TW200711510A - Mems microphone and package - Google Patents

Mems microphone and package

Info

Publication number
TW200711510A
TW200711510A TW095125893A TW95125893A TW200711510A TW 200711510 A TW200711510 A TW 200711510A TW 095125893 A TW095125893 A TW 095125893A TW 95125893 A TW95125893 A TW 95125893A TW 200711510 A TW200711510 A TW 200711510A
Authority
TW
Taiwan
Prior art keywords
die
microphone
package
alcu
backplate
Prior art date
Application number
TW095125893A
Other languages
English (en)
Chinese (zh)
Inventor
Geert Langereis
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200711510A publication Critical patent/TW200711510A/zh

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
TW095125893A 2005-07-18 2006-07-14 Mems microphone and package TW200711510A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05106569 2005-07-18

Publications (1)

Publication Number Publication Date
TW200711510A true TW200711510A (en) 2007-03-16

Family

ID=37669195

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095125893A TW200711510A (en) 2005-07-18 2006-07-14 Mems microphone and package

Country Status (2)

Country Link
TW (1) TW200711510A (fr)
WO (1) WO2007010421A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8546170B2 (en) 2007-08-17 2013-10-01 Wolfson Microelectronics Plc MEMS process and device
TWI457270B (zh) * 2009-02-13 2014-10-21 Wolfson Microelectronics Plc 微機電系統裝置及製程
TWI458671B (zh) * 2007-04-26 2014-11-01 Bosch Gmbh Robert 微機械構件及相關製造方法
TWI754969B (zh) * 2020-03-09 2022-02-11 鑫創科技股份有限公司 微機電麥克風結構與其製造方法
TWI773903B (zh) * 2018-06-25 2022-08-11 台灣積體電路製造股份有限公司 具有薄膜的微機電系統麥克風

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010103410A1 (fr) 2009-03-09 2010-09-16 Nxp B.V. Microphone et accéléromètre
DE112011105008B4 (de) * 2011-03-04 2017-10-05 Tdk Corporation Mikrofon und Verfahren zum Positionieren einer Membran zwischen zwei Gegenelektroden
GB2538177B (en) * 2014-06-10 2017-09-13 Cirrus Logic Int Semiconductor Ltd Packaging for MEMS transducers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938621A (ja) * 1982-08-27 1984-03-02 Nissan Motor Co Ltd 振動分析装置
US4495385A (en) * 1982-12-02 1985-01-22 Honeywell Inc. Acoustic microphone
US5889872A (en) * 1996-07-02 1999-03-30 Motorola, Inc. Capacitive microphone and method therefor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI458671B (zh) * 2007-04-26 2014-11-01 Bosch Gmbh Robert 微機械構件及相關製造方法
US8698256B2 (en) 2007-07-17 2014-04-15 Wolfson Microelectronics Plc MEMS process and device
US8546170B2 (en) 2007-08-17 2013-10-01 Wolfson Microelectronics Plc MEMS process and device
US8803261B2 (en) 2007-08-17 2014-08-12 Wolfson Microelectronics Plc MEMS process and device
US9363610B2 (en) 2007-08-17 2016-06-07 Cirrus Logic, Inc. MEMS process and device
US9756430B2 (en) 2007-08-17 2017-09-05 Cirrus Logic, Inc. MEMS process and device
TWI457270B (zh) * 2009-02-13 2014-10-21 Wolfson Microelectronics Plc 微機電系統裝置及製程
TWI773903B (zh) * 2018-06-25 2022-08-11 台灣積體電路製造股份有限公司 具有薄膜的微機電系統麥克風
TWI754969B (zh) * 2020-03-09 2022-02-11 鑫創科技股份有限公司 微機電麥克風結構與其製造方法
US11498830B2 (en) 2020-03-09 2022-11-15 Solid State System Co., Ltd. Structure of micro-electro-mechanical-system microphone and method for fabricating the same

Also Published As

Publication number Publication date
WO2007010421A2 (fr) 2007-01-25
WO2007010421A3 (fr) 2007-10-11

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