RU2304323C2 - Способ получения фторполимерного слоя на тонкопленочном приборе - Google Patents

Способ получения фторполимерного слоя на тонкопленочном приборе Download PDF

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Publication number
RU2304323C2
RU2304323C2 RU2005101341/28A RU2005101341A RU2304323C2 RU 2304323 C2 RU2304323 C2 RU 2304323C2 RU 2005101341/28 A RU2005101341/28 A RU 2005101341/28A RU 2005101341 A RU2005101341 A RU 2005101341A RU 2304323 C2 RU2304323 C2 RU 2304323C2
Authority
RU
Russia
Prior art keywords
fluoromonomer
thin
free radical
radical polymerization
film device
Prior art date
Application number
RU2005101341/28A
Other languages
English (en)
Russian (ru)
Other versions
RU2005101341A (ru
Inventor
Майкл МОКЕЛЛА (US)
Майкл МОКЕЛЛА
Эндрю Э. ФЕЙРИНГ (US)
Эндрю Э. ФЕЙРИНГ
Теодор А. ТРИТ (US)
Теодор А. ТРИТ
Юджин ЛОПАТА (US)
Юджин ЛОПАТА
Питер РОУЗ (US)
Питер Роуз
Яков БРИЧКО (US)
Яков БРИЧКО
Original Assignee
Е.И.Дюпон Де Немур Энд Компани
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Е.И.Дюпон Де Немур Энд Компани filed Critical Е.И.Дюпон Де Немур Энд Компани
Publication of RU2005101341A publication Critical patent/RU2005101341A/ru
Application granted granted Critical
Publication of RU2304323C2 publication Critical patent/RU2304323C2/ru

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H10P14/687—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC the materials being fluorocarbon compounds, e.g. (CHxFy) n or polytetrafluoroethylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/14—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
RU2005101341/28A 2002-06-21 2002-06-21 Способ получения фторполимерного слоя на тонкопленочном приборе RU2304323C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/019702 WO2004001832A1 (en) 2002-06-21 2002-06-21 Fluoropolymer interlayer dielectric by chemical vapor deposition

Publications (2)

Publication Number Publication Date
RU2005101341A RU2005101341A (ru) 2005-06-27
RU2304323C2 true RU2304323C2 (ru) 2007-08-10

Family

ID=29998721

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2005101341/28A RU2304323C2 (ru) 2002-06-21 2002-06-21 Способ получения фторполимерного слоя на тонкопленочном приборе

Country Status (6)

Country Link
EP (1) EP1516360A1 (de)
CN (1) CN100336184C (de)
AU (1) AU2002310491A1 (de)
CA (1) CA2487486A1 (de)
RU (1) RU2304323C2 (de)
WO (1) WO2004001832A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013102011A2 (en) * 2011-12-30 2013-07-04 Gvd Corporation Coatings for electrowetting and electrofluidic devices
JP6356702B2 (ja) 2013-02-15 2018-07-11 マサチューセッツ インスティテュート オブ テクノロジー 滴状凝縮のためのグラフトポリマー表面、ならびに関連使用および製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2046678C1 (ru) * 1992-11-17 1995-10-27 Институт микроэлектроники РАН Способ плазменной полимеризации
US6156435A (en) * 1996-05-06 2000-12-05 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3400688A1 (de) * 1984-01-11 1985-07-18 Chemische Werke Hüls AG, 4370 Marl Ausschleusung von schwermetallasche durch zentrifugalbehandlung oder druckfiltration
US4834022A (en) * 1985-11-08 1989-05-30 Focus Semiconductor Systems, Inc. CVD reactor and gas injection system
CA2072384A1 (en) * 1991-08-29 1993-03-01 Clifford L. Spiro Carbon fluoride compositions
US6022414A (en) * 1994-07-18 2000-02-08 Semiconductor Equipment Group, Llc Single body injector and method for delivering gases to a surface
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface
TW356554B (en) * 1995-10-23 1999-04-21 Watkins Johnson Co Gas injection system for semiconductor processing
JPH10209148A (ja) * 1997-01-27 1998-08-07 Sony Corp 低誘電率絶縁体膜の形成方法およびこれを用いた半導体装置
EP1119034A4 (de) * 1998-09-28 2002-12-04 Tokyo Electron Ltd Verfahren zur plasmaunterstützten schichtabscheidung
US6458718B1 (en) * 2000-04-28 2002-10-01 Asm Japan K.K. Fluorine-containing materials and processes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2046678C1 (ru) * 1992-11-17 1995-10-27 Институт микроэлектроники РАН Способ плазменной полимеризации
US6156435A (en) * 1996-05-06 2000-12-05 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films

Also Published As

Publication number Publication date
AU2002310491A1 (en) 2004-01-06
WO2004001832A1 (en) 2003-12-31
CN1628376A (zh) 2005-06-15
CN100336184C (zh) 2007-09-05
RU2005101341A (ru) 2005-06-27
CA2487486A1 (en) 2003-12-31
HK1076921A1 (zh) 2006-01-27
EP1516360A1 (de) 2005-03-23

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Effective date: 20160622