SE502809C2 - Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar - Google Patents

Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar

Info

Publication number
SE502809C2
SE502809C2 SE9401669A SE9401669A SE502809C2 SE 502809 C2 SE502809 C2 SE 502809C2 SE 9401669 A SE9401669 A SE 9401669A SE 9401669 A SE9401669 A SE 9401669A SE 502809 C2 SE502809 C2 SE 502809C2
Authority
SE
Sweden
Prior art keywords
prismatic
imaging
angle
spectral
component
Prior art date
Application number
SE9401669A
Other languages
English (en)
Swedish (sv)
Other versions
SE9401669L (sv
SE9401669D0 (sv
Inventor
Peter Lindblom
Original Assignee
Now Optics Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Now Optics Ab filed Critical Now Optics Ab
Priority to SE9401669A priority Critical patent/SE502809C2/sv
Publication of SE9401669D0 publication Critical patent/SE9401669D0/xx
Priority to EP95919724A priority patent/EP0764262B1/fr
Priority to US08/737,339 priority patent/US5859702A/en
Priority to ES95919724T priority patent/ES2151064T3/es
Priority to PCT/SE1995/000543 priority patent/WO1995031703A1/fr
Priority to AT95919724T priority patent/ATE195179T1/de
Priority to AU25424/95A priority patent/AU2542495A/en
Priority to DE69518244T priority patent/DE69518244T2/de
Publication of SE9401669L publication Critical patent/SE9401669L/xx
Publication of SE502809C2 publication Critical patent/SE502809C2/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/14Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G01J3/16Generating the spectrum; Monochromators using refracting elements, e.g. prisms with autocollimation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J2003/1204Grating and filter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/24Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Lenses (AREA)
SE9401669A 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar SE502809C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE9401669A SE502809C2 (sv) 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar
EP95919724A EP0764262B1 (fr) 1994-05-16 1995-05-15 Appareil pour effectuer une analyse spectrale d'une source de lumiere optique par detection d'image et separation d'ordres spectraux speciaux
US08/737,339 US5859702A (en) 1994-05-16 1995-05-15 Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of spectral orders
ES95919724T ES2151064T3 (es) 1994-05-16 1995-05-15 Aparato para efectuar analisis espectrales de una fuente optica luminosa, utilizando deteccion de imagenes y separacion de ordenes espectrales especiales.
PCT/SE1995/000543 WO1995031703A1 (fr) 1994-05-16 1995-05-15 Appareil pour effectuer une analyse spectrale d'une source de lumiere optique par detection d'image et separation d'ordres spectraux
AT95919724T ATE195179T1 (de) 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen
AU25424/95A AU2542495A (en) 1994-05-16 1995-05-15 Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of special spectral orders
DE69518244T DE69518244T2 (de) 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9401669A SE502809C2 (sv) 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar

Publications (3)

Publication Number Publication Date
SE9401669D0 SE9401669D0 (sv) 1994-05-16
SE9401669L SE9401669L (sv) 1995-11-17
SE502809C2 true SE502809C2 (sv) 1996-01-22

Family

ID=20394006

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9401669A SE502809C2 (sv) 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar

Country Status (8)

Country Link
US (1) US5859702A (fr)
EP (1) EP0764262B1 (fr)
AT (1) ATE195179T1 (fr)
AU (1) AU2542495A (fr)
DE (1) DE69518244T2 (fr)
ES (1) ES2151064T3 (fr)
SE (1) SE502809C2 (fr)
WO (1) WO1995031703A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012142980A1 (fr) 2011-04-19 2012-10-26 20Ten Sports, S.R.O. Embout de manche multifonctionnel

Families Citing this family (20)

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DE19537949A1 (de) * 1995-10-12 1997-04-17 Zeiss Carl Fa Spektralapparat zum konzentrischen Typ mit FEry-Prisma
US5675411A (en) * 1996-05-10 1997-10-07 General Atomics Broad-band spectrometer with high resolution
CA2330311A1 (fr) 1998-04-29 1999-11-04 American Holographic, Inc. Spectrometre concentrique a correction
US6603549B2 (en) 2000-02-25 2003-08-05 Cymer, Inc. Convolution method for measuring laser bandwidth
US6406153B1 (en) 2000-11-10 2002-06-18 Paul R. Stremple Spectral dispersion device
US6538737B2 (en) * 2001-01-29 2003-03-25 Cymer, Inc. High resolution etalon-grating spectrometer
FR2857746B1 (fr) * 2003-07-16 2005-11-25 Agence Spatiale Europeenne Spectrometre optique miniaturise a haute resolution
US7564552B2 (en) * 2004-05-14 2009-07-21 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US7359052B2 (en) * 2004-05-14 2008-04-15 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US20060023217A1 (en) * 2004-05-28 2006-02-02 Chemimage Corporation Method and apparatus for producing a mosaic image
US7408641B1 (en) 2005-02-14 2008-08-05 Kla-Tencor Technologies Corp. Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
US7495761B2 (en) * 2006-02-03 2009-02-24 Foster-Miller, Inc. Array detector coupled spectroanalytical system and graded blaze angle grating
TWI345050B (en) * 2007-08-03 2011-07-11 Oto Photonics Inc Optical system and method of manufacturing the same
US9146155B2 (en) * 2007-03-15 2015-09-29 Oto Photonics, Inc. Optical system and manufacturing method thereof
DE102008007783A1 (de) * 2008-02-06 2009-08-13 Erwin Kayser-Threde Gmbh Abbildendes Spektrometer, insbesondere für die Fernerkundung
US20090273840A1 (en) 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
DE102009003413B4 (de) 2009-01-30 2022-01-20 Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. Echelle-Spektrometeranordnung mit interner Vordispersion
US20170010153A1 (en) 2014-01-30 2017-01-12 Horiba Instruments Incorporated Spectroscopic mapping system and method
CN108738335B (zh) 2016-01-14 2021-03-16 耶拿分析仪器股份公司 具有二维光谱的光谱仪
TWI715599B (zh) 2016-07-12 2021-01-11 台灣超微光學股份有限公司 光譜儀模組及其製作方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE359648B (fr) * 1972-03-17 1973-09-03 N Danielsson
FI75047C (sv) * 1982-05-11 1988-04-11 Scanoptics Oy Anordning för utförande av spektralanalys.
US5139335A (en) * 1990-08-24 1992-08-18 Sets, Inc. Holographic grating imaging spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012142980A1 (fr) 2011-04-19 2012-10-26 20Ten Sports, S.R.O. Embout de manche multifonctionnel

Also Published As

Publication number Publication date
AU2542495A (en) 1995-12-05
ATE195179T1 (de) 2000-08-15
US5859702A (en) 1999-01-12
EP0764262A1 (fr) 1997-03-26
WO1995031703A1 (fr) 1995-11-23
EP0764262B1 (fr) 2000-08-02
SE9401669L (sv) 1995-11-17
DE69518244D1 (de) 2000-09-07
DE69518244T2 (de) 2001-03-29
ES2151064T3 (es) 2000-12-16
SE9401669D0 (sv) 1994-05-16

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