TW200735331A - Electrically rewritable non-volatile memory element and method of manufacturing the same - Google Patents

Electrically rewritable non-volatile memory element and method of manufacturing the same

Info

Publication number
TW200735331A
TW200735331A TW095142420A TW95142420A TW200735331A TW 200735331 A TW200735331 A TW 200735331A TW 095142420 A TW095142420 A TW 095142420A TW 95142420 A TW95142420 A TW 95142420A TW 200735331 A TW200735331 A TW 200735331A
Authority
TW
Taiwan
Prior art keywords
upper electrode
bit line
volatile memory
memory element
manufacturing
Prior art date
Application number
TW095142420A
Other languages
English (en)
Other versions
TWI322499B (en
Inventor
Isamu Asano
Original Assignee
Elpida Memory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elpida Memory Inc filed Critical Elpida Memory Inc
Publication of TW200735331A publication Critical patent/TW200735331A/zh
Application granted granted Critical
Publication of TWI322499B publication Critical patent/TWI322499B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/061—Shaping switching materials
    • H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/061—Shaping switching materials
    • H10N70/066—Shaping switching materials by filling of openings, e.g. damascene method
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/841—Electrodes
    • H10N70/8413—Electrodes adapted for resistive heating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H10N70/8825—Selenides, e.g. GeSe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H10N70/8828—Tellurides, e.g. GeSbTe

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
TW095142420A 2005-11-28 2006-11-16 Electrically rewritable non-volatile memory element and method of manufacturing the same TWI322499B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005341476A JP4847743B2 (ja) 2005-11-28 2005-11-28 不揮発性メモリ素子

Publications (2)

Publication Number Publication Date
TW200735331A true TW200735331A (en) 2007-09-16
TWI322499B TWI322499B (en) 2010-03-21

Family

ID=38088077

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142420A TWI322499B (en) 2005-11-28 2006-11-16 Electrically rewritable non-volatile memory element and method of manufacturing the same

Country Status (4)

Country Link
US (1) US7582889B2 (zh)
JP (1) JP4847743B2 (zh)
CN (1) CN100541810C (zh)
TW (1) TWI322499B (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4847743B2 (ja) * 2005-11-28 2011-12-28 エルピーダメモリ株式会社 不揮発性メモリ素子
JP2008103541A (ja) * 2006-10-19 2008-05-01 Renesas Technology Corp 相変化メモリおよびその製造方法
JP4503627B2 (ja) * 2007-03-29 2010-07-14 Ｏｋｉセミコンダクタ株式会社 半導体装置及びその製造方法
US7663134B2 (en) * 2007-07-10 2010-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Memory array with a selector connected to multiple resistive cells
JP2009065019A (ja) * 2007-09-07 2009-03-26 Sony Corp 配線構造、記憶素子およびその製造方法並びに記憶装置
JP2009099854A (ja) * 2007-10-18 2009-05-07 Elpida Memory Inc 縦型相変化メモリ装置の製造方法
JP2009177073A (ja) * 2008-01-28 2009-08-06 Renesas Technology Corp 半導体装置および半導体装置の製造方法
CN101232038B (zh) * 2008-02-26 2010-12-08 中国科学院上海微系统与信息技术研究所 高密度相变存储器的结构与制备的工艺
KR101510776B1 (ko) 2009-01-05 2015-04-10 삼성전자주식회사 반도체 상변화 메모리 소자
US8283202B2 (en) 2009-08-28 2012-10-09 International Business Machines Corporation Single mask adder phase change memory element
US8283650B2 (en) * 2009-08-28 2012-10-09 International Business Machines Corporation Flat lower bottom electrode for phase change memory cell
US8012790B2 (en) * 2009-08-28 2011-09-06 International Business Machines Corporation Chemical mechanical polishing stop layer for fully amorphous phase change memory pore cell
US8129268B2 (en) 2009-11-16 2012-03-06 International Business Machines Corporation Self-aligned lower bottom electrode
US7943420B1 (en) * 2009-11-25 2011-05-17 International Business Machines Corporation Single mask adder phase change memory element
US9196530B1 (en) 2010-05-19 2015-11-24 Micron Technology, Inc. Forming self-aligned conductive lines for resistive random access memories
JP5831687B2 (ja) * 2011-07-22 2015-12-09 ソニー株式会社 記憶装置およびその製造方法
US9172038B2 (en) 2012-11-14 2015-10-27 Panasonic Intellectual Property Management Co., Ltd. Nonvolatile memory element and method of manufacturing the same
US9112148B2 (en) 2013-09-30 2015-08-18 Taiwan Semiconductor Manufacturing Co., Ltd. RRAM cell structure with laterally offset BEVA/TEVA
US9178144B1 (en) 2014-04-14 2015-11-03 Taiwan Semiconductor Manufacturing Co., Ltd. RRAM cell with bottom electrode
US9209392B1 (en) 2014-10-14 2015-12-08 Taiwan Semiconductor Manufacturing Co., Ltd. RRAM cell with bottom electrode
CN110635030B (zh) * 2019-09-24 2021-10-01 华中科技大学 用于纳米级相变存储器单元的垂直电极配置结构
CN110767801B (zh) * 2019-09-24 2021-09-14 华中科技大学 纳米级相变存储器单元的垂直电极配置结构的加工方法
CN115884600B (zh) * 2021-09-28 2025-10-21 长鑫存储技术有限公司 半导体结构及其制备方法
US12400957B2 (en) 2021-09-28 2025-08-26 Changxin Memory Technologies, Inc. Geometric semiconductor memory structure and manufacturing method thereof
CN117156868A (zh) 2022-05-18 2023-12-01 长鑫存储技术有限公司 半导体结构及其制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0844628A (ja) * 1994-08-03 1996-02-16 Hitachi Ltd 不揮発性メモリ、およびそれを用いたメモリカード、情報処理装置、ならびに不揮発性メモリのソフトウェアライトプロテクト制御方法
WO1997030454A1 (fr) * 1996-02-19 1997-08-21 Citizen Watch Co., Ltd. Memoire remanente a semi-conducteurs
JP4491870B2 (ja) * 1999-10-27 2010-06-30 ソニー株式会社 不揮発性メモリの駆動方法
US6549447B1 (en) * 2001-10-31 2003-04-15 Peter Fricke Memory cell structure
US6605821B1 (en) * 2002-05-10 2003-08-12 Hewlett-Packard Development Company, L.P. Phase change material electronic memory structure and method for forming
KR100481865B1 (ko) * 2002-11-01 2005-04-11 삼성전자주식회사 상변환 기억소자 및 그 제조방법
KR100568109B1 (ko) * 2003-11-24 2006-04-05 삼성전자주식회사 상변화 기억 소자 및 그 형성 방법
KR100733147B1 (ko) * 2004-02-25 2007-06-27 삼성전자주식회사 상변화 메모리 장치 및 그 제조 방법
JP4847743B2 (ja) * 2005-11-28 2011-12-28 エルピーダメモリ株式会社 不揮発性メモリ素子

Also Published As

Publication number Publication date
TWI322499B (en) 2010-03-21
US7582889B2 (en) 2009-09-01
US20070123018A1 (en) 2007-05-31
CN100541810C (zh) 2009-09-16
CN1983617A (zh) 2007-06-20
JP2007149913A (ja) 2007-06-14
JP4847743B2 (ja) 2011-12-28

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