SG79979A1 - Semiconductor integrated circuit testing apparatus - Google Patents

Semiconductor integrated circuit testing apparatus

Info

Publication number
SG79979A1
SG79979A1 SG9801376A SG1998001376A SG79979A1 SG 79979 A1 SG79979 A1 SG 79979A1 SG 9801376 A SG9801376 A SG 9801376A SG 1998001376 A SG1998001376 A SG 1998001376A SG 79979 A1 SG79979 A1 SG 79979A1
Authority
SG
Singapore
Prior art keywords
integrated circuit
semiconductor integrated
testing apparatus
circuit testing
semiconductor
Prior art date
Application number
SG9801376A
Other languages
English (en)
Inventor
Hayama Hisao
Goto Toshio
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of SG79979A1 publication Critical patent/SG79979A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3177—Testing of logic operation, e.g. by logic analysers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/16—Trays for chips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Supply And Installment Of Electrical Components (AREA)
SG9801376A 1997-06-13 1998-06-09 Semiconductor integrated circuit testing apparatus SG79979A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9156925A JPH112657A (ja) 1997-06-13 1997-06-13 複合ｉｃ試験装置

Publications (1)

Publication Number Publication Date
SG79979A1 true SG79979A1 (en) 2001-04-17

Family

ID=15638376

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9801376A SG79979A1 (en) 1997-06-13 1998-06-09 Semiconductor integrated circuit testing apparatus

Country Status (6)

Country Link
JP (1) JPH112657A (ja)
KR (1) KR19990006956A (ja)
CN (1) CN1218183A (ja)
DE (1) DE19826314A1 (ja)
SG (1) SG79979A1 (ja)
TW (1) TW376456B (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW490564B (en) * 1999-02-01 2002-06-11 Mirae Corp A carrier handling apparatus for module IC handler, and method thereof
DE19916346C2 (de) * 1999-04-12 2003-12-18 Helmuth Heigl Vorrichtung zum Zuführen elektronischer Bauteile
DE19921246C2 (de) * 1999-05-07 2003-06-12 Infineon Technologies Ag Anlage zur Fertigung von Halbleiterprodukten
DE19922936B4 (de) * 1999-05-19 2004-04-29 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
DE10060438B4 (de) 2000-12-05 2004-09-09 Infineon Technologies Ag Testanordnung zum parallelen Test einer Mehrzahl von integrierten Schaltkreisen und Testverfahren
AU2003242260A1 (en) * 2003-06-06 2005-01-04 Advantest Corporation Transport device, electronic component handling device, and transporting method for electronic component handling device
CN1328590C (zh) * 2003-07-01 2007-07-25 台北歆科科技有限公司 万用型半导体检测机的测试机构
JP4694983B2 (ja) * 2006-02-10 2011-06-08 ヤマハ発動機株式会社 表面実装機
JP5243037B2 (ja) * 2006-10-27 2013-07-24 株式会社アドバンテスト 電子部品試験装置
CN101290330B (zh) * 2007-04-16 2010-06-23 普诚科技股份有限公司 电路测试装置
CN101452010B (zh) * 2007-11-30 2011-12-14 上海华虹Nec电子有限公司 用于芯片测试的探针卡的测试方法
CN102636739B (zh) * 2012-03-20 2014-08-13 杭州长川科技有限公司 集成电路测试多工位定位装置
CN103616611B (zh) * 2013-11-07 2016-08-17 珠海市运泰利自动化设备有限公司 一种循环测试设备
CN109085444B (zh) * 2018-08-08 2020-11-03 广东电网有限责任公司广州供电局 转接箱及其避雷器检测装置
CN110723523B (zh) * 2019-10-23 2021-10-22 珠海格力智能装备有限公司 收板机的控制方法、装置及系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410464A2 (en) * 1989-07-27 1991-01-30 Nec Corporation Semiconductor memory device having diagnostic circuit for memory cells
EP0631149A1 (en) * 1993-06-11 1994-12-28 International Business Machines Corporation Method and apparatus for testing of integrated circuit chips
JPH10340937A (ja) * 1997-06-10 1998-12-22 Advantest Corp 複合ｉｃテストシステム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410464A2 (en) * 1989-07-27 1991-01-30 Nec Corporation Semiconductor memory device having diagnostic circuit for memory cells
EP0631149A1 (en) * 1993-06-11 1994-12-28 International Business Machines Corporation Method and apparatus for testing of integrated circuit chips
JPH10340937A (ja) * 1997-06-10 1998-12-22 Advantest Corp 複合ｉｃテストシステム

Also Published As

Publication number Publication date
JPH112657A (ja) 1999-01-06
TW376456B (en) 1999-12-11
DE19826314A1 (de) 1998-12-24
KR19990006956A (ko) 1999-01-25
CN1218183A (zh) 1999-06-02

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