TW200523751A - Machine control system - Google Patents

Abstract

The invention is related to methods and apparatus that advantageously provide compatibility between two or more different computer systems, such as computers used in a manufacturing environment, e.g., a foundry for semiconductor fabrication. For example, a first computer system with a first operating system, such as OS/2 from IBM Corporation, and a second computer system with a second operating system, such as Windows NT from Microsoft Corporation. In one embodiment, a transfer module permits an application that executes in the IBM OS/2 operating system access to files maintained in a component object model (COM+) format from Microsoft Corporation. A routing module transfers data to and from a module with functions created in the component object model (COM+) format. One embodiment of the routing module routes data according to one of four selectable processing paths termed TAPCOM, COMTAP, TAPCOMTAP, and COMTAPCOM.

Description

200523751 08 1 63twf.doc / 006 IX. Description of the invention: This application is based on US Patent Regulation 35. On May 6, 2006, the U.S. Patent Office applied for: ^ = claiming priority 60 / partial, No. 323, the The patent application is fully incorporated in this specification. Contents of the road revealed in the clear case [Technical field to which the invention belongs] The present invention relates to-a host software, and a method that can improve the function processing efficiency of a process machine-a kind of software related to a [pre-different technology]- The work host can be used for example in the factory. Because each work host may have a variety of different configurations, however, and the programming language, and the general software user or even software; the system requires personnel to be familiar with unfamiliar machines or Operation = soft = soft causes waste of time and cost. Domain development, in addition, incompatible host systems are often available in business environments. For example, a host system that may be the same in a processing environment and an older host system, such as the new one, can improve the compatibility of different host systems. [Requirement] [Summary of the Invention] The implementation of the present invention proposes a new technical program update. In addition, the embodiments of the present invention can further improve the compatibility of different host systems, so that the devices that originally look like one system can use other host systems efficiently. For example, 2 2005252wl.doc / 006 uses the first host computer of one of the first operating system (such as the company's OS / 2⑧), and one of the second operating system (such as Microsoft's Windows® NT⑧). Two hosts. An embodiment of the present invention has a conversion module that allows an application program running under the ⑧OS / 2® operating system to access a slot in the format of Component Object Model (COM +) of Microsoft Corporation. . An embodiment of the present invention includes a routing module, which can transfer and transfer data from a module with a function in COM + format. For example, this routing module uses four Selectable Processing Routes called TAPCOM, COMTAP, TAPCOMTAP, and COMTAPCOM. Among them, TAPCOM routing corresponds to the data flow from the TAP module to the COM + module, and coMTAp private sequence routing corresponds to the data flow from the COM + module to the TAP module. In addition, the TAPCOMTAP program routing corresponds to the data flow from the TAp module to the COM + module and back to the direction of the TAp module, while the COMTAPCOM program routing corresponds to the COM + module to the TAp module, and Back to the data flow of the C0M + module. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, the following exemplifies a preferred embodiment and describes it in detail with the accompanying drawings as follows: τ [Embodiment], mobilization technology is generally applied For example, manufacturing environments such as industrial waste. Among them, the manufacturing environment in which the manufacturing process should be carried out. The automation of the process steps of the 200552375id is more common. For example, the foundry of semiconductor manufacturing is an automated manufacturing environment. In addition, in addition to the semiconductor manufacturing described in the article, and the IBM® OS / 2 文 and Microsoft 文 Windows® operating systems, the technology of the present invention is based on its principles and advantages, and can be applied to other types such as automobile manufacturing, food processing, and pharmaceutical manufacturing Automated manufacturing environment, and other operating systems. FIG. 1 illustrates an example of a host system in a manufacturing environment. Semiconductor manufacturing foundries and other more complex manufacturing environments often have more interacting host systems. For example, a Computer Integrated Manufacturing (CIM) system 100 in a foundry usually includes different systems, such as a Manufacturing Execution System (Manufacturing Execution System).

Execution System (MES) 102, Enterprise Resource Planning Management (Enterprise

Resource Planning (ERP) system 104. Scheduling software

Software), Engineering System, YieldMonitoring System, etc. The Manufacturing Execution System (MES) 102 controls the highest-level product manufacturing process, and the Manufacturing Execution System 102 can be, for example, the SiView standard version of IBM Corporation currently used in the industry. Generally speaking, a foundry does not have many manufacturing execution systems. For example, a foundry operates with only one manufacturing execution system. In one embodiment, the manufacturing system 102 is equivalent to a central host system that controls the manufacturing system of the entire foundry. Of course, within a reasonable range, the manufacturing execution system 102 is decentralized, that is, one manufacturing plant is controlled by multiple manufacturing execution systems ι02. 200523751 08163twf.doc / 006 The manufacturing execution system 102 may be coupled to one or more Machine Control System (MCS), and one machine control system 110 may be coupled to one or more manufacturing devices 112, of which The detailed structure of the machine control system 110 will be described in conjunction with FIG. 2 described later. In addition, the enterprise resource planning management system 104 can integrate business activities such as planning, sales, inventory management, and order tracking. [Machine Control System 110] FIG. 2 illustrates a machine control system 110 according to a preferred embodiment of the present invention. There may be many machine control systems in a manufacturing environment. In this embodiment, the 'machine control system 110 corresponds to a local host system', which communicates with the manufacturing execution system 102 (Communicate) and controls the operation of the corresponding manufacturing device 112. However, since the machine control system 110 may be set to operate under a conventional operating system, such as IBM (R) OS / 2®, a problem may occur in which software developers with less experience may be unfamiliar with the operating system. # x Please refer to Figure 2. The machine control system, system 110 is connected to the system 102,-or multiple manufacturing devices 112,-remote database module (Rem〇; e Database Module) 202, a database display Pei Zhi (such as Zhanca Display Device) 204 and other applicable manufacturing execution systems. Of course, the machine control system 110 and the system shown in FIG. 1 can be compared with the system shown in FIG. 2 or less. Compare the machine shown in Figure 2 It control-system UG includes-Tool Control System (TCS) 210,-%% »Dental and Mouth Nuclear Group (Access 200523751 08 1 63twf.d〇c / 〇 〇6

Module 212, a Transfer Module 214, — COM + Module 216, and a local database module (LocalDatabaseModule) 'Practitioners skilled in the art will know that it can change the product process to produce New components' also improve yield, speed up production, and allow for device variations. Since the embodiment of the present invention includes a machine control system, it is helpful to modify and / or update in a relatively fast and efficient manner. 0 The tool control system 210 is an application program corresponding to the machine control system 11 To communicate with the manufacturing execution system 102 (^ ommumcate). Therefore, the tool control system 21 can allow the manufacturing execution system 102 and the manufacturing device 112 coupled to the machine control system 11 to communicate. In the practical example, the tool control system 210 is based on an operating system other than Microsoft® Windows® ( See operation under "⑧〇s / 2⑧". [Reading module 212] ^ The reading module 212 includes one or more TAP modules 220, of which the ΤΑρ module 220 is equivalent to the tool control system 21 () ^ Interpreter used

Ume chatter) and interpret the source code (Source Code) provided by the manufacturing device 112. In one embodiment, each device 112 corresponds to a TAp module 22o. For example, ^ xin can correspond to the TTcRTAPDLL slot of the IBM company, which is a library = dynamic link library file. This dynamic linking program can be used to pass through the = DLL = iDLL slot to provide functions and / or data to other applications' such as the tool control system 21〇. Therefore, the ΤΑρ module coffee 10 002523? Adoc / 〇〇6 can set, control, and monitor the manufacturing of 112 sets of Zhongan TAP module 22. Department, equivalent to Yan's parent case file. A variety of manufacturing devices 112 can be lightly connected to Tp f and :, the lower part is compatible with the semiconducting τ ^ A 所述 described in the text, and 220, a few examples of the manufacturing device connected to the module 2, send wafers Robot arm, automatic handling or transmission needs __ 二:; == case of exposure deep-correction UV light machine, _ for the required picture 荦 2 tracer machine, doped implantation machine for implanting ions , Using pure oxidizing furnace officer, recording equipment _ equipment and other devices, etc .: milk modification] platform = system is the example of the code through the TAP module, the tap module is equivalent to = by the item The kernel module 212 interprets the modules of the source code. In another. In the example, the TAP module may include compiled code (c code). The design of the TAP module may be more difficult than using com or com +, so its software development efficiency is relatively low. In the conventional system, when the TAP module is changed, the conventional machine control system is in an inoperative state. In this way, not only the software development cost is expensive, but also the entire machine control The system cannot be used for example = code ⑹ing), testing (testing), and debugging (Debugg ^, etc.) actions that need to extend the time period. The embodiment of the present invention makes the code of the TAP module 220 simpler, which helps to simplify the software Development, and can reduce the downtime of the machine control system 11o. The relatively simple 200523751 08 1 63twf.d〇c / 006 code of the TAP module 220 is the reference (COM) module 216 For example, in one embodiment, the original code in the modified TAp module 223 is implemented by adding one or more lines of code with keywords, such as "funCTION". Modify. When reading the module When the criminal reads this keyword in the program stone horse, the conversion module executes instructions or parameters to perform further procedures. In the embodiment of the present invention described above, the conversion module 212 includes a front conversion module The group 222 and a routing module 224 are described in more detail below. When the reading module 212 reads the code and / or parameters in the parameters of the Tip module 220, the designation is performed by the COM + module 216 In a further step, the reading module 212 is connected to the conversion module 214 (via the front conversion module 222 and the routing module 224), and is connected to the COM + module 216. In one embodiment, because it is used to add a key Word and related parameters to the appropriate Tap module 220, and the total time to restart the machine control system 110 is shorter, so it helps to reduce the downtime of the machine control system 110. The use of reading modules An example will be described in detail in the related description of FIG. 3 described below. [Transformation module 214] The conversion module 214 includes functions and / or data, which can be embedded in the source code of the TAP module 220. Function call (Function call) and so on. In a conventional machine control system, a 'white conversion module' can be equivalent to a TTUrtap DLL file. In the embodiment of the present invention, the conversion module 214 includes a front conversion module. Group 222 and routing module 224, both of which will be described in detail below. 200523751 08 1 63 twf.doc / 〇〇6 The following example describes some of the source code that can be written into the TAP module 22〇 Function of type. For example, TAp modules can be used to communicate with the Underlying Operating System. The TAP mode resistor 220 can be further used to communicate with the manufacturing execution system 102 through the tool control system 21 to receive instructions and provide status. The TAp module 220 can be used to control and receive the status of the manufacturing device 112. The τΑρ module 220 can also be used to perform calculation actions. These calculation actions can be coded into the TAP module or the COM + module 216, and can be referenced from the TAP module 220. The TAP mode resistor 220 can also be used by other host systems (such as other manufacturing execution systems 20) to perform calculation [C0M + module 216]. In one embodiment, a software developer can control the system 11 in During operation, the original code is created or modified for the appropriate files in the COM + module, thus helping to reduce the machine downtime of the machine control system. After completing the modification of the original code, the software developer can stop the operation of the machine control system 110 and modify the TAP module to meet the appropriate reference, such as a "FUNCTION" call reference and related parameters (or copy an offline modified original Code file to the TAp module), and restart the machine control system 110 or read the module 212 to load the reconfigured TAP module. In the embodiment of the present invention, the COM + module 216 can process the COM or COM + format code of Microsoft Corporation. The component object model defines a two-dimensional standard for objects and communication between objects. The com + module 216 may include a DLL file, an executable file, and a combination of the two. This standardization action fd〇c / 〇〇6 200523751 63 twf Software developers use a relatively large amount of time to actually write code that is private, but a program that uses less time to write ^, a program that moves data, and two: and Other code, etc. In addition, 'for example c〇m or c〇M: = using two programming tools' tools and / or soft meanings such as including WBa secret, in == 1 host ⑧〇S / 2⑧ host system is not applicable' or COM + format Processing code. Therefore, in ιιτ ^ \ ^ (Native) „^ ^ ^ f, J ^ ^ ^ ^ ^ ^, write # ^ _gift code for operating money) Write down the opportunity to modify or update the code Platform control system operation, the software developer ^ SI fetches the source code executed by module 212. For reading

Si ::: 220 or conversion module-may contain software developer I code based on 丄, so for inexperienced students. It is more difficult and unfamiliar to authorize writing. This month's practical examples help to make soft 5 com ^ ^ or even backup os / 2⑧ operating system. This helps the machine control 14 200523751doc / 006 ί: ====! = New. For example, _module is added to execute. Although these; the corresponding original program can be configured in the machine control system or the f COM + module 216. The modified code is configured in the machine control system.i Q = ^ Ding Fen. For example, the COM + module 216 is an easy-to-fetch part of the machine # system. If, and the code executed by the driver is helpful to modify the control of the machine port, and charging. Additional functions can also be executed in the COM + module 216, and TA 2 = call the command 'to effectively reduce the downtime of the machine control system 11o; In the embodiment, the COM' group 216 also chooses: the system to communicate, to Correct files and links. This action allows the ^ 〇 executive = module and other foundries to share and / or transmit the details of the original 216, which will be described later in Figures 5A and 5ΓΪ module 218 can be used to store data, such as _. The poor material library module 218 in this area can also _ go to the remote database _fan articles Γ f storage 'and can be connected to the database display for inspection. The database display device is similar to the computer screen, printer, drawing machine, speaker and other devices. It's worth-mentioning that the mechanical control system 110 can be easily connected to data input devices, such as keyboards, mice, and mobile drives. [Month'J conversion core group 222 and routing module 224] 200523751 08 1 63twf.doc / 006 In the embodiment described in the present invention, the conversion module 214 includes a front conversion module 222 and a routing module and group 224 . In one embodiment, the front conversion module 222 includes the functions of a conventional conversion module and is a dll file. In addition, the front conversion module 222 further includes a function of retrieving additional functions and / or data by a routing module. This helps the functions that were not presented by the front conversion module 222 to be checked by the front conversion module 222, so that the TAp module can read more functions. In one embodiment, the front conversion module 222 uses the same keywords, such as "FUNCTION" used by the τΑρ module, to read additional functions. The routing module 224 converts the function and / or data input and output in the com + module 216, which stores functions and data. c〇] v ^, and 216 is easy to use under the environment of Microsoft® Windows®. The routing pull group 224 defines a processing route of functions and / or data from the COM + module. In one embodiment, the routing module 224 uses four program routes, which are referred to herein as TAPCOM, COMTAP, TAPCOMTAP, and COMTApcOM. In another embodiment, the routing module, 224, uses less than four program routes, such as one, two,-and so on, program routes selected from the aforementioned groups. In one embodiment, the routing module 224 can also be a DLL file and can be subscribed in the IBM® OS / 2® environment. This type of routing module can be identified by a program routing named by the parameters of the function call 1 of the TAP module 220. For example, the function call instruction can include a keyword, such as "FUNCTION", and include a program routing, such as TAPC0MTAP, and also include the name of the required function or other such as the slot name, data location, data size, etc. Related 200523751 08 1 63 twf.doc / 006 information. The / APCOM program routing corresponds to the data flow that is executed by the TAp module. After the call is called, it passes through the front conversion module 222 and the routing module to reach the COM + module 216. The TApc〇M program calls 22G to make a function call to decide whether to make a save / call to the local database module or remote database module 202, and / or display it on the database display device 2G4. Data, etc. The data stored in the local database module 218 or the remote database module can be stored there.

Recall for analysis. The TAPC0M program routing process is described in detail in Figure 4A and its related summary. * COMTAP program routing corresponds to the data flow from the com + module to module 220 to execute program call instructions. In one embodiment, the data flow routed by the COMTAP program is an instruction to instruct the TAp module 22 to stop the manufacturing device 112. For example, the COM + module 216 can calculate when a program is stopped, and the COMTAP program routing provides a path for the TAP module 220 to receive the program STOP command from the COM + module 216. In one embodiment, when the TAp module 22 is waiting for data to be sent back by the COM + module 216, the tap module 22 may suspend the procedure of the instruction. The process of TAPCOM program routing is detailed in Figure 4B and its phase = description. ^ TAPCOMTAP program routing corresponds to the data flow from TAP module 22 to COM + module 216 and back to TAP module 220 to execute program call instructions. For example, the TAPCOMTAP program routing can send data to the COM + module 216, so that the COM + module 216 performs some analysis and calculation on the data of 20052¾¾ 63 63ff.doc / 006, and then returns the result to the TAp module 22. The process of TAPCOMTAP program routing is explained in detail in figure buckle and related convergence. The COMTAPCOM program routing corresponds to the data flow from the COM + module 216 to the TAP module 220 and back to the COM + module 216. COMTAPCOM program routing can be used to achieve the same purpose as the coMTAp program routing. In addition, the COMTAPCOM program routing allows data to return to the COM + module, so the program data collected by the TAP module 22 can be stored in the local database module 218 or the remote database module 202 , And / or can be displayed in the database display dress 204. The process of COMTAPCOM program routing is explained in detail in Figure 4D and related descriptions. [Using the reading module 212] FIG. 3 is a flowchart of a procedure in which the reading module 212 is applied to a stepper (example) in this article. In one embodiment, the program of the reading module 212 is explicitly specified by the source code of the TAP module 220 corresponding to the stepper, and the source code is an interpreter in the reading module 212 Interpret. In another implementation, the TAP module 220 includes code to complete the compilation. It is worth mentioning that the above principle can also be applied to other types of manufacturing devices U2. Those skilled in the art without departing from the spirit of the present invention can modify the above-mentioned procedures in a variety of different ways. For example, in another embodiment, different parts of the above-mentioned procedures may be combined with each other, alternately ordered with each other, or removed. This program starts from the first state 310, where the stepper enters the action of 18 200523751 08 1 63 twf.doc / 〇〇6 :. Next, the program enters the second state 320 from the first state, and the program communicates with the stepper to obtain information, such as the identification code (id_fc) of the stepper, the shape energy, etc. Possible to use = Mask, the program is in the second state 32. Enter the first decision-making machine: The top of the decision-making machine, the program is determined to be the attack value of Qian Xin stepping machine. The program can communicate with the tool control system 21 () to use the new slave value. It is expected that the riding rule will be used, and the program will enter the first and second no from the first decision block 33o to calculate the new set value. Private block 340, is expected to be mosquitoes in this area or remotely. ^ = ^ In the example, the procedure is determined by finding the key children (such as "FUNCTION,") in the original program horse. Zone execution, for example, when the TAp module 22: of the first decision block 340 enters the second state of complaint 350 ', which is performed by the reading module 212 as described above. When this end is executed, the program is The second decision block 340 enters the fourth state 360. In the fourth state 360, the program converts the corresponding parameter to the conversion and performs remote calculation on the set value. The conversion module 214 decides to perform the operation according to the original private code. Or sequentially transmitted by module 224 and COM + module 216. Then, the program enters the fifth state 370 from the fourth 19 200523 75wlfdoc / 〇〇6 state 360. In the fifth state 370, the program is received by the transition Module 214 The new two setting values transmitted by the COM + module 216 through the conversion module 214, and enter the sixth state 38 from the fifth state 370. It is recognized that in the sixth state 380, the program transfers the new settings Value to stepper. Among them, the new set value can be advanced through the third state 35 This area can be transported to $, or obtained through remote calculation through the fourth state 360. Then, end the process ^, and repeat the operation as needed. [Using the routing module 224] Figure 4A shows the selection of a TAPCOM routing. Flow chart of the procedure performed by the routing module 224. Without departing from the spirit of the present invention, those skilled in the art can modify the above-mentioned procedures in a variety of different ways. This procedure is from the first state 40. 2 starts. In the first state 402, the routing module 224 is connected to the COM + module 216 to use the resources of the com + module 216. Then, the program enters the state 404 from the first state 402. — In the second state 404, the program converts the data and / or instructions of the reading module 212 into the COM + module 216. After the information conversion is completed, the program removes the connection with the COM + module 216. It is worth It is mentioned that this private sequence can also be repeatedly executed in response to calls routed by the TAPCOM program.

FIG. 4B is a flowchart illustrating a procedure performed by the routing module 224 for selecting a COMTAP program route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the invention. This program can be initialized, for example, by using a machine control system 110. I 20 200523751 1 63twf.doc / 006. This procedure starts from the first state 412, where the procedure is connected to the reading module 212. Then, the program goes from the first state 412 to the second state 414. In the second state 414, the program transfers the data and / or instructions of the COM + module 216 to the reading module 212. This procedure can provide data that can locate data, such as Filename, Memory, Memory Address, and Byte Range, and Database Record Identifier. ), Etc. to increase the speed of data conversion. After the data conversion is completed, the program can remove the connection with the reading module 212. FIG. 4C is a flowchart showing a procedure performed by the routing module 224 for selecting a TAPCOMTAP procedure route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the present invention. This process starts with a first state 422. In the first state 422, the routing module 224 is connected to the com + module 216 to use the resources of the COM + module 216. Then, the program enters the second state 424 from the first state 422. In the second state 424, the program converts the data _ and / or instructions of the reading module 212 into the COM + module 216. When the data conversion is completed, the program can remove the connection formed with the COM + module 216 in the first state 422. Then, the program enters the third state 426 from the second state 424. In one embodiment, the program needs to wait for a transition period from the second state 424 to the third state 426 until the COM + module 216 is ready to provide the required data. For example, the TAPCOMTAP program routing can be used to send data to the COM + module 216 in 21 200523751 〇1 1 3 twf.doc / 0〇3 3 f device 112, to analyze the data ^^ 'and recover the analyzed data ^ The sequence can wait until 0-f is ready to output the analyzed data. It is worth mentioning that ί and ^ are judged in various ways, such as receiving and breaking signals from the CO module 216, and inquiring (Polling) a status flag (sca). In the third state 426A, the program is linked to the reading module 2 2

Return related # 料. Then, the program changes from the third state 426 to the fourth state 428. In the fourth state 428, the program changes the data from the com + module 216 to the 4 fetch module 212. This procedure can be provided by, for example, providing data that can locate data, such as file name (Filename), memory address (Mem〇iy

Address), ByteRange, Database RecordIdentifler, etc., to increase the speed of data conversion. After the data conversion is completed, the program can remove the connection with the reading module 212. '

FIG. 4D is a flowchart of a process performed by a routing module 224 that does not select a COMTAPCOM program route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the present invention. This program can be initialized, for example, by the user of a machine control system 110. This procedure starts from the first state 432, where the procedure is connected to the reading module 212. Then, the program enters the first state 434 from the first state 432. In the second state 434, the program converts the data of the COM + module 216 to 22 00523751doc / 006 into the reading module 212. After the data conversion is completed, the program can remove the connection with the reading module 212. In one embodiment, the program needs to wait for a transition period from the second state 434 to the third state 436 until the COM + module 216 is ready to provide the required data. For example, COMTAPCQM program routing can be used to transfer a command from the manufacturing device 112 to the COM + module 216 ', such as a command to stop the program. In addition, COMTAPCOM program routing can be used to receive an indication from the manufacturing device 112 that the center of gravity, such as a special program, was successfully executed. The program may need to wait until the read module and the group 212 output an instruction indicating that the tasks related to the second state 434 have been completed before entering the third state 436. It is worth mentioning that whether the data is ready or not can be determined in various ways, such as receiving an interrupt signal from the reading module 216, polling a status flag (s ^ tus Flag), and so on. In the third state 436, the routing module 224 is connected to the com + module 216 to return data to the com + module 216. Then, the program goes from the third state 436 to the fourth state 438. In the fourth state 438, the program converts data from the reading module 212 to the COM + module 216. When the data conversion is completed, the program moves to the COM + module. Remove [Use COM + module] Figure 5A is a flow chart showing the operation of selecting a TApc〇M program route 戋 TAPCOMTAP program route om + module 216. For example, one of the interpretations of the reading module 212 means that a person may depend on TAPCOM or TAPCOMTAP program routing. Within the range of ^ 23 8 1 63twf.d〇c / 〇〇6 200523751, those skilled in this art should be able to repair in many different ways. For example, in another embodiment, the same parts may be combined with each other, alternately sorted with each other, or removed. This procedure starts with the first state. For 510 towels, the program receives the data from the reading module 212 :: "or the poor material. It is worth mentioning that the above instruction / ¾ data information 'for example, the data resident group resident in this area = retired shellfish library 202202 的 资 μ 4 立 # 士 Enter the second state 520 4. Then, the program is from the first state 510 510 中, 〜, and the program is to perform the tasks specified by instructions, materials provided, etc. But Ab spoon b eight ^ X month dagger includes static and evil analysis, etc. When the task is ready to complete: the program will enter the second state into the third state 53. In the first state of evil 530, the program configures the data according to the instructions. . For example, if the program routing is specified by the instruction as-ΤΑρα) M path, then the miscellaneous calculation results can be stored in the local Lai Group 2 ^, and the calculation results will be displayed in the database display device outline. In another example, the program routing is designated by the instruction as a ^ apcomtap path 'difficult order can be returned to the reading module 212 through the routing module 224. Figure 5B shows the selection of a coMTAp program routing. Flow chart of the sampling operation performed by the COM0 COM module routing COM0 module 216. Without departing from the spirit of the present invention, those skilled in the art can modify the above-mentioned procedures in a variety of ways. For example, in the case of another-implementation, different parts of the above-mentioned procedures can be used by each other. 200523751 08 1 63 twf .doc / 006 combined, alternated with each other, or removed, etc. This program starts from the first state 540. In the first state 540, the program receives a command from the machine control system worker 10 = = = ( command) or instruction (Instmcti0n). It is worth noting that the above-mentioned users are not limited to personnel. Commands can be taken from a data input device, such as a mouse or keyboard, or can be taken from another host system. Then, the program system enters a decision block 55 from the first state 54. In decision block 550, the program decides whether the program routing is a COMTAP program routing or a coMTPApcm program routing. When the program routing is a 03MTAP type At this time, the program enters a second state 560 from decision block 55. Otherwise, the program enters a third state 570 from decision block 55. In the second state 560, the program converts the data selected by the user. / Or the instruction is read into the reading module 212. For example, the above-mentioned data may be, for example, a command to stop the manufacturing device 112. Then, the procedure ends. In the third state 570, the procedure also converts the user from c. 〇M + module 216 selects the data and / or instructions into the reading module 212. Then, before the third state 570 enters the fourth state 58, the program will wait until the reading module 212 completes the request In the fourth state 580, the program receives specific information from the reading module 212, which may correspond to, for example, whether the selected command was successfully executed by the manufacturing device 112. Then, the program ends and can be repeated as needed. Although the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art will not depart from the spirit of the present invention 200523751 08 1 63twf.doc / 〇〇6 and should be able to Make a few changes and retouching, so the scope of the present invention should be defined by the application's application. … [Schematic description] Figure 1 is not an example of a host system used in a manufacturing environment. FIG. 2 illustrates a machine control system of a preferred embodiment of the present invention. ′, FIG. 3 shows a flowchart of an example of the application of the reading module in this paper to a stepper. FIG. 4A shows a flowchart of a process performed by the routing module 选择 for selecting a TAPCOM program route. FIG. 4B shows a flowchart of a process performed to select a routing module for a COMTAP process. ~ Figure 4C shows a flowchart of the process performed by a routing module that selects a TAPC0MTAP process route. FIG. 4D shows a flowchart of a process performed by a routing module for selecting a COMTAPCOM program route. FIG. 5A shows a flowchart of the sampling operation ® performed by selecting a COM + module of a TAPC0M program route or a TAPCOMTAP program route. Figure 5B shows a flowchart of the sampling operation performed by a COM + module that selects a COMTAP program route or COMTAPCOM program route. μ [Description of main component symbols] 100: Host integrated manufacturing system 26 200523751 0 8 1 6 3 twf. do c / 0 0 6 102 Manufacturing execution system 104 Enterprise resource planning management system 110 Machine control system 112 Device 202 Remote database Module 204 Database display device 206 Other manufacturing execution system 210 Tool control system 212 Read module 214 Conversion module 216 C0M + module 218 Database module in this area 220 TAP module 222 Front conversion module 224 Routing module steps 310: initialization step 320: communication with stepper step 330: whether to update the setting step 340: whether to use the conversion module step 350 ... calculate the new setting in this area step 360 ... calculate the new setting at the remote step 370: receive the new Setting step 380 · Send new settings to the stepper Step 402: Connect COM + module 27 08 1 63twf.doc / 006 200523751 Step 404: Convert data and / or instructions Step 412: Link to read module Step 414: Conversion Data and / or instruction Step 422: Link to COM + module Step 424: Convert data and / or instruction Step 426: Link to read module Step 428: Convert data step 432: Link to read module Step 434: Convert data and / or instructions® Step 436: Link to COM + module Step 438: Convert data Step 510: Receive instructions and / or data Step 520: Perform requested operation Step 530: Configure the data according to the instructions. Step 540: Receive the command by the user. Step 550: Determine the type of the path. Step 560: Convert the data and / or instructions to the reading module. Step 570: Convert the data and / or instructions to the reading module. Step 580. : Self-reading module receives information 28

Claims (1)

200523751 10. Scope of patent application: L A machine control system, including: a tool control system, used to communicate with a manufacturing execution system coupled to the machine control system, to receive one of the manufacturing execution system, two ,,,, Provide the status of the machine control system; 7 and a reading module to communicate with the tool control system and at least-manufacturing equipment, wherein the reading module includes an interpreter for the i-type code system Suitable for controlling the manufacturing device; a conversion module, which communicates with the reading module, of which A few heartfelt; mad at the source code of LUlVl + format. I '4 |; 7 ^ 彳 No · A forward conversion module, the original yaw code of the module is interpreted, and the original 3 It is used to control the reading module and the COM + module. The command is transmitted to the COM + module; and a routing module is used to control the information path of the reading room. Machine control system, including 4. As described in item 3 of the scope of patent application 29 200523751 08 1 63twf.doc / 006 The reading module, the front conversion module and the routing module include the ancestral case, and COM + Modules include broadcasts in C0M + format. ; 5. The machine control system as described in the section of Shenzhezhuanwei, where the original code of 5H TAP pull-out includes instructions that can be interpreted and executed by the reading module, and includes external call collection Function instructions. 6. The machine control system as described in item j of the scope of patent application, the conversion module of Lizhong responds to at least one of four program routes selected from tapcomtap and 0) MTAPC0m (ResPGnsive), The TAPCOM program route corresponds to the data flow from the TAP to the test module, and the COMTAP program route corresponds to the data flow from the com + module to the TAP module. The TApc〇MTAp program route corresponds to the data flow from the ㈣TAP amount to the CQM + Hji and back to the TAP module, and the coMtapc〇m program route ^ corresponds to the COM + module to the TAP module, and the data flow of COM + module. 7. According to the machine control system described in item 6 of the scope of patent application, the conversion module is further used to wait for an instruction from the TAPC0MTAP program routing office. When the COM + module information is provided, the waiting action is started. After the COM + module is ready to provide the data, the waiting operation ends. 8. As for the machine control system described in item 6 of the scope of patent application, the conversion module is used to wait for the COMTAPCOM program routing office. Command, when the TAP module information is provided, it starts the waiting action — 30 200523751 08 1 63twf.doc / 0〇6 and after the TAP module is ready to provide the required information, the waiting action ends. 9. A method of controlling a manufacturing device, comprising: communicating with a manufacturing execution system to determine whether to use a new setting; receiving a first set of parameters regarding the new setting from the manufacturing execution system; and according to a first set of instructions, and Control a manufacturing device; retrieve one of the new settings within the first set of instructions; link to a COM + module to convert the first set of parameters to the COM + module; and wait until the COM + module is complete The calculation of a second set of parameters, where the second set of parameters is calculated from the first set of parameters and can be directly used by the manufacturing device. 10. The method according to item 9 of the scope of patent application, wherein the manufacturing apparatus includes a semiconductor manufacturing apparatus. 11. The method described in item 9 of the scope of patent application, further comprising executing the code in the COM + module, which is written in the format of com +. 12. The method as described in item u of the scope of patent application, wherein the manufacturing equipment is controlled by a first operating system, and the code executed in the coM + module is different from the first operating system -The second exercise. % ^ U. The method as described in item 12 of the patent application scope, wherein the first operating system is IBM® Lion and the second operating system is Microsoft® Windows®.糸 200523751 08 1 63twf.doc / 〇〇6 • 14. The method described in item 13 of the scope of patent application, including the use of executable code generated by at least one of Visual Basic®, java, and C ++, to As the code executed by the COM + module of the second operating system. b. The method according to item 9 of the scope of patent application, wherein controlling the manufacturing device means interpreting the original code. 16. A method for controlling a program path of a host command, including: receiving a command from a TAP module, which specifies the execution of a function at the remote end of a reading module, wherein the TAP module is Executed in the reading module, and the TAP module is a program that controls a manufacturing device; Review the instruction to find a corresponding parameter, which specifies a program path executed by the remote end; Function to execute the code of the Cm + module, and when the parameter specifies a program path from the TAP module to the C0M + module, provide information corresponding to the C0M + module; The com + module that executes the code of the function provides the information corresponding to the COM + module, waiting for the com + module to complete the calculation of the function. When the COM + module is ready to provide data, link To the reading module for executing the code from the TAP module, and ^ the parameter refers to a program path flowing out of the 5H TAP module, providing the result of the operation, and proceeding to the Cm + Module and return to the TAp module. 17. The method according to item 16 of the scope of patent application, wherein the information corresponding to the COM + module includes data and instructions. 32 200523751 08 1 63twf.doc / 〇〇6 18: The method described in item 16 of the scope of patent application, further comprising: receiving a command from Yuan COM + module as a function to be executed in the TAp module And is connected to the reading module and provides the corresponding information of the reading module, so that when the parameter specifies a program parameter from the CQM + to the TAP module, it can be used by the TAP module. 19. The method as described in item 16 of the scope of patent application, further comprising: receiving an instruction from the COM + module as a function to be executed in the TAP module, wherein the instruction further refers to the ㈣τΑρ module # Return a second information; and link to the side item fetch module, and provide the read module a first information, so that the TAP module can use the first information, waiting for the TAp module to be ready to provide the The second information is received from the reading module, and the second information is provided when the parameter specifies the flow from the COM + module to the TAP module and then returns to one of the program paths of the two COM + modules. To the coM ^ module. ^ 2〇. The method as described in item 16 of the scope of patent application, wherein the TAp ^ module corresponds to the original code, and the reading module interprets the original code of the TAP module, To run the source code. 21. The method according to item 16 of the scope of patent application, wherein the manufacturing apparatus includes a semiconductor manufacturing apparatus. Human, 22 · —A host with a host-executable instruction—a readable medium (Medium) for performing a method, including receiving a command from a TAP module, which specifies a reading module 33 200523751 08 1 63twf.doc / 006 The execution of the function 'where the TAP module is in the reading module ^, and the TAP module is a control-manufacturing device process' — Corresponding parameters determine one program path to be executed; Xianglian, ,, mouth to the ⑶ module with the execution code of the function, TAP module to one of the com + modules The information corresponding to the COM + module; and the CQM + module linked to the aging handle of the function, ^ for the information corresponding to the coM + module, waiting for the function calculation of the com + module, f When the C0M + module is ready to provide data, connect: = the reading module that comes from the code of the TAP module, which means that when a program path flows out of the TAP module, it provides different operations. Result ’continues to the CQM + module and _ TAp module. 23—If the material is around the 22nd frame, the machine can read the media. The host can execute the instructions to execute a method, including: receiving an instruction from the COM + module as a command to the ATP , And used to execute one of the functions; and,, connected to the reading module and providing the corresponding information of the reading module to specify from the COM + module to one of the TAp modules in the parameter It can be used by the TAP module when the parameters are set. 24. The host-readable medium as described in item 22 of the scope of patent application, including host-executable instructions to execute a method, including: receiving an instruction from the COM + module as A function to be executed in the τΑρ module, where the command specifies the τΑρ module = 34 200523751 08 1 63 twf.doc / 006 returns a second message; and links to the reading module and provides The reading module has first information so that the TAP module can use the first information, wait for the TAP module to be ready to provide the second information, and receive the second information from the reading module. The parameter specifies that when the COM + module flows to the TAP module and returns to a program path of the COM + module, the second information is provided to the COM + module.