SE506558C2 - Givarelement för tryckgivare - Google Patents

Givarelement för tryckgivare

Info

Publication number: SE506558C2
Authority: SE; Sweden
Prior art keywords: sensor element; membrane; electrically conductive; housing part; capacitor electrode
Prior art date: 1994-04-14

Application number

SE9401268A

Other languages

English (en)

Swedish (sv)

Other versions

SE9401268L (sv

SE9401268D0 (sv

Inventor

Nils Gunno Hallberg

Staffan Jonsson

Original Assignee

Cecap Ab

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-04-14

Filing date

1994-04-14

Publication date

1998-01-12

1994-04-14 Application filed by Cecap Ab filed Critical Cecap Ab

1994-04-14 Priority to SE9401268A priority Critical patent/SE506558C2/sv

1994-04-14 Publication of SE9401268D0 publication Critical patent/SE9401268D0/xx

1995-04-18 Priority to EP95916908A priority patent/EP0755507B1/en

1995-04-18 Priority to DE69521890T priority patent/DE69521890T2/de

1995-04-18 Priority to US08/722,012 priority patent/US5920015A/en

1995-04-18 Priority to JP52691495A priority patent/JP3757984B2/ja

1995-04-18 Priority to PCT/SE1995/000425 priority patent/WO1995028624A1/en

1995-10-15 Publication of SE9401268L publication Critical patent/SE9401268L/

1998-01-12 Publication of SE506558C2 publication Critical patent/SE506558C2/sv

Links

239000003990 capacitor Substances 0.000 claims abstract description 36
239000006112 glass ceramic composition Substances 0.000 claims abstract description 4
239000012777 electrically insulating material Substances 0.000 claims abstract 8
239000012528 membrane Substances 0.000 claims description 31
230000003014 reinforcing effect Effects 0.000 claims description 6
229910010293 ceramic material Inorganic materials 0.000 claims description 2
239000011810 insulating material Substances 0.000 abstract 1
239000011521 glass Substances 0.000 description 14
239000000463 material Substances 0.000 description 13
239000004020 conductor Substances 0.000 description 6
238000010438 heat treatment Methods 0.000 description 6
230000000694 effects Effects 0.000 description 5
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
239000002241 glass-ceramic Substances 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000011230 binding agent Substances 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
229910052737 gold Inorganic materials 0.000 description 2
239000010931 gold Substances 0.000 description 2
238000012886 linear function Methods 0.000 description 2
239000000155 melt Substances 0.000 description 2
229910000679 solder Inorganic materials 0.000 description 2
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
229910001316 Ag alloy Inorganic materials 0.000 description 1
229910001260 Pt alloy Inorganic materials 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
206010040925 Skin striae Diseases 0.000 description 1
208000031439 Striae Distensae Diseases 0.000 description 1
NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000012885 constant function Methods 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000010304 firing Methods 0.000 description 1
230000007257 malfunction Effects 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
238000000034 method Methods 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
230000002787 reinforcement Effects 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
125000006850 spacer group Chemical group 0.000 description 1
230000007704 transition Effects 0.000 description 1
239000003039 volatile agent Substances 0.000 description 1
230000003313 weakening effect Effects 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

SE9401268A 1994-04-14 1994-04-14 Givarelement för tryckgivare SE506558C2 (sv)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
SE9401268A SE506558C2 (sv)	1994-04-14	1994-04-14	Givarelement för tryckgivare
EP95916908A EP0755507B1 (en)	1994-04-14	1995-04-18	Stabilized pressure sensor
DE69521890T DE69521890T2 (de)	1994-04-14	1995-04-18	Stabilisierter drucksensor
US08/722,012 US5920015A (en)	1994-04-14	1995-04-18	Pressure sensor with capacitor electrodes and shield layer parallel thereto
JP52691495A JP3757984B2 (ja)	1994-04-14	1995-04-18	安定化圧力センサ
PCT/SE1995/000425 WO1995028624A1 (en)	1994-04-14	1995-04-18	Stabilized pressure sensor

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SE9401268A SE506558C2 (sv)	1994-04-14	1994-04-14	Givarelement för tryckgivare

Publications (3)

Publication Number	Publication Date
SE9401268D0 SE9401268D0 (sv)	1994-04-14
SE9401268L SE9401268L (sv)	1995-10-15
SE506558C2 true SE506558C2 (sv)	1998-01-12

Family

ID=20393657

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE9401268A SE506558C2 (sv)	1994-04-14	1994-04-14	Givarelement för tryckgivare

Country Status (6)

Country	Link
US (1)	US5920015A (ja)
EP (1)	EP0755507B1 (ja)
JP (1)	JP3757984B2 (ja)
DE (1)	DE69521890T2 (ja)
SE (1)	SE506558C2 (ja)
WO (1)	WO1995028624A1 (ja)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE9700613D0 (sv)	1997-02-20	1997-02-20	Cecap Ab	Sensorelement med temperaturmätning
US20040099061A1 (en)	1997-12-22	2004-05-27	Mks Instruments	Pressure sensor for detecting small pressure differences and low pressures
WO1999034184A1 (de) *	1997-12-23	1999-07-08	Unaxis Trading Ag	Kapazitive vakuummesszelle
JP4334139B2 (ja)	1997-12-23	2009-09-30	インフィコンゲゼルシャフトミットベシュレンクテルハフツング	容量式の真空測定セルのためのダイヤフラム
US6209398B1 (en) *	1998-09-18	2001-04-03	Texas Instruments Incorporated	Fluid pressure transducer apparatus and method for assembling
US6532834B1 (en) *	1999-08-06	2003-03-18	Setra Systems, Inc.	Capacitive pressure sensor having encapsulated resonating components
FR2818676B1 (fr) *	2000-12-27	2003-03-07	Freyssinet Int Stup	Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
JP3850263B2 (ja) *	2001-10-25	2006-11-29	京セラ株式会社	圧力検出装置用パッケージおよび圧力検出装置
US6837112B2 (en) *	2003-03-22	2005-01-04	Stec Inc.	Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) *	2003-05-16	2006-02-07	Mks Instruments, Inc.	Contaminant deposition control baffle for a capacitive pressure transducer
DE10323059A1 (de) *	2003-05-20	2004-12-09	Prominent Dosiertechnik Gmbh	Sensormembran
US7201057B2 (en)	2004-09-30	2007-04-10	Mks Instruments, Inc.	High-temperature reduced size manometer
US7137301B2 (en) *	2004-10-07	2006-11-21	Mks Instruments, Inc.	Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en)	2004-10-07	2006-11-28	Mks Instruments, Inc.	Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en)	2005-01-14	2007-04-17	Mks Instruments, Inc.	Turbo sump for use with capacitive pressure sensor
JP2008160352A (ja) *	2006-12-22	2008-07-10	Yamaha Corp	静電容量センサ
US20080202251A1 (en) *	2007-02-27	2008-08-28	Iee International Electronics & Engineering S.A.	Capacitive pressure sensor
DE102011081887A1 (de) *	2011-08-31	2013-02-28	Robert Bosch Gmbh	Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
US9605952B2 (en)	2012-03-08	2017-03-28	Quality Manufacturing Inc.	Touch sensitive robotic gripper
CN104271322B (zh)	2012-03-08	2016-09-21	品质制造有限公司	触敏机器人抓手
US8943895B2 (en)	2012-09-07	2015-02-03	Dynisco Instruments Llc	Capacitive pressure sensor
US9103738B2 (en)	2012-09-07	2015-08-11	Dynisco Instruments Llc	Capacitive pressure sensor with intrinsic temperature compensation
US8984952B2 (en)	2012-09-07	2015-03-24	Dynisco Instruments Llc	Capacitive pressure sensor
US20180330886A1 (en) *	2015-01-15	2018-11-15	Stretchsense Limited	Electromechanical device with improved connection
US10718359B2 (en)	2015-08-21	2020-07-21	Quality Manufacturing Inc.	Devices and systems for producing rotational actuation
CN105784212B (zh) *	2016-03-25	2018-09-21	深圳安培龙科技股份有限公司	一种陶瓷电容式压力传感器及制备方法
JP6871721B2 (ja) *	2016-11-17	2021-05-12	株式会社堀場エステック	圧力式流量計
CN110702301B (zh) *	2019-11-19	2024-11-01	川北真空科技(北京)有限公司	一种薄膜真空计
WO2022019167A1 (ja)	2020-07-21	2022-01-27	株式会社村田製作所	圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法
CN112834110A (zh) *	2020-12-30	2021-05-25	季华实验室	一种高精度电容薄膜真空计
US11940336B2 (en) *	2021-03-26	2024-03-26	Sporian Microsystems, Inc.	Driven-shield capacitive pressure sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FI74350C (fi) *	1984-02-21	1988-01-11	Vaisala Oy	Kapacitiv absoluttryckgivare.
SE459887B (sv) *	1987-02-12	1989-08-14	Hydrolab Ab	Tryckgivare
FI872049A7 (fi) *	1987-05-08	1988-11-09	Vaisala Oy	Paineanturissa käytettävä kondensaattorirakenne.
US4823603A (en) *	1988-05-03	1989-04-25	Vacuum General, Inc.	Capacitance manometer having stress relief for fixed electrode
DE4111118A1 (de) *	1991-04-03	1992-10-08	Univ Chemnitz Tech	Mikromechanischer kapazitiver druckwandler
DE4136995C2 (de) *	1991-11-11	1996-08-08	Sensycon Ind Sensorsyst	Kapazitiver Drucksensor
US5189591A (en) *	1992-06-12	1993-02-23	Allied-Signal Inc.	Aluminosilicate glass pressure transducer

1994
- 1994-04-14 SE SE9401268A patent/SE506558C2/sv not_active IP Right Cessation
1995
- 1995-04-18 WO PCT/SE1995/000425 patent/WO1995028624A1/en not_active Ceased
- 1995-04-18 EP EP95916908A patent/EP0755507B1/en not_active Expired - Lifetime
- 1995-04-18 US US08/722,012 patent/US5920015A/en not_active Expired - Lifetime
- 1995-04-18 JP JP52691495A patent/JP3757984B2/ja not_active Expired - Lifetime
- 1995-04-18 DE DE69521890T patent/DE69521890T2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0755507B1 (en)	2001-07-25
WO1995028624A1 (en)	1995-10-26
DE69521890T2 (de)	2004-08-12
SE9401268L (sv)	1995-10-15
US5920015A (en)	1999-07-06
SE9401268D0 (sv)	1994-04-14
EP0755507A1 (en)	1997-01-29
JP3757984B2 (ja)	2006-03-22
JPH10501887A (ja)	1998-02-17
DE69521890D1 (de)	2001-08-30

Legal Events

Date	Code	Title	Description
2014-06-03	NUG	Patent has lapsed

Publication	Publication Date	Title
SE506558C2 (sv)	1998-01-12	Givarelement för tryckgivare
US4388668A (en)	1983-06-14	Capacitive pressure transducer
US4426673A (en)	1984-01-17	Capacitive pressure transducer and method of making same
US4703658A (en)	1987-11-03	Pressure sensor assembly
JP3723217B2 (ja)	2005-12-07	圧力トランスミッタおよび容量性圧力センサの製造方法
US4207604A (en)	1980-06-10	Capacitive pressure transducer with cut out conductive plate
EP0025336B1 (en)	1985-04-24	Variable capacitance pressure transducer assembly
US5257542A (en)	1993-11-02	Sensor for a capacitance pressure gauge
US4177496A (en)	1979-12-04	Capacitive pressure transducer
US5150275A (en)	1992-09-22	Capacitive pressure sensor
JPH10148591A (ja)	1998-06-02	圧力検出装置
EP2834608B1 (en)	2018-09-19	Method for production of a ceramic pressure sensor
JPS6034687B2 (ja)	1985-08-10	圧力電子変換素子
US4531415A (en)	1985-07-30	Differential pressure transducer
EP0424149A1 (en)	1991-04-24	Capacitance accelerometer
EP0198018A1 (en)	1986-10-22	Capacitive sensing cell made of brittle material
JPS61176832A (ja)	1986-08-08	トランスジユーサ・インサート、その製造方法、および機械的変動測定センサ
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JP3399688B2 (ja)	2003-04-21	圧力センサ
CN207099042U (zh)	2018-03-13	压电部件
US6564644B1 (en)	2003-05-20	High temperature surface mount transducer
JP2606376B2 (ja)	1997-04-30	重量検出装置
CN116472443A (zh)	2023-07-21	平面陶瓷压力传感器及相关制造方法
WO2012063477A1 (ja)	2012-05-18	圧力センサ
JP3083115B2 (ja)	2000-09-04	静電容量型圧力センサ素子