WO2007088096A1 - Conduit sous vide - Google Patents

Conduit sous vide Download PDF

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Publication number
WO2007088096A1
WO2007088096A1 PCT/EP2007/050301 EP2007050301W WO2007088096A1 WO 2007088096 A1 WO2007088096 A1 WO 2007088096A1 EP 2007050301 W EP2007050301 W EP 2007050301W WO 2007088096 A1 WO2007088096 A1 WO 2007088096A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
damping element
damper
gas
vacuum line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/050301
Other languages
German (de)
English (en)
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of WO2007088096A1 publication Critical patent/WO2007088096A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/04—Devices damping pulsations or vibrations in fluids
    • F16L55/041—Devices damping pulsations or vibrations in fluids specially adapted for preventing vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/0418—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall having a particular shape, e.g. annular, spherical, tube-like
    • F16F9/0427—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall having a particular shape, e.g. annular, spherical, tube-like toroidal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
    • F16L23/22—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00—Construction or details of pipe joints not provided for in, or of interest apart from, groups F16L13/00 - F16L23/00
    • F16L25/0081—Pipe joints comprising a liquid or fusible seal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially

Definitions

  • the invention relates to a two-part vacuum line with a vibration damper for reducing the vibration transmission from one part to the other part of the gas line.
  • Such vacuum lines are used in vacuum technology, for example, for the mechanical decoupling of a vacuum pump from a device connected to the vacuum pump, which is sensitive to shocks and vibrations.
  • the vibration damper may also be part of a vacuum pump with a high vacuum flange, which is mechanically decoupled from the pump part by the vibration damper. In both cases, the vibration damper serves to reduce the Vibration transmission to protect the connected lines, vessels and equipment from unwanted vibration.
  • DE 100 01 509 A1 discloses a turbomolecular vacuum pump which has a high-vacuum flange which is decoupled from the pump part with the aid of a vibration damper, wherein the vibration damper consists of a metal bellows with an outside supporting rubber jacket.
  • the rubber jacket has in particular in the axial direction supporting function and is therefore relatively stiff. The vibration transmission is therefore only limited attenuated, which in particular can significantly affect a connected to the high-vacuum flange sensitive device, such as an electron microscope in its function.
  • a metallic bellows or diaphragm bellows as a gas line is disadvantageous because these components have virtually no own internal damping. Furthermore, they must be axially supported in both directions since they are unable to compensate for the differential pressure between the vacuum and the atmosphere in the axial direction while still maintaining acceptable vibration decoupling. Although diaphragm spring bellows and corrugated bellows provide excellent sealing from a vacuum technical point of view, they worsen the mechanical decoupling of the parts connected by them.
  • the object of the invention is the opposite, to create a vibration damped vacuum line or a vacuum pump with vibration damped high-vacuum flange, which is technically simple and has a good damping capacity.
  • the vibration damper is designed as a gas damping element.
  • the gas damping or gas suspension has inherent excellent damping properties, which allows a much improved damping of a gas line part relative to the other gas line part or the high-vacuum flange relative to the pump part of the vacuum pump.
  • the damping behavior can be adjusted in many areas according to the application.
  • the elastic damping element between two axial support surfaces is arranged, wherein the damping element has a cavity which is filled with a damper gas.
  • the damping element is elastic, for example, consists of an elastic plastic, rubber or other elastic material. In principle, it is also conceivable to form the damping element from a thin sheet metal body which is filled with gas.
  • the elastic damping element forms the cavity alone or together with a part or both parts of the vacuum line or the vacuum pump, which can form part of the holraum wall, while the elastic part closes only the gaps between the parts.
  • the damping element forms a gas line.
  • a separate gas line for axial bridging of the Damping element can be dispensed with.
  • the damping element takes over in addition to the damping and the function of the gas line or the sealing of the vacuum in the gas line course relative to the environment.
  • the damping element thus takes over both the seal in this section alone as well as the damping.
  • On a corrugated bellows or diaphragm bellows is therefore omitted in this area. As a result, the vibration isolation is significantly improved.
  • the damping element is designed as an annular toroid damper tube between the two annular disk-shaped support surfaces.
  • the annular damper hose is relatively easy to manufacture and is compressed axially from the two support surfaces due to the pressure difference inside and outside the gas line.
  • the damper tube is radially fixed by the static friction between the damper tube and the respective annular disc-shaped support surfaces.
  • the damper hose can also be glued to the support surfaces, jammed or otherwise connected, preferably gas-tight, with them.
  • a fixed radial support element for radial support of the damper hose is provided radially inward.
  • the radial support member may be formed, for example, as a cylindrical wall, which is arranged radially inwardly of the damper tube and prevents a caused by the pressure difference deformation of the damper tube radially inward.
  • the radial support element is fixed in this case to one of the two line parts or fixed to the pump part or the high-vacuum flange.
  • the radial support member may also be formed in the form of comb-like arranged axial teeth, which are attached to both ends of the gas pipe and alternately axially engage with each other.
  • the damper hose is supported radially inwardly, but reduces the friction surface between the damper hose and the radial support element to a minimum.
  • the cavity of the damping element is partially filled with a liquid and / or a fine-grained substance.
  • a liquid and / or a fine-grained substance in addition to the damper gas in the cavity, the damping properties of the damping element can be selectively influenced.
  • Suitable liquids are liquids of different viscosities. As a fine-grained substance can serve sand or granules. In this way, certain vibration frequencies can be specifically damped.
  • the filling level of the liquid in the cavity is such that the damper gas lies exclusively in a region above the radial support surface-free region.
  • the damping element cavity or the damper hose is thus filled up to its sealing height with a liquid, for example with oil.
  • the liquid serves for improved gas sealing of the damping element. This is necessary if the damping element is not made of metal, but of a plastic or rubber. Light small molecular gases diffuse through rubber and plastic walls and could increase pressure within the gas line.
  • the filling level of the liquid in the damping element cavity or in the damper hose is therefore such that the damper gas lies exclusively above a radially unshielded region of the damping element or the damper hose.
  • the shield additionally seals the damping element or the damper hose, so that in this area no gas can diffuse into the gas line through the wall of the damping element or the damper hose.
  • a radially non-shielded region of the damping element or of the damper hose is unavoidable.
  • This region of the cavity of the damping element or of the damper hose is filled with the gas-sealing liquid.
  • the damping element has a gas connection, filled by the damper gas into the cavity, or can be discharged from this.
  • a constant refilling with damper gas may already be necessary because in plastic or rubber damping elements low diffusion losses are inevitable.
  • a pump can be connected to the gas connection, which increases or decreases the gas pressure in the damping element as required, or else adapts other damping properties to the respective boundary conditions by filling certain fluids which modify the damping properties.
  • the vacuum pump according to the invention is preferably designed as a turbomolecular pump.
  • High-vacuum turbomolecular pumps run at high speeds of several 10,000 revolutions per minute and thereby generate high-frequency mechanical vibrations that are harmful for connected to the high-vacuum flange electron microscopes, mass spectrometers, etc.
  • the damping according to the invention with a cavity having a damping element is therefore for mechanical decoupling of Hochvakuumflansches a High-vacuum turbomolecular pump particularly well suited to the high-vacuum flange connected mechanically sensitive equipment to protect against the high-frequency vibrations that are generated in the pump part of the turbomolecular pump.
  • Fig. 1 shows a longitudinal section of a vacuum pump with a as
  • Fig. 2 shows a second embodiment of a vacuum pump with a
  • FIG. 3 shows a detail of a longitudinal section of a vacuum line with unsupported damper hose
  • Fig. 4 shows a second embodiment of a vacuum line with supported
  • Fig. 5 shows a third embodiment of a vacuum line with a supported and filled with a liquid damper hose.
  • FIGS. 1 and 2 show a vacuum pump 10, 12 which is designed in each case as a high-vacuum turbomolecular pump.
  • Each of the vacuum pumps 10, 12 each has a high-vacuum flange 14, to which a high-vacuum recipient, an electron microscope, a mass spectrometer or another vacuum component can be connected.
  • the vacuum pumps 10, 12 can be functionally divided into a pump part 16 and a movable part 18, 20 which connects the pump part 16 with the high-vacuum flange 14 in a gastight and damping manner.
  • the movable part 18 is provided with an elastic damping element 30 acting as a vibration damper, which is arranged axially between two support surfaces 32, 34 lying in a transverse plane.
  • the damping element 30 has a cavity 36 which is filled with a damper gas.
  • the damping element 30 is formed by an annular closed toroidal damper tube 38, which consists of a relatively thin tube wall 40 made of an elastic material, for example of a rubber-elastic plastic or rubber.
  • the damping element 30 has a gas connection 42, to which a damper gas reservoir 44 is connected, so that damper gas can be introduced into the damping element 30 via a damper gas pump 46, or can be sucked out of it and stored. As a result, the degree of damping or the damping travel can be adjusted.
  • the damping element 30 is surrounded by a pot-shaped housing 48, with which the damping element 30 is glued or otherwise connected.
  • the pot-shaped housing 48 is a rigid component of the movable part 18.
  • the cup-shaped housing 48 holds the damping element 30 in its position, thereby preventing the damping element 30 is pressed radially inward due to the pressure differences.
  • the damping element 30 of the vacuum pump 10 of FIG. 1 acts as a gas line, i. H. it seals completely so that a separate gas line is not required.
  • a metal corrugated bellows 72 is provided which ensures the gas-tight seal and additionally supports the damping element 30 radially on the inside.
  • Both the movable part 18, 20 and the pump part 16 each have a lying in a horizontal plane annular flange 78, 79 associated with the Hubbegrenzung a retaining screw 80 on a flange which in an opening 81 of the other flange 79 axially, laterally and is only limited mobility in the circumferential direction.
  • FIGS. 3-5 show a respective different arrangement of a damping element designed as a damper tube.
  • the first embodiment of a vacuum line 100 which is shown in Fig. 3, represents a simple form of the vacuum line according to the invention.
  • elastic damping element 102 is a damper tube 104 which between the support surfaces 106, 108 of the support flanges 110, 112 of the two adjacent and mutually limited movable parts 114, 116 is arranged.
  • the annular toroidal damper tube 104 is compressed axially in the axial direction by the between the outside of the vacuum line 100 and the interior of the vacuum line 100 prevailing pressure difference.
  • the damper tube 104 can also be glued to increase the fastening security respectively with the adjacent support surface 106, 108 or connected in a gastight manner in other ways.
  • the elastic damping element 122 is step-shaped in cross-section, wherein the vertical portion 123 has a greater width than the height of the horizontal upper portion 124.
  • the damping element 122 is formed as a relatively thin-walled damper tube 126 with step-shaped cross-sectional profile. Between the damper tube 126 and also stair-like flange 128, 130 of the two Gas line parts 132, 134 are ring-shaped support surfaces 136, 138 are formed, on which the damper tube 126 is axially supported.
  • the damper tube 126 can not be drawn into the gas line interior in this arrangement, since this would be a volume reduction of the damper tube 126 would be required.
  • damper tube walls in the vertical portion 123 of the damper tube 126 could be made so thick that they would not fit through the horizontal gap in the upper transverse region 124 between the two parts 132, 134.
  • this design also has the advantage that it provides good damping in the radial direction.
  • the upper part 142 has in its flange arrangement an annular groove-shaped hose groove 146 which opens axially to the other lower part 144.
  • the damper tube 150 forming the damping element 148 has a hat-like cross section, with the brim section 152 of the damper tube 148 protruding axially outward from the hose groove 146 and radially inwardly and outwardly.
  • the damper tube 150 is filled with damper gas in its upper region 154 and is filled with a liquid 156 in its lower region.
  • the filling level of the liquid 156 is such that the damper gas lies exclusively above the radially unshielded region of the damper hose 150. In this way, permeation of damper gas through the damper hose wall into the duct interior is significantly reduced.
  • a sealing liquid 156 for example, oil is used.
  • the arrangements shown using the example of the vacuum lines 100, 120, 140 can of course also be implemented in the vacuum pump illustrated in FIGS. 1 and 2, which also applies the other way round.
  • the damping elements can, of course, in principle also be formed by rubber-elastic sections which are adhesively bonded to corresponding housing sections, so that the actual cavity is formed both by housing sections and by rubber-elastic flexible sections. In this way, a closed cavity can also be formed, without the elastic damping element must be formed closed in itself.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Fluid Mechanics (AREA)
  • Pipe Accessories (AREA)
  • Vibration Prevention Devices (AREA)
  • Compressor (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne un conduit sous vide (100) qui présente un amortisseur de vibrations destiné à diminuer le transfert de vibrations d'une partie (114) à une autre partie (116). L'amortisseur de vibrations consiste en un amortisseur pneumatique.
PCT/EP2007/050301 2006-01-31 2007-01-12 Conduit sous vide Ceased WO2007088096A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006004314.6 2006-01-31
DE102006004314A DE102006004314A1 (de) 2006-01-31 2006-01-31 Vakuumleitung

Publications (1)

Publication Number Publication Date
WO2007088096A1 true WO2007088096A1 (fr) 2007-08-09

Family

ID=37907403

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/050301 Ceased WO2007088096A1 (fr) 2006-01-31 2007-01-12 Conduit sous vide

Country Status (3)

Country Link
DE (1) DE102006004314A1 (fr)
TW (1) TW200741104A (fr)
WO (1) WO2007088096A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015008803U1 (de) * 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
GB2587367A (en) * 2019-09-24 2021-03-31 Edwards Ltd Vibration damping connector systems
GB2592346B (en) * 2020-01-09 2022-11-02 Edwards Ltd Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1096461A (en) * 1964-12-01 1967-12-29 English Electric Co Ltd Vibration damping means
US4523612A (en) * 1983-04-15 1985-06-18 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for suppressing vibration and displacement of a bellows
US4911483A (en) * 1985-12-11 1990-03-27 Institut Francais Du Petrole Resilient ball joint support
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1574794A (en) * 1977-08-05 1980-09-10 Spiro Investment Sa Connecting lengths of tubing
DD205482A1 (de) * 1982-06-02 1983-12-28 Ingomar Fitz Vorrichtung zum abdichten von ringraeumen zwischen rohrtouren
DE8906015U1 (de) * 1989-05-13 1989-06-29 Philipp Holzmann Ag, 6000 Frankfurt Schild-Gelenkdichtung
DE19712711A1 (de) * 1997-03-26 1998-10-01 Pfeiffer Vacuum Gmbh Dämpfungssystem für magnetisch gelagerte Rotoren
DE10119075A1 (de) * 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1096461A (en) * 1964-12-01 1967-12-29 English Electric Co Ltd Vibration damping means
US4523612A (en) * 1983-04-15 1985-06-18 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for suppressing vibration and displacement of a bellows
US4911483A (en) * 1985-12-11 1990-03-27 Institut Francais Du Petrole Resilient ball joint support
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer

Also Published As

Publication number Publication date
DE102006004314A1 (de) 2007-08-02
TW200741104A (en) 2007-11-01

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