SE447972B - Sett och detektor for att detektera fokuspositionen for en med laser arbetande bearbetningsanordning - Google Patents

Sett och detektor for att detektera fokuspositionen for en med laser arbetande bearbetningsanordning

Info

Publication number
SE447972B
SE447972B SE8105214A SE8105214A SE447972B SE 447972 B SE447972 B SE 447972B SE 8105214 A SE8105214 A SE 8105214A SE 8105214 A SE8105214 A SE 8105214A SE 447972 B SE447972 B SE 447972B
Authority
SE
Sweden
Prior art keywords
light
light sensor
shielding element
focus position
condenser lens
Prior art date
Application number
SE8105214A
Other languages
English (en)
Swedish (sv)
Other versions
SE8105214L (sv
Inventor
A Tsutsumi
Original Assignee
Amada Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1980124057U external-priority patent/JPS6121191Y2/ja
Priority claimed from JP55121682A external-priority patent/JPS5746215A/ja
Application filed by Amada Co Ltd filed Critical Amada Co Ltd
Publication of SE8105214L publication Critical patent/SE8105214L/xx
Publication of SE447972B publication Critical patent/SE447972B/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Automatic Focus Adjustment (AREA)
SE8105214A 1980-09-02 1981-09-02 Sett och detektor for att detektera fokuspositionen for en med laser arbetande bearbetningsanordning SE447972B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1980124057U JPS6121191Y2 (de) 1980-09-02 1980-09-02
JP55121682A JPS5746215A (en) 1980-09-02 1980-09-02 Method and device for detecting focal position in laser machining apparatus

Publications (2)

Publication Number Publication Date
SE8105214L SE8105214L (sv) 1982-03-03
SE447972B true SE447972B (sv) 1987-01-12

Family

ID=26458977

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8105214A SE447972B (sv) 1980-09-02 1981-09-02 Sett och detektor for att detektera fokuspositionen for en med laser arbetande bearbetningsanordning

Country Status (9)

Country Link
US (1) US4472055A (de)
AU (1) AU552364B2 (de)
CA (1) CA1173662A (de)
CH (1) CH656568A5 (de)
DE (1) DE3134555A1 (de)
FR (1) FR2489195B1 (de)
GB (1) GB2083216B (de)
IT (1) IT1142728B (de)
SE (1) SE447972B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57171592A (en) * 1981-04-07 1982-10-22 Amada Eng & Service Laser working device
US4734558A (en) * 1983-05-16 1988-03-29 Nec Corporation Laser machining apparatus with controllable mask
US4751376A (en) * 1985-04-12 1988-06-14 Minolta Camera Kabushiki Kaisha Image reader with focus and magnification detection control
DE3623409A1 (de) * 1986-07-11 1988-01-21 Bias Forschung & Entwicklung Verfahren zur ueberwachung des bearbeitungsprozesses mit einer hochleistungsenergiequelle, insbesondere einem laser, und bearbeitungsoptik zur durchfuehrung desselben
US5306902A (en) * 1992-09-01 1994-04-26 International Business Machines Corporation Confocal method and apparatus for focusing in projection lithography
SE508228C2 (sv) * 1997-05-07 1998-09-14 Inst Verkstadstek Forsk Ivf Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning
MXPA01005430A (es) * 1999-01-11 2003-03-27 Thyssenkrupp Technologies Ag Dispositivo para sujetar y soldar laminas metalicas.
US6028662A (en) * 1999-05-26 2000-02-22 International Business Machines Corporation Adjustment of particle beam landing angle
US6617600B1 (en) * 2000-02-16 2003-09-09 Ultratech Stepper, Inc. Radiation shield device and method
US6467178B1 (en) * 2000-09-11 2002-10-22 Abb Automation Inc. Method and apparatus for beam tool center point calibration
US6649863B2 (en) * 2001-01-16 2003-11-18 Potomac Photonics, Inc. Gemstone marking system with a focus sensing unit for sensing relative disposition between a marking surface of the gemstone and a focal plane of a laser beam
US20030227614A1 (en) * 2002-06-05 2003-12-11 Taminiau August A. Laser machining apparatus with automatic focusing
JP2005088053A (ja) * 2003-09-18 2005-04-07 Disco Abrasive Syst Ltd レーザー加工装置
KR100606447B1 (ko) * 2003-12-24 2006-07-31 엘지.필립스 엘시디 주식회사 최적의 포컬 플레인 결정방법 및 이를 이용한 결정화방법
DE502005001790D1 (de) * 2005-06-23 2007-12-06 Trumpf Werkzeugmaschinen Gmbh Verfahren zur bestimmung der fokuslage eines laserstrahls
DE102010039633B4 (de) 2010-08-23 2012-06-28 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Vorrichtung und Verfahren zur Bestimmung der Fokuslage eines zur Laser-Materialbearbeitung verwendeten Laserstrahls entlang der Laserstrahlachse
DE102011006553B4 (de) * 2011-03-31 2013-04-11 Trumpf Laser Gmbh + Co. Kg Verfahren zum Ermitteln der Fokuslage eines Laserstrahls in seinem Arbeitsfeld oder Arbeitsraum
CN105014240B (zh) * 2014-04-29 2017-04-05 中国科学院福建物质结构研究所 Led晶圆激光切割装置和led晶圆激光切割调水平方法
DE102016219928A1 (de) * 2016-10-13 2018-04-19 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren und Vorrichtung zur Bestimmung und zur Regelung einer Fokusposition eines Bearbeitungsstrahls
CN109323849B (zh) * 2017-08-01 2021-02-19 大族激光科技产业集团股份有限公司 一种光纤切割头零焦点测量系统和测量方法
CN114951964B (zh) * 2022-07-04 2024-04-26 西安理工大学 适用于低中高功率激光的焦点判定装置及定焦方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2524807A (en) * 1947-03-28 1950-10-10 Heinz E Kallmann Optical automatic range determining device
GB719700A (en) * 1951-05-18 1954-12-08 Kodak Ltd Method of and apparatus for testing lenses
FR94871E (fr) * 1967-05-18 1970-01-16 Cilas Procédé et dispositif de palpage optique.
GB1284809A (en) * 1970-06-11 1972-08-09 Mitsubishi Electric Corp A laser processing apparatus
US3689159A (en) * 1970-06-11 1972-09-05 Mitsubishi Electric Corp Laser processing apparatus
JPS5227531B1 (de) * 1970-12-22 1977-07-21
SU464796A1 (ru) * 1973-04-13 1975-03-25 Ленинградский Институт Точной Механики И Оптики Оптико-электронное устройство дл анализа положени плоскости изображени
US3997715A (en) * 1974-03-25 1976-12-14 Mca Disco-Vision, Inc. Focusing system for videodisc player
DE2555493A1 (de) * 1974-12-19 1976-06-24 Gen Electric Opto-elektronisches geraet zur erfassung der lage und verfahren
US4009392A (en) * 1976-01-26 1977-02-22 The United States Of America As Represented By The Secretary Of The Navy Radiation focus meter
DE2836428A1 (de) * 1978-08-19 1980-03-06 Battelle Institut E V Verfahren und vorrichtung zur automatischen scharfeinstellung von objektiven
DE2837555A1 (de) * 1978-08-29 1980-03-20 Leitz Ernst Gmbh Elektronische scharfstelleinrichtung
US4322616A (en) * 1979-03-22 1982-03-30 Nippon Kogaku K.K. Focus detecting device with shielding

Also Published As

Publication number Publication date
SE8105214L (sv) 1982-03-03
US4472055A (en) 1984-09-18
AU7480781A (en) 1982-03-11
CA1173662A (en) 1984-09-04
DE3134555A1 (de) 1982-07-08
FR2489195A1 (fr) 1982-03-05
IT1142728B (it) 1986-10-15
FR2489195B1 (fr) 1986-06-27
IT8149209A0 (it) 1981-09-01
AU552364B2 (en) 1986-05-29
CH656568A5 (de) 1986-07-15
GB2083216B (en) 1984-01-11
GB2083216A (en) 1982-03-17

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