SG47433A1 - Dust-proof film - Google Patents

Dust-proof film

Info

Publication number
SG47433A1
SG47433A1 SG1996001337A SG1996001337A SG47433A1 SG 47433 A1 SG47433 A1 SG 47433A1 SG 1996001337 A SG1996001337 A SG 1996001337A SG 1996001337 A SG1996001337 A SG 1996001337A SG 47433 A1 SG47433 A1 SG 47433A1
Authority
SG
Singapore
Prior art keywords
dust
proof film
line
wavelength
respect
Prior art date
Application number
SG1996001337A
Other languages
English (en)
Inventor
Muneyuki Matsumoto
Hiroaki Nakagawa
Original Assignee
Mitsui Petrochemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP26988887A external-priority patent/JPH0798869B2/ja
Priority claimed from JP62290882A external-priority patent/JPH01133052A/ja
Application filed by Mitsui Petrochemical Ind filed Critical Mitsui Petrochemical Ind
Publication of SG47433A1 publication Critical patent/SG47433A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Fluid-Damping Devices (AREA)
SG1996001337A 1987-10-26 1988-10-24 Dust-proof film SG47433A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26988887A JPH0798869B2 (ja) 1987-10-26 1987-10-26 フォトマスク保護用防塵膜
JP62290882A JPH01133052A (ja) 1987-11-18 1987-11-18 防塵膜

Publications (1)

Publication Number Publication Date
SG47433A1 true SG47433A1 (en) 1998-04-17

Family

ID=26548963

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001337A SG47433A1 (en) 1987-10-26 1988-10-24 Dust-proof film

Country Status (9)

Country Link
US (1) US5028702A (fr)
EP (1) EP0314418B1 (fr)
KR (1) KR910009610B1 (fr)
AT (1) ATE171550T1 (fr)
CA (1) CA1330860C (fr)
DE (1) DE3856253T2 (fr)
ES (1) ES2124686T3 (fr)
MY (1) MY103629A (fr)
SG (1) SG47433A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339197A (en) * 1989-03-31 1994-08-16 Yen Yung Tsai Optical pellicle with controlled transmission peaking
DE69327286T2 (de) * 1992-09-24 2000-05-11 Daicel Chemical Industries, Ltd. Verfahren zur Herstellung eines Fettsäureesters von Cellulose
US5741576A (en) * 1995-09-06 1998-04-21 Inko Industrial Corporation Optical pellicle with controlled transmission peaks and anti-reflective coatings

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1119873A (fr) * 1976-10-22 1982-03-16 Scott Paper Company Substance diazoique contenant un precurseur d'un agent de couplage azoique, un producteur d'un acide photosensible et un ester carboxylique
GB2165545B (en) * 1984-10-16 1988-03-30 Du Pont Pellicle structure for transmission of mid ultraviolet light
JPS6235359A (ja) * 1985-08-09 1987-02-16 Daicel Chem Ind Ltd コ−テツド薄膜の製造法
DE3750353T2 (de) * 1986-06-12 1994-12-08 Mitsui Petrochemical Ind Verfahren zur Herstellung von Celluloseesterfolien.

Also Published As

Publication number Publication date
HK1003950A1 (en) 1998-11-13
EP0314418A2 (fr) 1989-05-03
CA1330860C (fr) 1994-07-26
KR910009610B1 (ko) 1991-11-23
ES2124686T3 (es) 1999-02-16
DE3856253T2 (de) 1999-04-08
EP0314418B1 (fr) 1998-09-23
US5028702A (en) 1991-07-02
EP0314418A3 (fr) 1991-01-30
ATE171550T1 (de) 1998-10-15
KR890007395A (ko) 1989-06-19
DE3856253D1 (de) 1998-10-29
MY103629A (en) 1993-08-28

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