SG75893A1 - Clean box - Google Patents
Clean boxInfo
- Publication number
- SG75893A1 SG75893A1 SG1998004568A SG1998004568A SG75893A1 SG 75893 A1 SG75893 A1 SG 75893A1 SG 1998004568 A SG1998004568 A SG 1998004568A SG 1998004568 A SG1998004568 A SG 1998004568A SG 75893 A1 SG75893 A1 SG 75893A1
- Authority
- SG
- Singapore
- Prior art keywords
- clean box
- clean
- box
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
- H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
- H10P72/1928—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier characterised by the presence of antistatic elements
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9325486A JPH11145272A (ja) | 1997-11-11 | 1997-11-11 | クリーンボックス |
| CA002264226A CA2264226A1 (fr) | 1997-11-11 | 1999-03-03 | Cuve d'epuration complete |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG75893A1 true SG75893A1 (en) | 2000-10-24 |
Family
ID=32070460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG1998004568A SG75893A1 (en) | 1997-11-11 | 1998-11-06 | Clean box |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP0917183A3 (fr) |
| JP (1) | JPH11145272A (fr) |
| CN (1) | CN1217571A (fr) |
| AU (1) | AU9144998A (fr) |
| CA (1) | CA2264226A1 (fr) |
| ID (1) | ID21276A (fr) |
| SG (1) | SG75893A1 (fr) |
| TW (1) | TW396489B (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI334399B (en) * | 2003-11-18 | 2010-12-11 | Net Plastic Inc | Hermetically sealed container for large-sized precision sheet (semi-)product |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03228349A (ja) * | 1990-02-02 | 1991-10-09 | Nec Corp | 半導体ウェハーケース |
| US5320225A (en) * | 1993-04-23 | 1994-06-14 | Hrc Products | Apparatus and method for securely carrying a substrate |
| JPH0758192A (ja) * | 1993-08-12 | 1995-03-03 | Nikon Corp | 基板収納ケース |
| EP0692817B1 (fr) * | 1994-07-15 | 1997-09-24 | Fluoroware, Inc. | Support pour galette semi-conductrice |
| JPH08288377A (ja) * | 1995-04-18 | 1996-11-01 | Sony Corp | ウェーハ収納体 |
-
1997
- 1997-11-11 JP JP9325486A patent/JPH11145272A/ja active Pending
-
1998
- 1998-11-06 TW TW087118550A patent/TW396489B/zh not_active IP Right Cessation
- 1998-11-06 SG SG1998004568A patent/SG75893A1/en unknown
- 1998-11-09 ID IDP981465A patent/ID21276A/id unknown
- 1998-11-10 AU AU91449/98A patent/AU9144998A/en not_active Abandoned
- 1998-11-10 EP EP98203782A patent/EP0917183A3/fr not_active Withdrawn
- 1998-11-11 CN CN98123311.2A patent/CN1217571A/zh active Pending
-
1999
- 1999-03-03 CA CA002264226A patent/CA2264226A1/fr not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CA2264226A1 (fr) | 2000-09-03 |
| ID21276A (id) | 1999-05-12 |
| EP0917183A3 (fr) | 2002-04-03 |
| TW396489B (en) | 2000-07-01 |
| AU9144998A (en) | 1999-06-03 |
| JPH11145272A (ja) | 1999-05-28 |
| EP0917183A2 (fr) | 1999-05-19 |
| CN1217571A (zh) | 1999-05-26 |
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