SE183128C1 - Elektrisk vakuumgetterpump - Google Patents

Elektrisk vakuumgetterpump

Info

Publication number: SE183128C1
Authority: SE; Sweden
Prior art keywords: cathode; anode; pump according; pump; magnetic field
Prior art date: 1957-07-24

Application number

SE696158A

Other languages

English (en)

Swedish (sv)

Inventor

Lewis D Hall

John C Helmer

Robert L Jepsen

Original Assignee

Varian Associates

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1957-07-24

Filing date

1958-07-23

Publication date

1963-04-02

1958-07-23 Application filed by Varian Associates filed Critical Varian Associates

1963-04-02 Publication of SE183128C1 publication Critical patent/SE183128C1/sv

Links

150000002500 ions Chemical class 0.000 claims description 15
239000010406 cathode material Substances 0.000 claims description 14
238000010276 construction Methods 0.000 claims description 12
239000000463 material Substances 0.000 claims description 7
238000000151 deposition Methods 0.000 claims description 4
238000009792 diffusion process Methods 0.000 claims description 2
238000009413 insulation Methods 0.000 claims 2
230000001154 acute effect Effects 0.000 claims 1
238000004501 airglow Methods 0.000 claims 1
210000002784 stomach Anatomy 0.000 claims 1
239000007789 gas Substances 0.000 description 21
229910052751 metal Inorganic materials 0.000 description 7
239000002184 metal Substances 0.000 description 7
238000005086 pumping Methods 0.000 description 7
238000004544 sputter deposition Methods 0.000 description 6
230000007935 neutral effect Effects 0.000 description 5
150000003839 salts Chemical class 0.000 description 5
238000004804 winding Methods 0.000 description 4
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
229910052782 aluminium Inorganic materials 0.000 description 3
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
239000003990 capacitor Substances 0.000 description 3
238000009499 grossing Methods 0.000 description 3
239000012212 insulator Substances 0.000 description 3
229910052750 molybdenum Inorganic materials 0.000 description 3
239000011733 molybdenum Substances 0.000 description 3
238000003466 welding Methods 0.000 description 3
QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
241000446313 Lamella Species 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
239000002775 capsule Substances 0.000 description 2
238000009833 condensation Methods 0.000 description 2
230000005494 condensation Effects 0.000 description 2
230000008021 deposition Effects 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000005684 electric field Effects 0.000 description 2
239000003574 free electron Substances 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
241000931526 Acer campestre Species 0.000 description 1
241000272525 Anas platyrhynchos Species 0.000 description 1
241000283690 Bos taurus Species 0.000 description 1
241000283707 Capra Species 0.000 description 1
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
241000630665 Hada Species 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
241000036848 Porzana carolina Species 0.000 description 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
229910052788 barium Inorganic materials 0.000 description 1
DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
230000006835 compression Effects 0.000 description 1
238000007906 compression Methods 0.000 description 1
239000004020 conductor Substances 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
239000003792 electrolyte Substances 0.000 description 1
KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 1
239000011888 foil Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
238000010849 ion bombardment Methods 0.000 description 1
-1 khaki Chemical compound 0.000 description 1
239000004922 lacquer Substances 0.000 description 1
229910052749 magnesium Inorganic materials 0.000 description 1
239000011777 magnesium Substances 0.000 description 1
238000013507 mapping Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
238000002844 melting Methods 0.000 description 1
AYOOGWWGECJQPI-NSHDSACASA-N n-[(1s)-1-(5-fluoropyrimidin-2-yl)ethyl]-3-(3-propan-2-yloxy-1h-pyrazol-5-yl)imidazo[4,5-b]pyridin-5-amine Chemical compound N1C(OC(C)C)=CC(N2C3=NC(N[C@@H](C)C=4N=CC(F)=CN=4)=CC=C3N=C2)=N1 AYOOGWWGECJQPI-NSHDSACASA-N 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910052758 niobium Inorganic materials 0.000 description 1
239000010955 niobium Substances 0.000 description 1
GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
239000002245 particle Substances 0.000 description 1
238000005192 partition Methods 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
239000002243 precursor Substances 0.000 description 1
239000011435 rock Substances 0.000 description 1
229910000679 solder Inorganic materials 0.000 description 1
238000005476 soldering Methods 0.000 description 1
239000010902 straw Substances 0.000 description 1
229910052712 strontium Inorganic materials 0.000 description 1
CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
229910052715 tantalum Inorganic materials 0.000 description 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
239000010936 titanium Substances 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910052726 zirconium Inorganic materials 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

Electron Tubes For Measurement (AREA)
Discharge Lamp (AREA)

SE696158A 1957-07-24 1958-07-23 Elektrisk vakuumgetterpump SE183128C1 (sv)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US673816A US2993638A (en)	1957-07-24	1957-07-24	Electrical vacuum pump apparatus and method

Publications (1)

Publication Number	Publication Date
SE183128C1 true SE183128C1 (sv)	1963-04-02

Family

ID=24704218

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE696158A SE183128C1 (sv)	1957-07-24	1958-07-23	Elektrisk vakuumgetterpump

Country Status (6)

Country	Link
US (1)	US2993638A (de)
CH (2)	CH379045A (de)
DE (1)	DE1098667B (de)
FR (1)	FR1207893A (de)
GB (1)	GB883189A (de)
SE (1)	SE183128C1 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL256013A (de) *	1959-09-25
US3107844A (en) *	1959-11-12	1963-10-22	Ultek Corp	Single cell vacuum apparatus
US3125283A (en) *	1960-03-24	1964-03-17		Vacuum pump
FR1281403A (fr) *	1960-12-01	1962-01-12	Thomson Houston Comp Francaise	Système perfectionné de pompe à vide du type à évaporation et à ionisation
US3149774A (en) *	1961-01-27	1964-09-22	Varian Associates	Getter ion pump method and apparatus
US3107045A (en) *	1961-02-02	1963-10-15	Varian Associates	Getter ion pump apparatus
DE1228750B (de) *	1961-04-01	1966-11-17	Leybolds Nachfolger E	Zerstaeubungs-Ionengetterpumpe
US3159332A (en) *	1961-08-14	1964-12-01	Varian Associates	Methods and apparatus for enhanced sputter-ion pump operation
US3141605A (en) *	1961-08-18	1964-07-21	Nippon Electric Co	Magnetron type getter ion pump
US3159333A (en) *	1961-08-21	1964-12-01	Varian Associates	Permanent magnets
US3147910A (en) *	1961-08-30	1964-09-08	Varian Associates	Vacuum pump apparatus
US3141986A (en) *	1961-09-18	1964-07-21	Varian Associates	High vacuum sputter-ion gettering apparatus
US3233823A (en) *	1961-11-20	1966-02-08	Nippon Electric Co	Electron-discharge vacuum apparatus
NL284762A (de) *	1961-11-29
US3143678A (en) *	1961-12-05	1964-08-04	Hughes Aircraft Co	Vacuum ion gauge
FR80795E (fr) *	1961-12-15	1963-06-14	Thomson Houston Comp Francaise	Système perfectionné de pompe à vide du type à évaporation et à ionisation
US3224664A (en) *	1962-08-08	1965-12-21	Philips Corp	Ion pump
US3217974A (en) *	1962-11-23	1965-11-16	Hughes Aircraft Co	Dual surface ionic pump with axial anode support
US3217973A (en) *	1962-11-23	1965-11-16	Hughes Aircraft Co	Dual surface ionic pump with shielded anode support
US3197122A (en) *	1963-07-01	1965-07-27	Cons Vacuum Corp	Ion pump
US3228589A (en) *	1963-10-16	1966-01-11	Gen Electric	Ion pump having encapsulated internal magnet assemblies
US3368100A (en) *	1963-11-25	1968-02-06	Gen Electric	Vacuum pump having a radially segmented, annular anode
US3236442A (en) *	1964-01-20	1966-02-22	Morris Associates	Ionic vacuum pump
DE1302292B (de) *	1964-03-10		Varian Associates
US3310226A (en) *	1965-02-11	1967-03-21	Nat Res Corp	Vacuum device
US3411073A (en) *	1965-07-01	1968-11-12	Gen Electric	Gas detector having inlet orifice for linear operation of the detector
GB1152475A (en) *	1965-08-17	1969-05-21	Leybold Hereaus Verwaltung G M	Improvements In Getter-Ion Vacuum Pumps
US3429501A (en) *	1965-08-30	1969-02-25	Bendix Corp	Ion pump
FR1485659A (fr) *	1966-05-09	1967-06-23	Alcatel Sa	Manomètre à cathode froide à plasmas multiples
US3441839A (en) *	1966-11-22	1969-04-29	Nat Res Corp	Power supply for vacuum pump with auxiliary pressure measurement function
US3449627A (en) *	1967-06-09	1969-06-10	Nat Res Corp	Orbiting electron ionization pump having two anodes
US3460745A (en) *	1967-08-23	1969-08-12	Varian Associates	Magnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
US3486213A (en) *	1968-08-27	1969-12-30	Norton Co	Method of making or repairing a getter vacuum pump
US3872377A (en) *	1972-10-11	1975-03-18	Tokyo Shibaura Electric Co	Cold cathode ionization gauge
US4334829A (en) *	1980-02-15	1982-06-15	Rca Corporation	Sputter-ion pump for use with electron tubes having thoriated tungsten cathodes
IT1156530B (it) *	1982-09-14	1987-02-04	Varian Spa	Pompa ionica con catodo a struttura perfezionata particolarmente per il pompaggio di gas nobili
IT1179833B (it) *	1984-11-28	1987-09-16	Varian Spa	Dispositivo elettronico per l alimentazione di una pompa ionica a due tensioni differenziate e per la misura perfezionata della pressione vigente in detta pompa
FR2580866B1 (fr) *	1985-04-23	1989-01-06	Novatome	Pompe ionique a courant proportionnel au debit
US4980609A (en) *	1988-10-12	1990-12-25	Amoco Corporation	Spark gap purge system
US6004104A (en) *	1997-07-14	1999-12-21	Duniway Stockroom Corp.	Cathode structure for sputter ion pump
US20040062659A1 (en) *	2002-07-12	2004-04-01	Sinha Mahadeva P.	Ion pump with combined housing and cathode
US7295015B2 (en) *	2004-02-19	2007-11-13	Brooks Automation, Inc.	Ionization gauge
ITMI20090402A1 (it) *	2009-03-17	2010-09-18	Getters Spa	Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
DE102009040356A1 (de)	2009-09-05	2011-03-17	Schmidt, Linda	Elktrodenanordnung für eine Ionengetterpumpe
US8439649B2 (en) *	2009-11-02	2013-05-14	Duniway Stockroom Corp.	Sputter ion pump with enhanced anode
US9484176B2 (en) *	2012-09-10	2016-11-01	Thomas Schenkel	Advanced penning ion source
US9960025B1 (en) *	2013-11-11	2018-05-01	Coldquanta Inc.	Cold-matter system having ion pump integrated with channel cell
US9960026B1 (en) *	2013-11-11	2018-05-01	Coldquanta Inc.	Ion pump with direct molecule flow channel through anode
US9117563B2 (en)	2014-01-13	2015-08-25	Cold Quanta, Inc.	Ultra-cold-matter system with thermally-isolated nested source cell
US10460917B2 (en) *	2016-05-26	2019-10-29	AOSense, Inc.	Miniature ion pump
US10550829B2 (en) *	2016-09-08	2020-02-04	Edwards Vacuum Llc	Ion trajectory manipulation architecture in an ion pump
US20180306175A1 (en) *	2017-04-25	2018-10-25	Edwards Vacuum Llc	Magnetic focusing in an ion pump using internal ferrous materials
US10773092B2 (en)	2017-05-29	2020-09-15	Elegant Mathematics LLC	Real-time methods for magnetic resonance spectra acquisition
CN117715286B (zh) *	2023-11-27	2025-10-28	中国科学院近代物理研究所	电子帘加速器及其使用方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL50072C (de) *	1935-12-28
NL49158C (de) *	1936-05-29
US2460175A (en) *	1945-07-31	1949-01-25	Hazeltine Research Inc	Ionic vacuum pump
US2554792A (en) *	1948-09-28	1951-05-29	William R Perret	Pressure measuring device
US2726805A (en) *	1953-01-29	1955-12-13	Ernest O Lawrence	Ion pump
US2755014A (en) *	1953-04-24	1956-07-17	Gen Electric	Ionic vacuum pump device
US2796555A (en) *	1954-06-29	1957-06-18	High Voltage Engineering Corp	High-vacuum pump
US2899605A (en) *	1954-07-07	1959-08-11		Warmoltz
US2850225A (en) *	1955-11-10	1958-09-02	Wisconsin Alumni Res Found	Pump

1957
- 1957-07-24 US US673816A patent/US2993638A/en not_active Expired - Lifetime
1958
- 1958-07-02 GB GB21237/58A patent/GB883189A/en not_active Expired
- 1958-07-14 DE DEV14707A patent/DE1098667B/de active Pending
- 1958-07-16 CH CH6184558A patent/CH379045A/de unknown
- 1958-07-16 CH CH1397063A patent/CH398868A/de unknown
- 1958-07-23 SE SE696158A patent/SE183128C1/sv unknown
- 1958-07-23 FR FR1207893D patent/FR1207893A/fr not_active Expired

Also Published As

Publication number	Publication date
US2993638A (en)	1961-07-25
FR1207893A (fr)	1960-02-19
CH398868A (de)	1966-03-15
CH379045A (de)	1964-06-30
DE1098667B (de)	1961-02-02
GB883189A (en)	1961-11-22

Publication	Publication Date	Title
SE183128C1 (sv)	1963-04-02	Elektrisk vakuumgetterpump
Finkelstein	1940	A high efficiency ion source
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US2507652A (en)	1950-05-16	Ion source
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ES351521A1 (es)	1969-06-01	Perfeccionamientos en valvulas electronicas de alto vacio.
JPH0968473A (ja)	1997-03-11	熱陰極型真空計
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