SG47036A1 - Process for the manufacture of a micromachines device to contain or convey a fluid - Google Patents

Process for the manufacture of a micromachines device to contain or convey a fluid

Info

Publication number
SG47036A1
SG47036A1 SG1996003690A SG1996003690A SG47036A1 SG 47036 A1 SG47036 A1 SG 47036A1 SG 1996003690 A SG1996003690 A SG 1996003690A SG 1996003690 A SG1996003690 A SG 1996003690A SG 47036 A1 SG47036 A1 SG 47036A1
Authority
SG
Singapore
Prior art keywords
fluid
piece
convey
contain
closing plates
Prior art date
Application number
SG1996003690A
Other languages
English (en)
Inventor
De Nicolas Frans Rooij
Sylvain Jeannert
Gass Volker
Van Der Bart Schoot
Original Assignee
Univ De Neufchatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ De Neufchatel filed Critical Univ De Neufchatel
Publication of SG47036A1 publication Critical patent/SG47036A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • External Artificial Organs (AREA)
  • Weting (AREA)
  • Lubricants (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
SG1996003690A 1993-05-24 1994-05-13 Process for the manufacture of a micromachines device to contain or convey a fluid SG47036A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Publications (1)

Publication Number Publication Date
SG47036A1 true SG47036A1 (en) 1998-03-20

Family

ID=9447460

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996003690A SG47036A1 (en) 1993-05-24 1994-05-13 Process for the manufacture of a micromachines device to contain or convey a fluid

Country Status (9)

Country Link
US (1) US5462839A (de)
EP (1) EP0641934B1 (de)
JP (1) JP3651809B2 (de)
AT (1) ATE146853T1 (de)
DE (1) DE69401250T2 (de)
DK (1) DK0641934T3 (de)
ES (1) ES2099991T3 (de)
FR (1) FR2705693B1 (de)
SG (1) SG47036A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281560B1 (en) 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5879632A (en) * 1996-04-09 1999-03-09 Sarnoff Corporation Apportioning system
US20050214827A1 (en) * 1996-07-08 2005-09-29 Burstein Technologies, Inc. Assay device and method
WO1998001533A1 (en) 1996-07-08 1998-01-15 Burstein Laboratories, Inc. Cleavable signal element device and method
US6342349B1 (en) 1996-07-08 2002-01-29 Burstein Technologies, Inc. Optical disk-based assay devices and methods
US6331275B1 (en) 1996-07-08 2001-12-18 Burstein Technologies, Inc. Spatially addressable, cleavable reflective signal elements, assay device and method
DE19705910C1 (de) * 1997-02-15 1998-06-18 Inst Physikalische Hochtech Ev Mikrokammerarray mit hoher Kammerdichte
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19719861A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DK0923957T3 (da) 1997-11-19 2002-02-18 Microflow Eng Sa Dyseemne og væskedråbesprøjteindretning til en inhalator egnet til respirationsterapi
EP1097378A2 (de) * 1998-07-21 2001-05-09 Burstein Laboratories Inc. Optische platten-testvorrichtung und verfahren
ES2149748T3 (es) 1998-12-01 2007-06-16 Microflow Engineering Sa Inhalador con nebulizador de ondas ultrasonicas que presenta unas aberturas de boquilla superpuestas sobre las crestas de un patron de onda estacionaria.
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
US6827866B1 (en) * 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
WO2002044695A1 (en) * 2000-11-16 2002-06-06 Burstein Technologies, Inc. Methods and apparatus for detecting and quantifying lymphocytes with optical biodiscs
AU2002227181A1 (en) * 2000-11-16 2002-05-27 Burstein Technologies, Inc. Optical biodiscs with reflective layers
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
EP1236517A1 (de) * 2001-02-23 2002-09-04 Microflow Engineering SA Verfahren zur Herstellung eines Tröpfchen-Verneblers und ein solcher Vernebler
US7141416B2 (en) * 2001-07-12 2006-11-28 Burstein Technologies, Inc. Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith
US20030143637A1 (en) * 2001-08-31 2003-07-31 Selvan Gowri Pyapali Capture layer assemblies for cellular assays including related optical analysis discs and methods
AU2002335715A1 (en) * 2001-09-07 2003-03-24 Burstein Technologies, Inc. Optical bio-disc systems for nuclear morphology based identification
US20050003459A1 (en) * 2002-01-30 2005-01-06 Krutzik Siegfried Richard Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents
US20050023765A1 (en) * 2002-01-31 2005-02-03 Coombs James Howard Bio-safety features for optical analysis disc and disc system including same
US20040241381A1 (en) * 2002-01-31 2004-12-02 Chen Yihfar Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs
JP2007500351A (ja) * 2003-07-25 2007-01-11 長岡実業株式会社 バイオディスクを有するサンプル調製用流体回路及びそれに関連した方法
US7538473B2 (en) * 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
US7723899B2 (en) 2004-02-03 2010-05-25 S.C. Johnson & Son, Inc. Active material and light emitting device
EP1792662A1 (de) 2005-11-30 2007-06-06 Microflow Engineering SA Tropferspendervorrichtung
TWI580878B (zh) * 2016-07-19 2017-05-01 科際精密股份有限公司 單向閥組件
CN112016805B (zh) * 2020-07-23 2023-06-06 上海工程技术大学 一种磁流变液性能评价方法及系统
WO2025242139A1 (zh) * 2024-05-22 2025-11-27 苏州原位芯片科技有限责任公司 一种mems微阀及微泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
WO1990015929A1 (fr) * 1989-06-14 1990-12-27 Westonbridge International Limited Micropompe perfectionnee
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.

Also Published As

Publication number Publication date
EP0641934B1 (de) 1996-12-27
US5462839A (en) 1995-10-31
JP3651809B2 (ja) 2005-05-25
FR2705693A1 (fr) 1994-12-02
JPH0719170A (ja) 1995-01-20
ATE146853T1 (de) 1997-01-15
DK0641934T3 (da) 1997-10-13
FR2705693B1 (fr) 1995-07-28
EP0641934A1 (de) 1995-03-08
HK1006739A1 (en) 1999-03-12
DE69401250T2 (de) 1997-07-10
DE69401250D1 (de) 1997-02-06
ES2099991T3 (es) 1997-06-01

Similar Documents

Publication Publication Date Title
SG47036A1 (en) Process for the manufacture of a micromachines device to contain or convey a fluid
TR200002945T2 (tr) Su ile bertaraf edilebilen bebek bezi ve metod
ES8405624A1 (es) Procedimiento para proporcionar una capa superficial biocompatible a articulos dotados de al menos una superficie de vidrio, silicio, aluminio, o caucho silicona.
EP0659858A3 (de) Kupferbasierte Lösung zum Polieren von Metall und Verfahren zur Herstellung einer Halbleiter-Anordnung.
DE3888261D1 (de) Beschichteter Verbundkörper aus hochschmelzenden Metallen.
ES2032855T3 (es) Estructuras ceramicas modificadas y procedimientos para hacerlas.
DE3585644D1 (de) Verpackung fuer kugel- oder tablettenfoermigen giftigen ausraeucherungsstoff und verfahren zu dessen herstellung.
ES2034163T3 (es) Metodo y aparato para adelgazar la pared de un cuerpo cilindrico de una pieza, y un cuerpo formado de este modo.
DE69018695D1 (de) Einleitung von Reaktionsgasen bei der Herstellung von integrierten Schaltungen.
DE3873206D1 (de) Fuellschichtbauteil mit einem gesinterten, monolithischen keramikkoerper und verfahren zu dessen herstellung.
ES2175770T3 (es) Utilizacion de un agente que comprende un fosfato, carbonato y silicato, para la eliminacion de metales pesados contenidos en un efluente acuoso.
GB8520932D0 (en) Molding of integral socket connection
FR2474909B1 (fr) Procede et outil pour la fabrication d'un corps creux massif metallique comportant des evidements interieurs en contre-depouille
ES523285A1 (es) Procedimiento para preparar un cuerpo integral de pulvimetal con partes de diferentes densidades.
ES2183489T3 (es) Perfil provisto de al menos un labio de material deformable elasticamente, destinado a hacer contacto con un cristal movil.
BR9405776A (pt) Processo de fabricação de artigos de liga zn-al-cu por fundição centrífuga ou fundição sob pressão
DE68913985D1 (de) Dichter, dielektrischer metalloxidformkörper und -pulver sowie verfahren zu deren herstellung.
JPS57185979A (en) Etching method utilizing etching solution
KR940016469A (ko) 반도체 제조를 위한 용융 석영 확산 튜브
JPS56169352A (en) Manufacture of glass molded semiconductor device
SE9000307D0 (sv) Taetningsanordning vid kaernreaktor
Davydov The Anodic Activation Mechanism for Passivated Metals
JPS6445130A (en) Underwater oxidation of semiconductor wafer
Nisha et al. Heavy metals and health
JPS6475016A (en) Manufacture of filter film