SE447318B - Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare - Google Patents
Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetareInfo
- Publication number
- SE447318B SE447318B SE8502479A SE8502479A SE447318B SE 447318 B SE447318 B SE 447318B SE 8502479 A SE8502479 A SE 8502479A SE 8502479 A SE8502479 A SE 8502479A SE 447318 B SE447318 B SE 447318B
- Authority
- SE
- Sweden
- Prior art keywords
- washers
- conductors
- washer
- joint
- semiconductor circuit
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 35
- 239000004020 conductor Substances 0.000 claims description 41
- 239000010410 layer Substances 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000011368 organic material Substances 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 230000006870 function Effects 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- -1 diodes D1 and D2 Chemical compound 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000009993 protective function Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Paper (AREA)
- Details Of Garments (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE8502479A SE447318B (sv) | 1985-05-21 | 1985-05-21 | Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare |
| JP61503007A JPH0781892B2 (ja) | 1985-05-21 | 1986-05-20 | 半導体集積回路、その製造方法、および流速計を提供するためのそのような回路の使用 |
| DE8686903655T DE3678295D1 (de) | 1985-05-21 | 1986-05-20 | Integrierte durchflussmesser und verfahren zu ihrer herstellung. |
| EP86903655A EP0261123B1 (en) | 1985-05-21 | 1986-05-20 | Integrated flow meter and method for producing it |
| AU58697/86A AU587619B2 (en) | 1985-05-21 | 1986-05-20 | Flow meter |
| PCT/SE1986/000233 WO1986007192A1 (en) | 1985-05-21 | 1986-05-20 | Integrated semiconductor circuit and method for producing it, and use of such a circuit for providing a flow meter |
| AT86903655T ATE61888T1 (de) | 1985-05-21 | 1986-05-20 | Integrierte durchflussmesser und verfahren zu ihrer herstellung. |
| US07/014,063 US4843445A (en) | 1985-05-21 | 1986-05-20 | Integrated semiconductor circuit and method for producing it, and use of such a circuit for providing a flow meter |
| DK007287A DK165532C (da) | 1985-05-21 | 1987-01-07 | Stroemningsmaaler til at maale stroemningshastigheden i et gas- eller vaeskeformigt medie samt fremgangsmaade til dens fremstilling |
| NO870189A NO171435C (no) | 1985-05-21 | 1987-01-16 | Stroemningsmaaler og fremgangsmaate for fremstilling av denne ved bruk av en integrert halvlederkrets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE8502479A SE447318B (sv) | 1985-05-21 | 1985-05-21 | Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SE8502479D0 SE8502479D0 (sv) | 1985-05-21 |
| SE447318B true SE447318B (sv) | 1986-11-03 |
Family
ID=20360279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE8502479A SE447318B (sv) | 1985-05-21 | 1985-05-21 | Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4843445A (da) |
| EP (1) | EP0261123B1 (da) |
| JP (1) | JPH0781892B2 (da) |
| AU (1) | AU587619B2 (da) |
| DK (1) | DK165532C (da) |
| SE (1) | SE447318B (da) |
| WO (1) | WO1986007192A1 (da) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4782708A (en) * | 1987-08-27 | 1988-11-08 | General Motors Corporation | Thermocouple sensors |
| JPH0831458B2 (ja) * | 1987-09-08 | 1996-03-27 | 三菱電機株式会社 | 超電導配線集積回路 |
| US5201221A (en) * | 1991-03-15 | 1993-04-13 | Ford Motor Company | Flow sensor and method of manufacture |
| US6540154B1 (en) | 1991-04-24 | 2003-04-01 | Aerogen, Inc. | Systems and methods for controlling fluid feed to an aerosol generator |
| US7628339B2 (en) | 1991-04-24 | 2009-12-08 | Novartis Pharma Ag | Systems and methods for controlling fluid feed to an aerosol generator |
| US5313832A (en) * | 1991-12-23 | 1994-05-24 | Ford Motor Company | Composite mass air flow sensor |
| US5231878A (en) * | 1991-12-23 | 1993-08-03 | Ford Motor Company | Mass air flow sensor |
| US5263380A (en) * | 1992-02-18 | 1993-11-23 | General Motors Corporation | Differential AC anemometer |
| US5758637A (en) | 1995-08-31 | 1998-06-02 | Aerogen, Inc. | Liquid dispensing apparatus and methods |
| US6085740A (en) | 1996-02-21 | 2000-07-11 | Aerogen, Inc. | Liquid dispensing apparatus and methods |
| SE9600334D0 (sv) | 1996-01-30 | 1996-01-30 | Radi Medical Systems | Combined flow, pressure and temperature sensor |
| US6055869A (en) * | 1997-06-12 | 2000-05-02 | Stemme; Erik | Lift force fluid flow sensor for measuring fluid flow velocities |
| GB2327146A (en) * | 1997-07-10 | 1999-01-13 | Ericsson Telefon Ab L M | Thermal insulation of integrated circuit components |
| JP3416526B2 (ja) * | 1998-05-21 | 2003-06-16 | 三菱電機株式会社 | 感熱式流量センサ |
| US6235177B1 (en) | 1999-09-09 | 2001-05-22 | Aerogen, Inc. | Method for the construction of an aperture plate for dispensing liquid droplets |
| US7100600B2 (en) | 2001-03-20 | 2006-09-05 | Aerogen, Inc. | Fluid filled ampoules and methods for their use in aerosolizers |
| US8336545B2 (en) | 2000-05-05 | 2012-12-25 | Novartis Pharma Ag | Methods and systems for operating an aerosol generator |
| US7971588B2 (en) | 2000-05-05 | 2011-07-05 | Novartis Ag | Methods and systems for operating an aerosol generator |
| US6948491B2 (en) | 2001-03-20 | 2005-09-27 | Aerogen, Inc. | Convertible fluid feed system with comformable reservoir and methods |
| MXPA02010884A (es) | 2000-05-05 | 2003-03-27 | Aerogen Ireland Ltd | Aparato y metodo para el suministro de medicamentos al sistema respiratorio. |
| US7600511B2 (en) | 2001-11-01 | 2009-10-13 | Novartis Pharma Ag | Apparatus and methods for delivery of medicament to a respiratory system |
| US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
| US6732944B2 (en) | 2001-05-02 | 2004-05-11 | Aerogen, Inc. | Base isolated nebulizing device and methods |
| US20030130624A1 (en) * | 2002-01-07 | 2003-07-10 | Kowalik Francis C. | Medical infusion system with integrated power supply and pump therefor |
| US7677467B2 (en) | 2002-01-07 | 2010-03-16 | Novartis Pharma Ag | Methods and devices for aerosolizing medicament |
| US7360536B2 (en) | 2002-01-07 | 2008-04-22 | Aerogen, Inc. | Devices and methods for nebulizing fluids for inhalation |
| WO2003059424A1 (en) | 2002-01-15 | 2003-07-24 | Aerogen, Inc. | Methods and systems for operating an aerosol generator |
| ES2572770T3 (es) | 2002-05-20 | 2016-06-02 | Novartis Ag | Aparato para proporcionar pulverización para tratamiento médico y métodos |
| US8616195B2 (en) | 2003-07-18 | 2013-12-31 | Novartis Ag | Nebuliser for the production of aerosolized medication |
| US7946291B2 (en) | 2004-04-20 | 2011-05-24 | Novartis Ag | Ventilation systems and methods employing aerosol generators |
| US7267121B2 (en) | 2004-04-20 | 2007-09-11 | Aerogen, Inc. | Aerosol delivery apparatus and method for pressure-assisted breathing systems |
| US7290541B2 (en) | 2004-04-20 | 2007-11-06 | Aerogen, Inc. | Aerosol delivery apparatus and method for pressure-assisted breathing systems |
| EP1896662B1 (en) | 2005-05-25 | 2014-07-23 | AeroGen, Inc. | Vibration systems and methods |
| US7653503B2 (en) * | 2006-04-20 | 2010-01-26 | Tao Of Systems Integration, Inc. | Temperature-compensating sensor system |
| US8274301B2 (en) * | 2009-11-02 | 2012-09-25 | International Business Machines Corporation | On-chip accelerated failure indicator |
| US9322797B1 (en) * | 2014-04-30 | 2016-04-26 | Helvetia Wireless Llc | Systems and methods for detecting a liquid |
| GB2558895B (en) * | 2017-01-17 | 2019-10-09 | Cambridge Entpr Ltd | A thermal fluid flow sensor |
| US11054472B2 (en) * | 2017-08-23 | 2021-07-06 | Avo Multi-Amp Corporation | Relay test paddle |
| US10935586B2 (en) * | 2019-03-20 | 2021-03-02 | Rohde & Schwarz Gmbh & Co. Kg | Measuring device and measuring method with time calculation |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4246595A (en) * | 1977-03-08 | 1981-01-20 | Matsushita Electric Industrial Co., Ltd. | Electronics circuit device and method of making the same |
| DE2919433C2 (de) * | 1979-05-15 | 1987-01-22 | Robert Bosch Gmbh, 7000 Stuttgart | Meßsonde zur Messung der Masse und/oder Temperatur eines strömenden Mediums |
| DE3040448A1 (de) * | 1979-06-27 | 1982-05-27 | Siemens AG, 1000 Berlin und 8000 München | Mengendurchflussmesser fuer fluessigkeiten |
| JPS56162014A (en) * | 1980-05-16 | 1981-12-12 | Nippon Denso Co Ltd | Measuring device for flow rate of gas |
| DE3135793A1 (de) * | 1981-09-10 | 1983-03-24 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messung der masse eines in einem stroemungsquerschnitt stroemenden pulsierenden mediums |
| US4500905A (en) * | 1981-09-30 | 1985-02-19 | Tokyo Shibaura Denki Kabushiki Kaisha | Stacked semiconductor device with sloping sides |
| DE3138910A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Mengendurchflussmesser |
| US4472239A (en) * | 1981-10-09 | 1984-09-18 | Honeywell, Inc. | Method of making semiconductor device |
-
1985
- 1985-05-21 SE SE8502479A patent/SE447318B/sv not_active IP Right Cessation
-
1986
- 1986-05-20 US US07/014,063 patent/US4843445A/en not_active Expired - Fee Related
- 1986-05-20 AU AU58697/86A patent/AU587619B2/en not_active Ceased
- 1986-05-20 EP EP86903655A patent/EP0261123B1/en not_active Expired
- 1986-05-20 WO PCT/SE1986/000233 patent/WO1986007192A1/en not_active Ceased
- 1986-05-20 JP JP61503007A patent/JPH0781892B2/ja not_active Expired - Lifetime
-
1987
- 1987-01-07 DK DK007287A patent/DK165532C/da not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| AU587619B2 (en) | 1989-08-24 |
| SE8502479D0 (sv) | 1985-05-21 |
| DK7287A (da) | 1987-03-03 |
| JPS63500278A (ja) | 1988-01-28 |
| EP0261123B1 (en) | 1991-03-20 |
| JPH0781892B2 (ja) | 1995-09-06 |
| EP0261123A1 (en) | 1988-03-30 |
| DK165532B (da) | 1992-12-07 |
| WO1986007192A1 (en) | 1986-12-04 |
| DK7287D0 (da) | 1987-01-07 |
| DK165532C (da) | 1993-04-26 |
| AU5869786A (en) | 1986-12-24 |
| US4843445A (en) | 1989-06-27 |
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