SG86285A1 - Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings - Google Patents

Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings

Info

Publication number
SG86285A1
SG86285A1 SG9600301A SG1996000301A SG86285A1 SG 86285 A1 SG86285 A1 SG 86285A1 SG 9600301 A SG9600301 A SG 9600301A SG 1996000301 A SG1996000301 A SG 1996000301A SG 86285 A1 SG86285 A1 SG 86285A1
Authority
SG
Singapore
Prior art keywords
interferometric measurement
fringe order
small spacings
determine fringe
calibrate
Prior art date
Application number
SG9600301A
Other languages
English (en)
Inventor
Christopher Lacey
Edward W Ross
Original Assignee
Phase Metrics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phase Metrics filed Critical Phase Metrics
Publication of SG86285A1 publication Critical patent/SG86285A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G11B21/12—Raising and lowering; Back-spacing or forward-spacing along track; Returning to starting position otherwise than during transducing operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/20—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
    • G11B21/21—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/10—Indicating arrangements; Warning arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
SG9600301A 1993-12-21 1994-12-14 Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings SG86285A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/171,913 US5457534A (en) 1991-10-23 1993-12-21 Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
PCT/US1994/014676 WO1995017646A1 (en) 1993-12-21 1994-12-14 Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings

Publications (1)

Publication Number Publication Date
SG86285A1 true SG86285A1 (en) 2002-02-19

Family

ID=22625616

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9600301A SG86285A1 (en) 1993-12-21 1994-12-14 Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings

Country Status (7)

Country Link
US (1) US5457534A (ja)
EP (1) EP0689665A4 (ja)
JP (1) JPH08507384A (ja)
KR (1) KR960701353A (ja)
AU (1) AU1440995A (ja)
SG (1) SG86285A1 (ja)
WO (1) WO1995017646A1 (ja)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033721A (en) * 1994-10-26 2000-03-07 Revise, Inc. Image-based three-axis positioner for laser direct write microchemical reaction
US5786677A (en) * 1995-12-20 1998-07-28 Phase Metrics Stops and a clutch for a loader that test the flying height of a disk drive head gimbal assembly
US5689337A (en) * 1996-08-15 1997-11-18 Wyko Corporation Coaxial disc-mount for measuring flatness of computer-drive discs by interferometry
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5805284A (en) * 1997-02-07 1998-09-08 Phase Metrics, Inc. Optically verified glide
US6688743B1 (en) 1998-02-17 2004-02-10 Seagate Technology Method and apparatus to determine fly height of a recording head
US6369900B1 (en) 1998-04-16 2002-04-09 Seagate Technology Llc Glide head with features on its air bearing surface for improved fly height measurement
US6184993B1 (en) 1999-02-09 2001-02-06 Phase Metrics, Inc. Apparatus for measuring a small gap using a Savart plate
US6184992B1 (en) 1999-02-09 2001-02-06 Phase Metrics, Inc. Apparatus and method for measuring flying height and a real index of refraction
DE19924755A1 (de) * 1999-05-29 2000-11-30 Bosch Gmbh Robert Abstandserfassungsvorrichtung
US6392756B1 (en) 1999-06-18 2002-05-21 N&K Technology, Inc. Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
US6091485A (en) * 1999-12-15 2000-07-18 N & K Technology, Inc. Method and apparatus for optically determining physical parameters of underlayers
US6717764B2 (en) 2000-06-02 2004-04-06 Seagate Technology Llc Method and apparatus for head fly height measurement
RU2235972C2 (ru) * 2000-08-14 2004-09-10 Институт конструкторско-технологической информатики РАН Способ оптического контроля геометрических параметров изделий
RU2202117C1 (ru) * 2002-03-26 2003-04-10 Атнашев Виталий Борисович Способ передачи и приема оптических сигналов и устройство для его осуществления
US7206077B2 (en) 2003-11-20 2007-04-17 International Manufacturing And Engineering Services Co., Ltd. Flying height tester and flying height test method
US7715017B2 (en) * 2004-12-13 2010-05-11 Microphysics Inc Dynamic fringe phase detection for measurement of very small spacing
WO2007040462A1 (en) * 2005-10-04 2007-04-12 Agency For Science, Technology And Research A method and system for obtaining n and k map for measuring fly-height
US7751062B2 (en) 2005-12-12 2010-07-06 Agency For Science, Technology And Research Optical flying height measurement and calibration with dual sliders
US20080123102A1 (en) * 2006-03-15 2008-05-29 Hitachi Maxell, Ltd. Apparatus and method for measuring spacing
US8098381B2 (en) * 2007-10-29 2012-01-17 Seagate Technology Llc Fly height and slider protrusion measurement
US9625331B2 (en) 2015-09-10 2017-04-18 International Business Machines Corporation Surface force apparatus based on a spherical lens
CN114518162B (zh) * 2022-01-24 2023-08-04 中国人民解放军海军工程大学 一种光纤水听器干涉信号强度补偿方法和系统

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
US4627733A (en) * 1981-12-25 1986-12-09 Sumitomo Special Metals Co., Ltd. Flatness measuring apparatus
US4630926A (en) * 1983-12-21 1986-12-23 Hitachi, Ltd. Fine clearance measuring apparatus
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
US4650330A (en) * 1983-05-13 1987-03-17 Citizen Watch Co., Ltd. Surface condition measurement apparatus
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US4931630A (en) * 1989-04-04 1990-06-05 Wyko Corporation Apparatus and method for automatically focusing an interference microscope
US4948251A (en) * 1988-05-16 1990-08-14 Brother Kogyo Kabushiki Kaisha Optical heterodyne measuring apparatus
US5028136A (en) * 1987-01-23 1991-07-02 Iit Research Institute Rugate optical filter systems

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178304A (ja) * 1983-03-30 1984-10-09 Hitachi Ltd 微小間隙測定方法及び装置
JPS59225308A (ja) * 1983-06-06 1984-12-18 Hitachi Ltd 微小間隔測定装置
JPS6144308A (ja) * 1984-08-09 1986-03-04 Hitachi Maxell Ltd 磁気デイスク用測定ヘツドおよび磁気デイスクの特性測定方法
JPS6144307A (ja) * 1984-08-09 1986-03-04 Hitachi Maxell Ltd 微少間隙測定方法
JPS63290903A (ja) * 1987-05-25 1988-11-28 Toshiba Corp 間隙測定装置
JP2696366B2 (ja) * 1988-12-08 1998-01-14 日本電信電話株式会社 微小すきま測定装置
US5101111A (en) * 1989-07-13 1992-03-31 Dainippon Screen Mfg. Co., Ltd. Method of measuring thickness of film with a reference sample having a known reflectance
US5218424A (en) * 1991-03-19 1993-06-08 Zygo Corporation Flying height and topography measuring interferometer
FR2685763B1 (fr) * 1991-12-27 1994-03-25 Aime Vareille Procede et dispositif optiques de mesure de distance et leur application au positionnement relatif de pieces.
JP2732167B2 (ja) * 1992-02-21 1998-03-25 日立電子エンジニアリング株式会社 磁気ヘッドの浮上量測定方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
US4627733A (en) * 1981-12-25 1986-12-09 Sumitomo Special Metals Co., Ltd. Flatness measuring apparatus
US4650330A (en) * 1983-05-13 1987-03-17 Citizen Watch Co., Ltd. Surface condition measurement apparatus
US4630926A (en) * 1983-12-21 1986-12-23 Hitachi, Ltd. Fine clearance measuring apparatus
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US5028136A (en) * 1987-01-23 1991-07-02 Iit Research Institute Rugate optical filter systems
US4948251A (en) * 1988-05-16 1990-08-14 Brother Kogyo Kabushiki Kaisha Optical heterodyne measuring apparatus
US4931630A (en) * 1989-04-04 1990-06-05 Wyko Corporation Apparatus and method for automatically focusing an interference microscope

Also Published As

Publication number Publication date
EP0689665A1 (en) 1996-01-03
JPH08507384A (ja) 1996-08-06
AU1440995A (en) 1995-07-10
EP0689665A4 (en) 1998-05-13
US5457534A (en) 1995-10-10
KR960701353A (ko) 1996-02-24
WO1995017646A1 (en) 1995-06-29

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