PT3761348T - Sistema para transportar um substrato entre estações de processamento de um aparelho de processamento, aparelho de processamento e métodos de manusear um substrato - Google Patents
Sistema para transportar um substrato entre estações de processamento de um aparelho de processamento, aparelho de processamento e métodos de manusear um substratoInfo
- Publication number
- PT3761348T PT3761348T PT191847219T PT19184721T PT3761348T PT 3761348 T PT3761348 T PT 3761348T PT 191847219 T PT191847219 T PT 191847219T PT 19184721 T PT19184721 T PT 19184721T PT 3761348 T PT3761348 T PT 3761348T
- Authority
- PT
- Portugal
- Prior art keywords
- substrate
- processing apparatus
- processing
- conveying
- handling
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
- H10P72/0418—Apparatus for fluid treatment for etching
- H10P72/0422—Apparatus for fluid treatment for etching for wet etching
- H10P72/0426—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
- H10P72/3312—Vertical transfer of a batch of workpieces
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19184721.9A EP3761348B1 (en) | 2019-07-05 | 2019-07-05 | System for conveying a substrate between processing stations of a processing apparatus, processing apparatus and methods of handling a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PT3761348T true PT3761348T (pt) | 2024-07-02 |
Family
ID=67437605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PT191847219T PT3761348T (pt) | 2019-07-05 | 2019-07-05 | Sistema para transportar um substrato entre estações de processamento de um aparelho de processamento, aparelho de processamento e métodos de manusear um substrato |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3761348B1 (pt) |
| PT (1) | PT3761348T (pt) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6077886B2 (ja) * | 2013-03-04 | 2017-02-08 | 株式会社荏原製作所 | めっき装置 |
| US9388504B2 (en) * | 2013-03-26 | 2016-07-12 | Ebara Corporation | Plating apparatus and plating method |
| TW201502315A (zh) * | 2013-07-10 | 2015-01-16 | 荏原製作所股份有限公司 | 濕式處理裝置及鍍覆裝置 |
| EP3176288A1 (en) | 2015-12-03 | 2017-06-07 | ATOTECH Deutschland GmbH | Method for galvanic metal deposition |
| JP6878056B2 (ja) * | 2017-03-14 | 2021-05-26 | 株式会社荏原製作所 | めっき方法 |
-
2019
- 2019-07-05 EP EP19184721.9A patent/EP3761348B1/en active Active
- 2019-07-05 PT PT191847219T patent/PT3761348T/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP3761348B1 (en) | 2024-03-27 |
| EP3761348A1 (en) | 2021-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| PL3703902T3 (pl) | System przenośników i sposób równoczesnego transportu obrabianych przedmiotów i pracowników | |
| SG10202008872VA (en) | Etching method, plasma processing apparatus, and substrate processing system | |
| SG11202108481XA (en) | Method and system for processing data packages | |
| ZA202104359B (en) | Conveying device, processing installation, method for conveying and/or processing objects | |
| SG11202007844WA (en) | Conveyor system and conveying method | |
| SG10202010273VA (en) | Substrate processing system and method for replacing edge ring | |
| EP3867161C0 (en) | METHOD AND SYSTEM FOR TRANSPORTING ARTICLES | |
| EP3758049B8 (en) | Device and method for moving an object into a processing station, conveying system and processing apparatus | |
| EP4004339A4 (en) | TRANSPORT APPARATUS, SYSTEMS AND METHODS | |
| GB201901736D0 (en) | Method and system for processing data packages | |
| GB201905138D0 (en) | Apparatus and method for processing a substrate | |
| EP4227256A4 (en) | SUBSTRATE CONVEYING HAND, SUBSTRATE CONVEYING DEVICE AND SUBSTRATE CONVEYING METHOD | |
| GB201901637D0 (en) | Apparatus for processing a wafer, and method of controlling such an apparatus | |
| GB201900912D0 (en) | Apparatus for processing a wafer, and method of controlling such an apparatus | |
| SG10201905908TA (en) | Cleaning section transfer robot for transferring substrate, substrate processing apparatus, and substrate transfer method | |
| EP4061752A4 (en) | CONVEYOR, CONVEYOR SYSTEM AND METHOD OF MAKING A CONVEYOR | |
| GB2581189B (en) | Method and system for processing data packages | |
| EP3969609A4 (en) | Method, system and apparatus for substance identification | |
| PL4065453T3 (pl) | Urządzenie transportowe, instalacja do obróbki, sposób transportowania i/lub obróbki przedmiotów | |
| EP4018079A4 (en) | CONVEYING DEVICE, SYSTEMS AND PROCESSES | |
| EP4025966B8 (en) | Systems, apparatus, and methods of conveyor belt processing | |
| AU2019904545A0 (en) | Apparatus, System and Method for Lifting a Conveyor Belt | |
| GB202310769D0 (en) | Apparatus, systems and methods for robotics | |
| GB202216480D0 (en) | Article processing apparatus, system and method therefor | |
| GB2581190B (en) | Method and system for processing data packages |