TW200741104A - A vacuum conduit - Google Patents

A vacuum conduit

Info

Publication number
TW200741104A
TW200741104A TW096103169A TW96103169A TW200741104A TW 200741104 A TW200741104 A TW 200741104A TW 096103169 A TW096103169 A TW 096103169A TW 96103169 A TW96103169 A TW 96103169A TW 200741104 A TW200741104 A TW 200741104A
Authority
TW
Taiwan
Prior art keywords
vacuum conduit
vibration damper
damper
vibrations
reducing
Prior art date
Application number
TW096103169A
Other languages
English (en)
Chinese (zh)
Inventor
Heinrich Englaender
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of TW200741104A publication Critical patent/TW200741104A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/04—Devices damping pulsations or vibrations in fluids
    • F16L55/041—Devices damping pulsations or vibrations in fluids specially adapted for preventing vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/0418—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall having a particular shape, e.g. annular, spherical, tube-like
    • F16F9/0427—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall having a particular shape, e.g. annular, spherical, tube-like toroidal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
    • F16L23/22—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00—Construction or details of pipe joints not provided for in, or of interest apart from, groups F16L13/00 - F16L23/00
    • F16L25/0081—Pipe joints comprising a liquid or fusible seal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Fluid Mechanics (AREA)
  • Pipe Accessories (AREA)
  • Vibration Prevention Devices (AREA)
  • Compressor (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
TW096103169A 2006-01-31 2007-01-29 A vacuum conduit TW200741104A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006004314A DE102006004314A1 (de) 2006-01-31 2006-01-31 Vakuumleitung

Publications (1)

Publication Number Publication Date
TW200741104A true TW200741104A (en) 2007-11-01

Family

ID=37907403

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096103169A TW200741104A (en) 2006-01-31 2007-01-29 A vacuum conduit

Country Status (3)

Country Link
DE (1) DE102006004314A1 (fr)
TW (1) TW200741104A (fr)
WO (1) WO2007088096A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114901951A (zh) * 2020-01-09 2022-08-12 爱德华兹有限公司 真空泵、用于抽空半导体处理腔室的真空泵组以及抽空半导体处理腔室的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015008803U1 (de) * 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
GB2587367A (en) * 2019-09-24 2021-03-31 Edwards Ltd Vibration damping connector systems

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1096461A (en) * 1964-12-01 1967-12-29 English Electric Co Ltd Vibration damping means
GB1574794A (en) * 1977-08-05 1980-09-10 Spiro Investment Sa Connecting lengths of tubing
DD205482A1 (de) * 1982-06-02 1983-12-28 Ingomar Fitz Vorrichtung zum abdichten von ringraeumen zwischen rohrtouren
US4523612A (en) * 1983-04-15 1985-06-18 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for suppressing vibration and displacement of a bellows
FR2591293B1 (fr) * 1985-12-11 1989-09-01 Inst Francais Du Petrole Support elastique a rotule adapte en particulier a des utilisations pour des navires ou des plates-formes flottantes en mer.
DE8906015U1 (de) * 1989-05-13 1989-06-29 Philipp Holzmann Ag, 6000 Frankfurt Schild-Gelenkdichtung
DE19712711A1 (de) * 1997-03-26 1998-10-01 Pfeiffer Vacuum Gmbh Dämpfungssystem für magnetisch gelagerte Rotoren
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
DE10119075A1 (de) * 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114901951A (zh) * 2020-01-09 2022-08-12 爱德华兹有限公司 真空泵、用于抽空半导体处理腔室的真空泵组以及抽空半导体处理腔室的方法

Also Published As

Publication number Publication date
DE102006004314A1 (de) 2007-08-02
WO2007088096A1 (fr) 2007-08-09

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