SE9701618L - Kondensator i integrerad krets - Google Patents

Kondensator i integrerad krets

Info

Publication number
SE9701618L
SE9701618L SE9701618A SE9701618A SE9701618L SE 9701618 L SE9701618 L SE 9701618L SE 9701618 A SE9701618 A SE 9701618A SE 9701618 A SE9701618 A SE 9701618A SE 9701618 L SE9701618 L SE 9701618L
Authority
SE
Sweden
Prior art keywords
layer
metal layer
integrated circuit
capacitor
overlaps
Prior art date
Application number
SE9701618A
Other languages
English (en)
Other versions
SE9701618D0 (sv
SE520173C2 (sv
Inventor
Hans Nordstroem
Stefan Nygren
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE9701618A priority Critical patent/SE520173C2/sv
Publication of SE9701618D0 publication Critical patent/SE9701618D0/sv
Priority to TW086110784A priority patent/TW360941B/zh
Priority to AU73530/98A priority patent/AU7353098A/en
Priority to PCT/SE1998/000619 priority patent/WO1998049722A1/en
Priority to EP98920765A priority patent/EP1016132B1/en
Priority to KR1019997009164A priority patent/KR20010006086A/ko
Priority to DE69839775T priority patent/DE69839775D1/de
Priority to JP54687098A priority patent/JP2001522530A/ja
Priority to CA002287983A priority patent/CA2287983A1/en
Priority to CN98804600A priority patent/CN1113401C/zh
Priority to US09/066,814 priority patent/US6100574A/en
Priority to US09/174,417 priority patent/US6100133A/en
Publication of SE9701618L publication Critical patent/SE9701618L/sv
Publication of SE520173C2 publication Critical patent/SE520173C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/495—Capacitive arrangements or effects of, or between wiring layers
    • H10W20/496—Capacitor integral with wiring layers

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
SE9701618A 1997-04-29 1997-04-29 Förfarande för tillverkning av en kondensator i en integrerad krets SE520173C2 (sv)

Priority Applications (12)

Application Number Priority Date Filing Date Title
SE9701618A SE520173C2 (sv) 1997-04-29 1997-04-29 Förfarande för tillverkning av en kondensator i en integrerad krets
TW086110784A TW360941B (en) 1997-04-29 1997-07-29 Capacitors in integrated circuits
CN98804600A CN1113401C (zh) 1997-04-29 1998-04-03 集成电路中的电容器及其制造方法
DE69839775T DE69839775D1 (de) 1997-04-29 1998-04-03 Kondensatoren in integrierten schaltkreisen
PCT/SE1998/000619 WO1998049722A1 (en) 1997-04-29 1998-04-03 Capacitors in integrated circuits
EP98920765A EP1016132B1 (en) 1997-04-29 1998-04-03 Capacitors in integrated circuits
KR1019997009164A KR20010006086A (ko) 1997-04-29 1998-04-03 집적 회로의 커패시터
AU73530/98A AU7353098A (en) 1997-04-29 1998-04-03 Capacitors in integrated circuits
JP54687098A JP2001522530A (ja) 1997-04-29 1998-04-03 集積回路のコンデンサ
CA002287983A CA2287983A1 (en) 1997-04-29 1998-04-03 Capacitors in integrated circuits
US09/066,814 US6100574A (en) 1997-04-29 1998-04-28 Capacitors in integrated circuits
US09/174,417 US6100133A (en) 1997-04-29 1998-10-19 Capacitors in integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9701618A SE520173C2 (sv) 1997-04-29 1997-04-29 Förfarande för tillverkning av en kondensator i en integrerad krets

Publications (3)

Publication Number Publication Date
SE9701618D0 SE9701618D0 (sv) 1997-04-29
SE9701618L true SE9701618L (sv) 1998-10-30
SE520173C2 SE520173C2 (sv) 2003-06-03

Family

ID=20406774

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9701618A SE520173C2 (sv) 1997-04-29 1997-04-29 Förfarande för tillverkning av en kondensator i en integrerad krets

Country Status (11)

Country Link
US (2) US6100574A (sv)
EP (1) EP1016132B1 (sv)
JP (1) JP2001522530A (sv)
KR (1) KR20010006086A (sv)
CN (1) CN1113401C (sv)
AU (1) AU7353098A (sv)
CA (1) CA2287983A1 (sv)
DE (1) DE69839775D1 (sv)
SE (1) SE520173C2 (sv)
TW (1) TW360941B (sv)
WO (1) WO1998049722A1 (sv)

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EP1017101B1 (fr) * 1998-12-29 2009-07-29 Nxp B.V. Circuit intégré incluant un réseau capacitif à faible dispersion
US6323044B1 (en) * 1999-01-12 2001-11-27 Agere Systems Guardian Corp. Method of forming capacitor having the lower metal electrode for preventing undesired defects at the surface of the metal plug
US6291307B1 (en) 1999-08-06 2001-09-18 Chartered Semiconductor Manufacturing Ltd. Method and structure to make planar analog capacitor on the top of a STI structure
DE10035584A1 (de) * 2000-07-21 2002-01-31 Philips Corp Intellectual Pty Mobilfunkgerät
WO2002025709A2 (en) * 2000-09-21 2002-03-28 Casper Michael D Integrated thin film capacitor/inductor/interconnect system and method
US6890629B2 (en) * 2001-09-21 2005-05-10 Michael D. Casper Integrated thin film capacitor/inductor/interconnect system and method
SE0103036D0 (sv) * 2001-05-04 2001-09-13 Ericsson Telefon Ab L M Semiconductor process and integrated circuit
US6603167B2 (en) * 2001-06-15 2003-08-05 Silicon Integrated Systems Corp. Capacitor with lower electrode located at the same level as an interconnect line
US20030006480A1 (en) * 2001-06-29 2003-01-09 Jenny Lian MIMCap with high dielectric constant insulator
DE10219116A1 (de) 2002-04-29 2003-11-13 Infineon Technologies Ag Integrierte Schaltungsanordnung mit Verbindungslagen sowie zugehörige Herstellungsverfahren
JP2005203455A (ja) * 2004-01-14 2005-07-28 Renesas Technology Corp 半導体装置およびその製造方法
JP3851910B2 (ja) * 2004-03-26 2006-11-29 株式会社東芝 半導体装置
KR100630689B1 (ko) * 2004-07-08 2006-10-02 삼성전자주식회사 트렌치형 ｍｉｍ 커패시터를 구비한 반도체 소자의 제조 방법
JP4928748B2 (ja) * 2005-06-27 2012-05-09 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP5111745B2 (ja) * 2005-08-24 2013-01-09 イビデン株式会社 コンデンサ及びその製造方法
US8669637B2 (en) * 2005-10-29 2014-03-11 Stats Chippac Ltd. Integrated passive device system
US8409970B2 (en) 2005-10-29 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of making integrated passive devices
US8158510B2 (en) 2009-11-19 2012-04-17 Stats Chippac, Ltd. Semiconductor device and method of forming IPD on molded substrate
US8791006B2 (en) * 2005-10-29 2014-07-29 Stats Chippac, Ltd. Semiconductor device and method of forming an inductor on polymer matrix composite substrate
US8188590B2 (en) 2006-03-30 2012-05-29 Stats Chippac Ltd. Integrated circuit package system with post-passivation interconnection and integration
US9331057B2 (en) * 2007-10-26 2016-05-03 Infineon Technologies Ag Semiconductor device
CN102709270A (zh) * 2012-05-23 2012-10-03 上海宏力半导体制造有限公司 Mim电容器及其形成方法
CN108538816B (zh) * 2018-02-07 2020-03-24 厦门市三安集成电路有限公司 一种氮化硅-聚酰亚胺复合介质的mim电容器及制作方法
CN108447864B (zh) * 2018-03-14 2023-09-29 长鑫存储技术有限公司 半导体存储器件结构及其制作方法
CN110071096B (zh) * 2019-03-13 2021-09-10 福建省福联集成电路有限公司 一种提高容值和耐压的叠状电容的制作方法
CN111128957B (zh) * 2019-12-26 2021-11-09 华虹半导体(无锡)有限公司 嵌入结构的mim电容及其制造方法
CN112530939B (zh) * 2020-11-19 2023-11-07 偲百创(深圳)科技有限公司 集成电容器及其制造方法，射频电路
US20230187144A1 (en) * 2021-12-14 2023-06-15 Mediatek Inc. Capacitor structure and semiconductor device

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FR2526225B1 (fr) * 1982-04-30 1985-11-08 Radiotechnique Compelec Procede de realisation d'un condensateur integre, et dispositif ainsi obtenu
NL8701357A (nl) * 1987-06-11 1989-01-02 Philips Nv Halfgeleiderinrichting bevattende een condensator en een begraven passiveringslaag.
JPH03203261A (ja) * 1989-12-28 1991-09-04 Sony Corp 半導体装置
JP2660359B2 (ja) * 1991-01-30 1997-10-08 三菱電機株式会社 半導体装置
US5189594A (en) * 1991-09-20 1993-02-23 Rohm Co., Ltd. Capacitor in a semiconductor integrated circuit and non-volatile memory using same
US5406447A (en) * 1992-01-06 1995-04-11 Nec Corporation Capacitor used in an integrated circuit and comprising opposing electrodes having barrier metal films in contact with a dielectric film
JP2827661B2 (ja) * 1992-02-19 1998-11-25 日本電気株式会社 容量素子及びその製造方法
JP2753789B2 (ja) * 1993-02-10 1998-05-20 日本電信電話株式会社 容量素子の製造方法
JP3025733B2 (ja) * 1993-07-22 2000-03-27 三洋電機株式会社 半導体集積回路装置
US5594278A (en) * 1994-04-22 1997-01-14 Nippon Steel Corporation Semiconductor device having a via hole with an aspect ratio of not less than four, and interconnections therein
JP3045928B2 (ja) * 1994-06-28 2000-05-29 松下電子工業株式会社 半導体装置およびその製造方法
US5563762A (en) * 1994-11-28 1996-10-08 Northern Telecom Limited Capacitor for an integrated circuit and method of formation thereof, and a method of adding on-chip capacitors to an integrated circuit
US5576240A (en) * 1994-12-09 1996-11-19 Lucent Technologies Inc. Method for making a metal to metal capacitor
US5574621A (en) * 1995-03-27 1996-11-12 Motorola, Inc. Integrated circuit capacitor having a conductive trench
US5554565A (en) * 1996-02-26 1996-09-10 Taiwan Semiconductor Manufacturing Company Ltd. Modified BP-TEOS tungsten-plug contact process

Also Published As

Publication number Publication date
US6100133A (en) 2000-08-08
SE9701618D0 (sv) 1997-04-29
JP2001522530A (ja) 2001-11-13
US6100574A (en) 2000-08-08
SE520173C2 (sv) 2003-06-03
WO1998049722A1 (en) 1998-11-05
CN1113401C (zh) 2003-07-02
AU7353098A (en) 1998-11-24
CN1253661A (zh) 2000-05-17
CA2287983A1 (en) 1998-11-05
EP1016132A1 (en) 2000-07-05
KR20010006086A (ko) 2001-01-15
EP1016132B1 (en) 2008-07-23
TW360941B (en) 1999-06-11
DE69839775D1 (de) 2008-09-04

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