SG146594A1 - A method and system for patterning a mask layer - Google Patents

A method and system for patterning a mask layer

Info

Publication number
SG146594A1
SG146594A1 SG200802511-6A SG2008025116A SG146594A1 SG 146594 A1 SG146594 A1 SG 146594A1 SG 2008025116 A SG2008025116 A SG 2008025116A SG 146594 A1 SG146594 A1 SG 146594A1
Authority
SG
Singapore
Prior art keywords
pattern
mask layer
soldermask
wax
patterning
Prior art date
Application number
SG200802511-6A
Other languages
English (en)
Inventor
Scott J Limb
Eric J Shrader
Uma Srinivasan
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of SG146594A1 publication Critical patent/SG146594A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/0551—Exposure mask directly printed on the PCB
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
SG200802511-6A 2007-03-30 2008-03-31 A method and system for patterning a mask layer SG146594A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/731,689 US8968985B2 (en) 2007-03-30 2007-03-30 Method and system for patterning a mask layer

Publications (1)

Publication Number Publication Date
SG146594A1 true SG146594A1 (en) 2008-10-30

Family

ID=39615731

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200802511-6A SG146594A1 (en) 2007-03-30 2008-03-31 A method and system for patterning a mask layer
SG10201508031QA SG10201508031QA (en) 2007-03-30 2008-03-31 A method and system for patterning a mask layer

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201508031QA SG10201508031QA (en) 2007-03-30 2008-03-31 A method and system for patterning a mask layer

Country Status (6)

Country Link
US (1) US8968985B2 (de)
EP (1) EP1975699B1 (de)
JP (1) JP5128337B2 (de)
CN (1) CN101276143B (de)
MY (1) MY152881A (de)
SG (2) SG146594A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090250246A1 (en) * 2008-04-07 2009-10-08 Andrew Yaung Solder by numbers, a method and system for populating printed circuit boards
US8303832B2 (en) * 2009-08-17 2012-11-06 Palo Alto Research Center Incorporated Solid inks for masks for printed circuit boards and other electronic devices
US8211617B2 (en) * 2009-08-17 2012-07-03 Palo Alto Research Center Incorporated Solid inks for printed masks
JP6525500B2 (ja) * 2014-02-03 2019-06-05 キヤノン株式会社 パターン形成方法、リソグラフィ装置及び物品の製造方法
CN104355287B (zh) * 2014-11-18 2016-08-24 中国科学院半导体研究所 一种多功能组合型纳米图形制作方法
CN107960018A (zh) * 2017-12-22 2018-04-24 昆山四合电子有限公司 一种线路板固化加工工艺
CN108811358A (zh) * 2018-06-22 2018-11-13 赣州中盛隆电子有限公司 一种电路板的阻焊工艺
WO2025039208A1 (zh) * 2023-08-23 2025-02-27 北京时代全芯存储技术股份有限公司 相变材料的光刻及清洗方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429027A (en) 1981-05-21 1984-01-31 E. I. Du Pont De Nemours & Co. Photoimaging process
JPH04301086A (ja) 1991-03-29 1992-10-23 Kenseidou Kagaku Kogyo Kk 細い金属棒表面に微細な溝を有する金属シャフトの製法
US5938826A (en) 1997-05-16 1999-08-17 Markem Corporation Hot melt ink
US5894036A (en) * 1997-06-10 1999-04-13 Tylko; Marek K. Three-dimensional plotter
US6872320B2 (en) * 2001-04-19 2005-03-29 Xerox Corporation Method for printing etch masks using phase-change materials
US6742884B2 (en) 2001-04-19 2004-06-01 Xerox Corporation Apparatus for printing etch masks using phase-change materials
US6861203B2 (en) 2001-12-13 2005-03-01 Creo Inc. Non-permanent inkjetted flexographic mask
JP2003283111A (ja) 2002-03-25 2003-10-03 Sumitomo Bakelite Co Ltd プリント配線板の洗浄方法
US6972261B2 (en) 2002-06-27 2005-12-06 Xerox Corporation Method for fabricating fine features by jet-printing and surface treatment
US6890050B2 (en) 2002-08-20 2005-05-10 Palo Alto Research Center Incorporated Method for the printing of homogeneous electronic material with a multi-ejector print head
US7559619B2 (en) 2002-08-20 2009-07-14 Palo Alto Research Center Incorporated Digital lithography using real time quality control
TW591782B (en) * 2003-06-19 2004-06-11 Advanced Semiconductor Eng Formation method for conductive bump
US7309563B2 (en) 2003-12-19 2007-12-18 Palo Alto Research Center Incorporated Patterning using wax printing and lift off
JP4875834B2 (ja) * 2003-12-24 2012-02-15 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． マスク
US7129181B2 (en) 2004-09-17 2006-10-31 Palo Alto Research Center Incorporated Sub-resolution gaps generated by controlled over-etching
US7384568B2 (en) 2006-03-31 2008-06-10 Palo Alto Research Center Incorporated Method of forming a darkfield etch mask
US7696096B2 (en) 2006-10-10 2010-04-13 Palo Alto Research Center Incorporated Self-aligned masks using multi-temperature phase-change materials
US7524015B2 (en) 2006-12-20 2009-04-28 Palo Alto Research Center Incorporated Method of printing smooth micro-scale features
US8079656B2 (en) 2006-12-22 2011-12-20 Palo Alto Research Center Incorporated Method for decimation of images
US7835583B2 (en) 2006-12-22 2010-11-16 Palo Alto Research Center Incorporated Method of separating vertical and horizontal components of a rasterized image
US7926900B2 (en) 2006-12-22 2011-04-19 Palo Alto Research Center Incorporated Method of printing with high spot placement accuracy

Also Published As

Publication number Publication date
JP5128337B2 (ja) 2013-01-23
EP1975699A2 (de) 2008-10-01
US8968985B2 (en) 2015-03-03
EP1975699A3 (de) 2009-01-21
EP1975699B1 (de) 2016-08-17
US20080241712A1 (en) 2008-10-02
MY152881A (en) 2014-11-28
JP2008257234A (ja) 2008-10-23
SG10201508031QA (en) 2015-10-29
CN101276143B (zh) 2013-05-22
CN101276143A (zh) 2008-10-01

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