SE547537C2 - A transducer arrangement and a method for fabricating said transducer arrangement - Google Patents

A transducer arrangement and a method for fabricating said transducer arrangement

Info

Publication number
SE547537C2
SE547537C2 SE2350347A SE2350347A SE547537C2 SE 547537 C2 SE547537 C2 SE 547537C2 SE 2350347 A SE2350347 A SE 2350347A SE 2350347 A SE2350347 A SE 2350347A SE 547537 C2 SE547537 C2 SE 547537C2
Authority
SE
Sweden
Prior art keywords
omt
emt
transduction
transducer arrangement
substrate
Prior art date
Application number
SE2350347A
Other versions
SE2350347A1 (en
Inventor
Joey Frey
Johan Kolvik
Paul Burger
Laer Raphaël Van
Original Assignee
Joey Frey
Johan Kolvik
Paul Burger
Van Laer Raphael
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joey Frey, Johan Kolvik, Paul Burger, Van Laer Raphael filed Critical Joey Frey
Priority to SE2350347A priority Critical patent/SE547537C2/en
Priority to PCT/SE2024/050267 priority patent/WO2024205470A1/en
Priority to EP24781397.5A priority patent/EP4689792A1/en
Publication of SE2350347A1 publication Critical patent/SE2350347A1/en
Publication of SE547537C2 publication Critical patent/SE547537C2/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N10/00—Quantum computing, i.e. information processing based on quantum-mechanical phenomena
    • G06N10/40—Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/70—Photonic quantum communication
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H10D86/0214—Manufacture or treatment of multiple TFTs using temporary substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
    • G02F2/02—Frequency-changing of light, e.g. by quantum counters
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N10/00—Quantum computing, i.e. information processing based on quantum-mechanical phenomena
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Pure & Applied Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Mathematical Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Optimization (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Computational Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Data Mining & Analysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

The disclosure relates to a transducer arrangement for transducing signals according to at least one of the following alternative modes of operation: a) transduction from microwaves to mechanical waves, and vice versa; b) transduction from mechanical waves to optical waves, and vice versa; c) transduction from microwaves to optical waves, via mechanical waves, and vice versa; said arrangement further comprising: a transducer device (EMT; OMT; hybrid EMT-OMT) having a region which is either optomechanically or electromechanically active, or both, for said transduction; and a substrate The transducer device (EMT ; OMT ; hybrid EMT-OMT) is clamped to the substrate in a manner so that said active region has at least one side in full contact with said substrate.
SE2350347A 2023-03-27 2023-03-27 A transducer arrangement and a method for fabricating said transducer arrangement SE547537C2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE2350347A SE547537C2 (en) 2023-03-27 2023-03-27 A transducer arrangement and a method for fabricating said transducer arrangement
PCT/SE2024/050267 WO2024205470A1 (en) 2023-03-27 2024-03-25 A clamped transducer arrangement for quantum level transduction and method for fabrication thereof
EP24781397.5A EP4689792A1 (en) 2023-03-27 2024-03-25 A clamped transducer arrangement for quantum level transduction and method for fabrication thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE2350347A SE547537C2 (en) 2023-03-27 2023-03-27 A transducer arrangement and a method for fabricating said transducer arrangement

Publications (2)

Publication Number Publication Date
SE2350347A1 SE2350347A1 (en) 2024-09-28
SE547537C2 true SE547537C2 (en) 2025-10-14

Family

ID=92906476

Family Applications (1)

Application Number Title Priority Date Filing Date
SE2350347A SE547537C2 (en) 2023-03-27 2023-03-27 A transducer arrangement and a method for fabricating said transducer arrangement

Country Status (3)

Country Link
EP (1) EP4689792A1 (en)
SE (1) SE547537C2 (en)
WO (1) WO2024205470A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9454061B1 (en) * 2015-12-17 2016-09-27 International Business Machines Corporation Quantum coherent microwave to optical conversion scheme employing a mechanical element and a squid
US20190270635A1 (en) * 2018-03-05 2019-09-05 California Institute Of Technology Techniques for bidirectionaltransduction of quantum level signals between optical and microwave frequencies using a common acoustic intermediary
WO2020096448A1 (en) * 2018-11-07 2020-05-14 Technische Universiteit Delft Quantum wavelength converter between a microwave signal and an optical signal
WO2020260251A1 (en) * 2019-06-27 2020-12-30 International Business Machines Corporation Superconducting interposer for optical transduction of quantum information

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9454061B1 (en) * 2015-12-17 2016-09-27 International Business Machines Corporation Quantum coherent microwave to optical conversion scheme employing a mechanical element and a squid
US20190270635A1 (en) * 2018-03-05 2019-09-05 California Institute Of Technology Techniques for bidirectionaltransduction of quantum level signals between optical and microwave frequencies using a common acoustic intermediary
WO2020096448A1 (en) * 2018-11-07 2020-05-14 Technische Universiteit Delft Quantum wavelength converter between a microwave signal and an optical signal
WO2020260251A1 (en) * 2019-06-27 2020-12-30 International Business Machines Corporation Superconducting interposer for optical transduction of quantum information

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
C.J. Sarabalis et al., "Release-free silicon-on-insulator cavity optomechanics," Optica 4, 1147 (2017); DOI: 10.1364/OPTICA.4.001147 *
G. Roelkens et al., "Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits", IEEE Journal of Selected Topics in Quantum Electronics, vol. 29, no. 3: Photon. Elec. Co-Inte. and Adv. Trans. Print., pp. 1-14, May-June 2023, Art no. 8200414; DOI: 10.1109/JSTQE.2022.3222686 (Date of Publication: 16 November 2022) *
J. Zhang et al., "Subwavelength Control of Photons and Phonons in Release-Free Silicon Optomechanical Resonators", ACS Photonics, vol. 9, 3855 (2022); DOI: 10.1021/acsphotonics.2c00791 *
Johan Kolvik, Paul Burger, Joey Frey, and Raphaël Van Laer, "Clamped and sideband-resolved silicon optomechanical crystals", arXiv:2303.18091v1 (2023-03-31); DOI: 10.48550/arXiv.2303.18091 *
N. Xu et al., "Recent advances in nano-opto-electro-mechanical systems", Nanophotonics, vol. 10, 2265 (2021); DOI: 10.1515/nanoph-2021-0082 *
R. Braive, "Electro-optomechanics with photonic crystal for weak signal detection and high purity signal generation", Habilitation Thesis, Université de Paris Cité (2022) [https://hal.science/tel-04037894v1/document; uploaded 2023-03-20] *
S. Liu et al., "Optomechanical crystal with bound states in the continuum", Nature Communications, vol. 13, 3187 (2022); DOI: 10.1038/s41467-022-30965-6 *
W. Jiang et al., "Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency", Nature Communications, vol. 11, 1166 (2020); DOI: 10.1038/s41467-020-14863-3 *

Also Published As

Publication number Publication date
EP4689792A1 (en) 2026-02-11
SE2350347A1 (en) 2024-09-28
WO2024205470A1 (en) 2024-10-03

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