE102018105353B3 (de) * | 2018-03-08 | 2019-01-03 | Helmuth Heigl | Kontaktiereinheit für einen Testhandler zum Durchführen von Funktionstests an Halbleiterelementen |
| TWI687695B (zh) * | 2019-06-21 | 2020-03-11 | 利亙通國際有限公司 | 自動測試系統之功能擴充升級的方法 |
| CN112834899A (zh) * | 2020-12-30 | 2021-05-25 | 广州奥松电子有限公司 | 一种芯片检测装置 |
| CN115166486A (zh) * | 2022-07-04 | 2022-10-11 | 广硕半导体(苏州)有限公司 | 一种芯片高低温测试模组及基于其的测试装置 |
| CN119314924B (zh) * | 2024-12-13 | 2025-07-22 | 深圳格芯集成电路装备有限公司 | 一种常高低温芯片测试设备 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03195038A (ja) * | 1989-12-25 | 1991-08-26 | Nippon Telegr & Teleph Corp <Ntt> | 半導体集積回路の評価装置 |
| JPH03195039A (ja) * | 1989-12-25 | 1991-08-26 | Fujitsu Ltd | 低温試験装置 |
| JP2544015Y2 (ja) | 1990-10-15 | 1997-08-13 | 株式会社アドバンテスト | Ic試験装置 |
| JPH04330753A (ja) * | 1991-01-16 | 1992-11-18 | Tokyo Electron Ltd | 半導体検査装置及び半導体検査方法 |
| JP3024351B2 (ja) * | 1992-03-10 | 2000-03-21 | 安藤電気株式会社 | 蓋つきicソケットの蓋開閉機構 |
| JPH0653299A (ja) * | 1992-07-31 | 1994-02-25 | Tokyo Electron Yamanashi Kk | バーンイン装置 |
| JP2929948B2 (ja) * | 1994-09-20 | 1999-08-03 | 三菱電機株式会社 | プローブ式テストハンドラー及びそれを用いたicのテスト方法 |
| DE19537358B4 (de) | 1994-10-11 | 2007-03-01 | Advantest Corp. | IC-Träger |
| US5907246A (en) | 1995-11-29 | 1999-05-25 | Lucent Technologies, Inc. | Testing of semiconductor chips |
| US5847293A (en) * | 1995-12-04 | 1998-12-08 | Aetrium Incorporated | Test handler for DUT's |
| US5885353A (en) | 1996-06-21 | 1999-03-23 | Micron Technology, Inc. | Thermal conditioning apparatus |
| US5911897A (en) * | 1997-01-13 | 1999-06-15 | Micro Control Company | Temperature control for high power burn-in for integrated circuits |
| CN1166956C (zh) * | 1997-05-12 | 2004-09-15 | 株式会社爱德万测试 | 半导体器件测试装置 |
| GB2346703B (en) * | 1997-10-07 | 2002-06-19 | Reliability Inc | Burn-in board with adaptable heat sink device |
| US6049217A (en) * | 1997-12-30 | 2000-04-11 | Intel Corporation | Thermally enhanced test contactor |
| US6091062A (en) | 1998-01-27 | 2000-07-18 | Kinetrix, Inc. | Method and apparatus for temperature control of a semiconductor electrical-test contractor assembly |
| TW440699B (en) * | 1998-06-09 | 2001-06-16 | Advantest Corp | Test apparatus for electronic parts |
| JP5000803B2 (ja) * | 1998-07-14 | 2012-08-15 | デルタ・デザイン・インコーポレイテッド | 電子デバイスの速応温度反復制御を液体を利用して広範囲に行うための装置、方法 |
| JP2000074990A (ja) * | 1998-09-01 | 2000-03-14 | Hioki Ee Corp | 半導体チップ用パッケージの良否検査方法及びその装置 |
| SG98373A1 (en) | 1998-11-25 | 2003-09-19 | Advantest Corp | Device testing apparatus |
| DE19957792A1 (de) * | 1998-12-02 | 2000-06-08 | Schlumberger Technologies Inc | Transport und aktive Temperatursteuerung von zu prüfenden integrierten Schaltungen |
| US7225819B2 (en) * | 2000-12-08 | 2007-06-05 | David P Jackson | Apparatus process and method for mounting and treating a substrate |
| US6889841B2 (en) * | 2001-07-03 | 2005-05-10 | Johnstech International Corporation | Interface apparatus for reception and delivery of an integrated circuit package from one location to another |
| US7071714B2 (en) * | 2001-11-02 | 2006-07-04 | Formfactor, Inc. | Method and system for compensating for thermally induced motion of probe cards |
| DE10216786C5 (de) | 2002-04-15 | 2009-10-15 | Ers Electronic Gmbh | Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden |
| JP4146839B2 (ja) * | 2002-12-04 | 2008-09-10 | 株式会社アドバンテスト | 押圧部材および電子部品ハンドリング装置 |
| JP4236612B2 (ja) * | 2004-05-13 | 2009-03-11 | アキム株式会社 | 電子部品の調整検査方法および装置 |
| JP4312685B2 (ja) | 2004-08-31 | 2009-08-12 | 山一電機株式会社 | 半導体装置の着脱方法、それが用いられる半導体装置の着脱装置、および半導体装置用ソケット |
| JP2006337359A (ja) * | 2005-05-02 | 2006-12-14 | Daytona Control Co Ltd | 温度制御装置 |
| SG126909A1 (en) * | 2005-05-02 | 2006-11-29 | Daytona Control Co Ltd | Temperature control apparatus |
| JP4049172B2 (ja) * | 2005-07-13 | 2008-02-20 | 住友電気工業株式会社 | ウェハプローバ用ウェハ保持体およびそれを搭載したウェハプローバ |
| DE102006036291B4 (de) * | 2006-08-03 | 2012-05-24 | Multitest Elektronische Systeme Gmbh | Kontaktiervorrichtung zum Testen von elektronischen Bauelementen unter bestimmten Temperaturbedingungen |
| DE102007047596B4 (de) * | 2007-10-05 | 2013-02-07 | Multitest Elektronische Systeme Gmbh | Handhabungsvorrichtung für elektronische Bauelemente, insbesondere ICs, mit einer Mehrzahl von auf einer Umlaufbahn geführten Umlaufwagen |
| JP5074878B2 (ja) * | 2007-10-15 | 2012-11-14 | 東京エレクトロン株式会社 | 検査装置 |
| US8274300B2 (en) * | 2008-01-18 | 2012-09-25 | Kes Systems & Service (1993) Pte Ltd. | Thermal control unit for semiconductor testing |
| US7888957B2 (en) * | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
-
2009
- 2009-10-02 DE DE102009045291A patent/DE102009045291A1/de not_active Ceased
-
2010
- 2010-09-22 ES ES10757092.1T patent/ES2622570T3/es active Active
- 2010-09-22 PT PT107570921T patent/PT2483700T/pt unknown
- 2010-09-22 WO PCT/EP2010/063975 patent/WO2011039087A1/de not_active Ceased
- 2010-09-22 JP JP2012531328A patent/JP5829610B2/ja active Active
- 2010-09-22 EP EP10757092.1A patent/EP2483700B1/de active Active
- 2010-09-22 CN CN201080044744.3A patent/CN102667511B/zh active Active
- 2010-09-22 KR KR1020127011422A patent/KR101791886B1/ko active Active
- 2010-09-22 US US13/499,866 patent/US9599662B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP5829610B2 (ja) | 2015-12-09 |
| CN102667511B (zh) | 2015-06-24 |
| US20120311858A1 (en) | 2012-12-13 |
| US9599662B2 (en) | 2017-03-21 |
| DE102009045291A1 (de) | 2011-04-07 |
| CN102667511A (zh) | 2012-09-12 |
| JP2013506819A (ja) | 2013-02-28 |
| WO2011039087A1 (de) | 2011-04-07 |
| ES2622570T3 (es) | 2017-07-06 |
| KR20120104197A (ko) | 2012-09-20 |
| EP2483700B1 (de) | 2016-12-21 |
| KR101791886B1 (ko) | 2017-11-20 |
| EP2483700A1 (de) | 2012-08-08 |
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