TWI377581B - - Google Patents

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Publication number: TWI377581B
Authority: TW; Taiwan
Prior art keywords: groove; chassis; rotating; translational; unit
Prior art date: 2007-01-17

Application number

TW99147186A

Other languages

English (en)

Chinese (zh)

Other versions

TW201129987A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-01-17

Filing date

2007-01-17

Publication date

2012-11-21

2007-01-17 Application filed filed Critical

2007-01-17 Priority to TW99147186A priority Critical patent/TW201129987A/zh

2011-09-01 Publication of TW201129987A publication Critical patent/TW201129987A/zh

2012-11-21 Application granted granted Critical

2012-11-21 Publication of TWI377581B publication Critical patent/TWI377581B/zh

Links

230000007246 mechanism Effects 0.000 claims description 17
238000005096 rolling process Methods 0.000 claims description 8
238000007689 inspection Methods 0.000 claims 1
238000006073 displacement reaction Methods 0.000 description 19
238000005259 measurement Methods 0.000 description 8
238000013519 translation Methods 0.000 description 5
230000014616 translation Effects 0.000 description 4
230000008901 benefit Effects 0.000 description 3
230000000694 effects Effects 0.000 description 2
238000000034 method Methods 0.000 description 2
230000008439 repair process Effects 0.000 description 2
230000004308 accommodation Effects 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
239000002274 desiccant Substances 0.000 description 1
238000013461 design Methods 0.000 description 1
238000011161 development Methods 0.000 description 1
230000008030 elimination Effects 0.000 description 1
238000003379 elimination reaction Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
230000008569 process Effects 0.000 description 1
238000012545 processing Methods 0.000 description 1
230000004044 response Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1

Landscapes

Length Measuring Devices With Unspecified Measuring Means (AREA)
Control Of Position Or Direction (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Details Of Measuring And Other Instruments (AREA)

TW99147186A 2007-01-17 2007-01-17 Rotation unit for 4-driving alignment mechanism TW201129987A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW99147186A TW201129987A (en)	2007-01-17	2007-01-17	Rotation unit for 4-driving alignment mechanism

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW99147186A TW201129987A (en)	2007-01-17	2007-01-17	Rotation unit for 4-driving alignment mechanism

Publications (2)

Publication Number	Publication Date
TW201129987A TW201129987A (en)	2011-09-01
TWI377581B true TWI377581B (2)	2012-11-21

Family

ID=48087832

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW99147186A TW201129987A (en)	2007-01-17	2007-01-17	Rotation unit for 4-driving alignment mechanism

Country Status (1)

Country	Link
TW (1)	TW201129987A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW201321120A (zh) *	2011-11-22	2013-06-01	Metal Ind Res & Dev Ct	共平面三軸定位裝置

2007
- 2007-01-17 TW TW99147186A patent/TW201129987A/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW201129987A (en)	2011-09-01

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Legal Events

Date	Code	Title	Description
2023-08-21	MM4A	Annulment or lapse of patent due to non-payment of fees