SG45420A1 - Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device - Google Patents
Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor deviceInfo
- Publication number
- SG45420A1 SG45420A1 SG1996006901A SG1996006901A SG45420A1 SG 45420 A1 SG45420 A1 SG 45420A1 SG 1996006901 A SG1996006901 A SG 1996006901A SG 1996006901 A SG1996006901 A SG 1996006901A SG 45420 A1 SG45420 A1 SG 45420A1
- Authority
- SG
- Singapore
- Prior art keywords
- aluminum hydride
- alkyl aluminum
- deposited film
- semiconductor device
- deposition rate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
- H10P14/42—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials using a gas or vapour
- H10P14/43—Chemical deposition, e.g. chemical vapour deposition [CVD]
- H10P14/432—Chemical deposition, e.g. chemical vapour deposition [CVD] using selective deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/031—Manufacture or treatment of conductive parts of the interconnections
- H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
- H10W20/057—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches by selectively depositing, e.g. by using selective CVD or plating
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25002389 | 1989-09-26 | ||
| JP25002289 | 1989-09-26 | ||
| JP2006560A JP2721021B2 (ja) | 1989-09-26 | 1990-01-16 | 堆積膜形成法 |
| JP2006559A JP2721020B2 (ja) | 1989-09-26 | 1990-01-16 | 堆積膜形成法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG45420A1 true SG45420A1 (en) | 1998-01-16 |
Family
ID=27454510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG1996006901A SG45420A1 (en) | 1989-09-26 | 1990-09-25 | Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5316972A (pt) |
| EP (1) | EP0420597B1 (pt) |
| KR (1) | KR940007444B1 (pt) |
| AT (1) | ATE137357T1 (pt) |
| DE (1) | DE69026669T2 (pt) |
| MY (1) | MY136962A (pt) |
| PT (1) | PT95431B (pt) |
| SG (1) | SG45420A1 (pt) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69125210T2 (de) * | 1990-05-31 | 1997-08-07 | Canon Kk | Verfahren zur Herstellung einer Halbleitervorrichtung mit einer Verdrahtungsstruktur hoher Dichte |
| JPH04346231A (ja) * | 1991-05-23 | 1992-12-02 | Canon Inc | 半導体装置の製造方法 |
| EP0572212A3 (en) * | 1992-05-29 | 1994-05-11 | Sgs Thomson Microelectronics | Method to form silicon doped cvd aluminium |
| EP0608628A3 (en) * | 1992-12-25 | 1995-01-18 | Kawasaki Steel Co | Method for manufacturing a semiconductor device with a multilayer connection structure. |
| US6159854A (en) * | 1994-08-22 | 2000-12-12 | Fujitsu Limited | Process of growing conductive layer from gas phase |
| US6077781A (en) | 1995-11-21 | 2000-06-20 | Applied Materials, Inc. | Single step process for blanket-selective CVD aluminum deposition |
| US5877087A (en) | 1995-11-21 | 1999-03-02 | Applied Materials, Inc. | Low temperature integrated metallization process and apparatus |
| US6726776B1 (en) | 1995-11-21 | 2004-04-27 | Applied Materials, Inc. | Low temperature integrated metallization process and apparatus |
| US6309971B1 (en) | 1996-08-01 | 2001-10-30 | Cypress Semiconductor Corporation | Hot metallization process |
| US6025269A (en) * | 1996-10-15 | 2000-02-15 | Micron Technology, Inc. | Method for depositioning a substantially void-free aluminum film over a refractory metal nitride layer |
| US6156645A (en) * | 1996-10-25 | 2000-12-05 | Cypress Semiconductor Corporation | Method of forming a metal layer on a substrate, including formation of wetting layer at a high temperature |
| US6187673B1 (en) * | 1998-09-03 | 2001-02-13 | Micron Technology, Inc. | Small grain size, conformal aluminum interconnects and method for their formation |
| US6245655B1 (en) * | 1999-04-01 | 2001-06-12 | Cvc Products, Inc. | Method for planarized deposition of a material |
| US6207558B1 (en) | 1999-10-21 | 2001-03-27 | Applied Materials, Inc. | Barrier applications for aluminum planarization |
| US11261533B2 (en) * | 2017-02-10 | 2022-03-01 | Applied Materials, Inc. | Aluminum plating at low temperature with high efficiency |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4497683A (en) * | 1982-05-03 | 1985-02-05 | At&T Bell Laboratories | Process for producing dielectrically isolated silicon devices |
| JPS6211227A (ja) * | 1985-07-09 | 1987-01-20 | Fujitsu Ltd | 半導体装置の製造方法 |
| US4824802A (en) * | 1986-02-28 | 1989-04-25 | General Electric Company | Method of filling interlevel dielectric via or contact holes in multilevel VLSI metallization structures |
| JPS62216224A (ja) * | 1986-03-17 | 1987-09-22 | Fujitsu Ltd | タングステンの選択成長方法 |
| JP2559030B2 (ja) * | 1986-07-25 | 1996-11-27 | 日本電信電話株式会社 | 金属薄膜の製造方法 |
| JP2534848B2 (ja) * | 1986-09-08 | 1996-09-18 | 富士通株式会社 | 高融点金属の選択成長法 |
| US4960732A (en) * | 1987-02-19 | 1990-10-02 | Advanced Micro Devices, Inc. | Contact plug and interconnect employing a barrier lining and a backfilled conductor material |
| US4902645A (en) * | 1987-08-24 | 1990-02-20 | Fujitsu Limited | Method of selectively forming a silicon-containing metal layer |
| US4786615A (en) * | 1987-08-31 | 1988-11-22 | Motorola Inc. | Method for improved surface planarity in selective epitaxial silicon |
| US4963511A (en) * | 1987-11-30 | 1990-10-16 | Texas Instruments Incorporated | Method of reducing tungsten selectivity to a contact sidewall |
| JPH01252776A (ja) * | 1988-03-31 | 1989-10-09 | Sony Corp | 気相成長アルミニウム膜形成方法 |
| JPH01276624A (ja) * | 1988-04-28 | 1989-11-07 | Agency Of Ind Science & Technol | 半導体装置の製造方法 |
| US4898841A (en) * | 1988-06-16 | 1990-02-06 | Northern Telecom Limited | Method of filling contact holes for semiconductor devices and contact structures made by that method |
| JPH0212913A (ja) * | 1988-06-30 | 1990-01-17 | Nippon Telegr & Teleph Corp <Ntt> | 金属または半導体の電極・配線形成方法 |
| JP2617529B2 (ja) * | 1988-08-24 | 1997-06-04 | 日本電信電話株式会社 | 金属膜の形成方法 |
| JP2570839B2 (ja) * | 1988-12-22 | 1997-01-16 | 日本電気株式会社 | Ａ▲ｌ▼ーＣｕ合金薄膜形成方法 |
| JPH02185026A (ja) * | 1989-01-11 | 1990-07-19 | Nec Corp | Ａｌ薄膜の選択的形成方法 |
| JP2578193B2 (ja) * | 1989-02-01 | 1997-02-05 | 沖電気工業株式会社 | 半導体素子の製造方法 |
| US4920403A (en) * | 1989-04-17 | 1990-04-24 | Hughes Aircraft Company | Selective tungsten interconnection for yield enhancement |
| DE69130595T2 (de) * | 1990-07-06 | 1999-05-27 | Tsubouchi, Kazuo, Sendai, Miyagi | Verfahren zur Herstellung einer Metallschicht |
-
1990
- 1990-09-25 AT AT90310508T patent/ATE137357T1/de not_active IP Right Cessation
- 1990-09-25 EP EP90310508A patent/EP0420597B1/en not_active Expired - Lifetime
- 1990-09-25 DE DE69026669T patent/DE69026669T2/de not_active Expired - Fee Related
- 1990-09-25 SG SG1996006901A patent/SG45420A1/en unknown
- 1990-09-26 KR KR1019900015302A patent/KR940007444B1/ko not_active Expired - Lifetime
- 1990-09-26 MY MYPI90001657A patent/MY136962A/en unknown
- 1990-09-26 PT PT95431A patent/PT95431B/pt not_active IP Right Cessation
-
1992
- 1992-06-17 US US07/899,940 patent/US5316972A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR910007078A (ko) | 1991-04-30 |
| EP0420597A2 (en) | 1991-04-03 |
| KR940007444B1 (ko) | 1994-08-18 |
| PT95431A (pt) | 1991-05-22 |
| ATE137357T1 (de) | 1996-05-15 |
| EP0420597A3 (en) | 1991-08-21 |
| DE69026669D1 (de) | 1996-05-30 |
| PT95431B (pt) | 1997-07-31 |
| US5316972A (en) | 1994-05-31 |
| EP0420597B1 (en) | 1996-04-24 |
| MY136962A (en) | 2008-12-31 |
| DE69026669T2 (de) | 1996-10-17 |
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