TW201129987A - Rotation unit for 4-driving alignment mechanism - Google Patents

Rotation unit for 4-driving alignment mechanism

Info

Publication number
TW201129987A
TW201129987A TW99147186A TW99147186A TW201129987A TW 201129987 A TW201129987 A TW 201129987A TW 99147186 A TW99147186 A TW 99147186A TW 99147186 A TW99147186 A TW 99147186A TW 201129987 A TW201129987 A TW 201129987A
Authority
TW
Taiwan
Prior art keywords
translational
rotational
units
rotational units
driving
Prior art date
Application number
TW99147186A
Other languages
English (en)
Chinese (zh)
Other versions
TWI377581B (2
Inventor
Yu-Ying Qiu
Original Assignee
Qiu Ren You
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qiu Ren You filed Critical Qiu Ren You
Priority to TW99147186A priority Critical patent/TW201129987A/zh
Publication of TW201129987A publication Critical patent/TW201129987A/zh
Application granted granted Critical
Publication of TWI377581B publication Critical patent/TWI377581B/zh

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Position Or Direction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
TW99147186A 2007-01-17 2007-01-17 Rotation unit for 4-driving alignment mechanism TW201129987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99147186A TW201129987A (en) 2007-01-17 2007-01-17 Rotation unit for 4-driving alignment mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW99147186A TW201129987A (en) 2007-01-17 2007-01-17 Rotation unit for 4-driving alignment mechanism

Publications (2)

Publication Number Publication Date
TW201129987A true TW201129987A (en) 2011-09-01
TWI377581B TWI377581B (2) 2012-11-21

Family

ID=48087832

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99147186A TW201129987A (en) 2007-01-17 2007-01-17 Rotation unit for 4-driving alignment mechanism

Country Status (1)

Country Link
TW (1) TW201129987A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455789B (2) * 2011-11-22 2014-10-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455789B (2) * 2011-11-22 2014-10-11

Also Published As

Publication number Publication date
TWI377581B (2) 2012-11-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees