TW201529890A - 附有金屬氧化物膜的物品 - Google Patents

附有金屬氧化物膜的物品 Download PDF

Info

Publication number: TW201529890A
Authority: TW; Taiwan
Prior art keywords: metal oxide; oxide film; substrate; article; particles
Prior art date: 2013-12-13

Application number

TW103142851A

Other languages

English (en)

Chinese (zh)

Inventor

Kazusei Tamai

Hitoshi Morinaga

Hiroshi Asano

Maiko Asai

Ryo Wakabayashi

Original Assignee

Fujimi Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-12-13

Filing date

2014-12-09

Publication date

2015-08-01

2014-12-09 Application filed by Fujimi Inc filed Critical Fujimi Inc

2015-08-01 Publication of TW201529890A publication Critical patent/TW201529890A/zh

Links

150000004706 metal oxides Chemical class 0.000 title claims abstract description 264
229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 263
239000002245 particle Substances 0.000 claims abstract description 136
238000005498 polishing Methods 0.000 claims abstract description 62
239000007769 metal material Substances 0.000 claims abstract description 38
239000000758 substrate Substances 0.000 claims description 137
239000000463 material Substances 0.000 claims description 38
239000011164 primary particle Substances 0.000 claims description 23
229910000838 Al alloy Inorganic materials 0.000 claims description 17
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 14
229910052782 aluminium Inorganic materials 0.000 claims description 10
229910000420 cerium oxide Inorganic materials 0.000 claims description 9
BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 9
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
239000002923 metal particle Substances 0.000 claims 1
239000002932 luster Substances 0.000 abstract description 21
239000007788 liquid Substances 0.000 description 59
239000000203 mixture Substances 0.000 description 48
238000000034 method Methods 0.000 description 19
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 18
239000002585 base Substances 0.000 description 17
230000003287 optical effect Effects 0.000 description 17
238000013461 design Methods 0.000 description 16
238000000227 grinding Methods 0.000 description 16
KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 15
239000011163 secondary particle Substances 0.000 description 13
229910052751 metal Inorganic materials 0.000 description 12
239000002184 metal Substances 0.000 description 12
238000011156 evaluation Methods 0.000 description 11
230000003746 surface roughness Effects 0.000 description 10
239000000956 alloy Substances 0.000 description 9
-1 or Lu Inorganic materials 0.000 description 8
238000012545 processing Methods 0.000 description 8
239000000047 product Substances 0.000 description 8
239000010410 layer Substances 0.000 description 7
239000000126 substance Substances 0.000 description 7
239000002253 acid Substances 0.000 description 6
239000002738 chelating agent Substances 0.000 description 6
239000013078 crystal Substances 0.000 description 6
229910045601 alloy Inorganic materials 0.000 description 5
239000011248 coating agent Substances 0.000 description 5
238000000576 coating method Methods 0.000 description 5
229910052709 silver Inorganic materials 0.000 description 5
239000010936 titanium Substances 0.000 description 5
230000015572 biosynthetic process Effects 0.000 description 4
230000000694 effects Effects 0.000 description 4
XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
229910052726 zirconium Inorganic materials 0.000 description 4
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
229910052684 Cerium Inorganic materials 0.000 description 3
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
150000001412 amines Chemical class 0.000 description 3
239000011230 binding agent Substances 0.000 description 3
230000005540 biological transmission Effects 0.000 description 3
230000008859 change Effects 0.000 description 3
229910052804 chromium Inorganic materials 0.000 description 3
239000003086 colorant Substances 0.000 description 3
229910052802 copper Inorganic materials 0.000 description 3
239000010949 copper Substances 0.000 description 3
238000009826 distribution Methods 0.000 description 3
229910052737 gold Inorganic materials 0.000 description 3
239000010931 gold Substances 0.000 description 3
229910052742 iron Inorganic materials 0.000 description 3
229910052748 manganese Inorganic materials 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
229910052697 platinum Inorganic materials 0.000 description 3
230000001953 sensory effect Effects 0.000 description 3
239000004332 silver Substances 0.000 description 3
239000002002 slurry Substances 0.000 description 3
229910052719 titanium Inorganic materials 0.000 description 3
229910052725 zinc Inorganic materials 0.000 description 3
QQVDJLLNRSOCEL-UHFFFAOYSA-N (2-aminoethyl)phosphonic acid Chemical compound [NH3+]CCP(O)([O-])=O QQVDJLLNRSOCEL-UHFFFAOYSA-N 0.000 description 2
229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
229910052691 Erbium Inorganic materials 0.000 description 2
229910052688 Gadolinium Inorganic materials 0.000 description 2
MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
229910052779 Neodymium Inorganic materials 0.000 description 2
KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
229910052777 Praseodymium Inorganic materials 0.000 description 2
229910052772 Samarium Inorganic materials 0.000 description 2
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
229910010413 TiO 2 Inorganic materials 0.000 description 2
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
229910052769 Ytterbium Inorganic materials 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
239000003429 antifungal agent Substances 0.000 description 2
229940121375 antifungal agent Drugs 0.000 description 2
229910052788 barium Inorganic materials 0.000 description 2
WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
239000003795 chemical substances by application Substances 0.000 description 2
238000004140 cleaning Methods 0.000 description 2
229920001577 copolymer Polymers 0.000 description 2
238000005260 corrosion Methods 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
238000002296 dynamic light scattering Methods 0.000 description 2
230000001747 exhibiting effect Effects 0.000 description 2
229910052733 gallium Inorganic materials 0.000 description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
229910052735 hafnium Inorganic materials 0.000 description 2
229910052738 indium Inorganic materials 0.000 description 2
229910052741 iridium Inorganic materials 0.000 description 2
239000002648 laminated material Substances 0.000 description 2
229910052747 lanthanoid Inorganic materials 0.000 description 2
150000002602 lanthanoids Chemical class 0.000 description 2
229910052745 lead Inorganic materials 0.000 description 2
238000002156 mixing Methods 0.000 description 2
229910052750 molybdenum Inorganic materials 0.000 description 2
229910052759 nickel Inorganic materials 0.000 description 2
229910052758 niobium Inorganic materials 0.000 description 2
239000010955 niobium Substances 0.000 description 2
229910052762 osmium Inorganic materials 0.000 description 2
239000007800 oxidant agent Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
230000000704 physical effect Effects 0.000 description 2
239000003755 preservative agent Substances 0.000 description 2
230000002335 preservative effect Effects 0.000 description 2
239000011347 resin Substances 0.000 description 2
229920005989 resin Polymers 0.000 description 2
229910052702 rhenium Inorganic materials 0.000 description 2
150000003839 salts Chemical class 0.000 description 2
229910052706 scandium Inorganic materials 0.000 description 2
239000002356 single layer Substances 0.000 description 2
229910052712 strontium Inorganic materials 0.000 description 2
229910052715 tantalum Inorganic materials 0.000 description 2
229910052718 tin Inorganic materials 0.000 description 2
229910052721 tungsten Inorganic materials 0.000 description 2
229910052720 vanadium Inorganic materials 0.000 description 2
230000000007 visual effect Effects 0.000 description 2
229920003169 water-soluble polymer Polymers 0.000 description 2
229910052727 yttrium Inorganic materials 0.000 description 2
ZORQXIQZAOLNGE-UHFFFAOYSA-N 1,1-difluorocyclohexane Chemical compound FC1(F)CCCCC1 ZORQXIQZAOLNGE-UHFFFAOYSA-N 0.000 description 1
SFRLSTJPMFGBDP-UHFFFAOYSA-N 1,2-diphosphonoethylphosphonic acid Chemical compound OP(O)(=O)CC(P(O)(O)=O)P(O)(O)=O SFRLSTJPMFGBDP-UHFFFAOYSA-N 0.000 description 1
KEQXNNJHMWSZHK-UHFFFAOYSA-L 1,3,2,4$l^{2}-dioxathiaplumbetane 2,2-dioxide Chemical compound [Pb+2].[O-]S([O-])(=O)=O KEQXNNJHMWSZHK-UHFFFAOYSA-L 0.000 description 1
ARAFEULRMHFMDE-UHFFFAOYSA-N 1,3-oxazolidine-2,5-dione Chemical compound O=C1CNC(=O)O1 ARAFEULRMHFMDE-UHFFFAOYSA-N 0.000 description 1
IXPNQXFRVYWDDI-UHFFFAOYSA-N 1-methyl-2,4-dioxo-1,3-diazinane-5-carboximidamide Chemical compound CN1CC(C(N)=N)C(=O)NC1=O IXPNQXFRVYWDDI-UHFFFAOYSA-N 0.000 description 1
KJUGUADJHNHALS-UHFFFAOYSA-N 1H-tetrazole Substances C=1N=NNN=1 KJUGUADJHNHALS-UHFFFAOYSA-N 0.000 description 1
URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 description 1
RAEOEMDZDMCHJA-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-[2-[2-[bis(carboxymethyl)amino]ethyl-(carboxymethyl)amino]ethyl]amino]acetic acid Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CCN(CC(O)=O)CC(O)=O)CC(O)=O RAEOEMDZDMCHJA-UHFFFAOYSA-N 0.000 description 1
239000005711 Benzoic acid Substances 0.000 description 1
LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
229910001369 Brass Inorganic materials 0.000 description 1
229910000906 Bronze Inorganic materials 0.000 description 1
XNSPQPOQXWCGKC-UHFFFAOYSA-N C(C)(=O)O.C(C)(=O)O.C(C)(=O)O.[N] Chemical compound C(C)(=O)O.C(C)(=O)O.C(C)(=O)O.[N] XNSPQPOQXWCGKC-UHFFFAOYSA-N 0.000 description 1
229910000975 Carbon steel Inorganic materials 0.000 description 1
229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
229910001018 Cast iron Inorganic materials 0.000 description 1
229910000669 Chrome steel Inorganic materials 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 description 1
229910052693 Europium Inorganic materials 0.000 description 1
229910001111 Fine metal Inorganic materials 0.000 description 1
RGHNJXZEOKUKBD-SQOUGZDYSA-N Gluconic acid Natural products OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 1
229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
229910052765 Lutetium Inorganic materials 0.000 description 1
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
229910019142 PO4 Inorganic materials 0.000 description 1
239000004698 Polyethylene Substances 0.000 description 1
239000002202 Polyethylene glycol Substances 0.000 description 1
239000005708 Sodium hypochlorite Substances 0.000 description 1
FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
230000009471 action Effects 0.000 description 1
230000004913 activation Effects 0.000 description 1
239000000654 additive Substances 0.000 description 1
239000003513 alkali Substances 0.000 description 1
150000005215 alkyl ethers Chemical class 0.000 description 1
125000000217 alkyl group Chemical group 0.000 description 1
229910000147 aluminium phosphate Inorganic materials 0.000 description 1
229910021529 ammonia Inorganic materials 0.000 description 1
229910052787 antimony Inorganic materials 0.000 description 1
238000000149 argon plasma sintering Methods 0.000 description 1
230000009286 beneficial effect Effects 0.000 description 1
235000010233 benzoic acid Nutrition 0.000 description 1
150000001565 benzotriazoles Chemical class 0.000 description 1
230000002457 bidirectional effect Effects 0.000 description 1
229910052796 boron Inorganic materials 0.000 description 1
239000010951 brass Substances 0.000 description 1
239000010974 bronze Substances 0.000 description 1
239000004566 building material Substances 0.000 description 1
JODNECOOAJMIKX-UHFFFAOYSA-N butane-1,2,3-tricarboxylic acid Chemical compound OC(=O)C(C)C(C(O)=O)CC(O)=O JODNECOOAJMIKX-UHFFFAOYSA-N 0.000 description 1
102220358403 c.89C>G Human genes 0.000 description 1
229910052791 calcium Inorganic materials 0.000 description 1
239000010962 carbon steel Substances 0.000 description 1
239000001768 carboxy methyl cellulose Substances 0.000 description 1
235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
239000008112 carboxymethyl-cellulose Substances 0.000 description 1
239000001913 cellulose Substances 0.000 description 1
229920002678 cellulose Polymers 0.000 description 1
229910010293 ceramic material Inorganic materials 0.000 description 1
239000007795 chemical reaction product Substances 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
230000003750 conditioning effect Effects 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
XTYUEDCPRIMJNG-UHFFFAOYSA-N copper zirconium Chemical compound [Cu].[Zr] XTYUEDCPRIMJNG-UHFFFAOYSA-N 0.000 description 1
230000001186 cumulative effect Effects 0.000 description 1
XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 1
235000011180 diphosphates Nutrition 0.000 description 1
238000004090 dissolution Methods 0.000 description 1
238000005315 distribution function Methods 0.000 description 1
DUYCTCQXNHFCSJ-UHFFFAOYSA-N dtpmp Chemical compound OP(=O)(O)CN(CP(O)(O)=O)CCN(CP(O)(=O)O)CCN(CP(O)(O)=O)CP(O)(O)=O DUYCTCQXNHFCSJ-UHFFFAOYSA-N 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000002708 enhancing effect Effects 0.000 description 1
RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
229910052732 germanium Inorganic materials 0.000 description 1
239000011521 glass Substances 0.000 description 1
239000000174 gluconic acid Substances 0.000 description 1
235000012208 gluconic acid Nutrition 0.000 description 1
150000004676 glycans Chemical class 0.000 description 1
238000009499 grossing Methods 0.000 description 1
CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
230000036541 health Effects 0.000 description 1
229940005740 hexametaphosphate Drugs 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
GTTBQSNGUYHPNK-UHFFFAOYSA-N hydroxymethylphosphonic acid Chemical compound OCP(O)(O)=O GTTBQSNGUYHPNK-UHFFFAOYSA-N 0.000 description 1
238000010191 image analysis Methods 0.000 description 1
239000012535 impurity Substances 0.000 description 1
150000007529 inorganic bases Chemical class 0.000 description 1
229910000765 intermetallic Inorganic materials 0.000 description 1
238000010030 laminating Methods 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
238000007561 laser diffraction method Methods 0.000 description 1
230000003137 locomotive effect Effects 0.000 description 1
229910052749 magnesium Inorganic materials 0.000 description 1
238000005259 measurement Methods 0.000 description 1
230000007246 mechanism Effects 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000005555 metalworking Methods 0.000 description 1
229940098779 methanesulfonic acid Drugs 0.000 description 1
150000007522 mineralic acids Chemical class 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000000178 monomer Substances 0.000 description 1
URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
229910017604 nitric acid Inorganic materials 0.000 description 1
150000007524 organic acids Chemical class 0.000 description 1
235000005985 organic acids Nutrition 0.000 description 1
150000007530 organic bases Chemical class 0.000 description 1
150000002918 oxazolines Chemical class 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
239000003002 pH adjusting agent Substances 0.000 description 1
VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 1
JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
150000002989 phenols Chemical class 0.000 description 1
235000021317 phosphate Nutrition 0.000 description 1
150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
238000005240 physical vapour deposition Methods 0.000 description 1
238000007747 plating Methods 0.000 description 1
238000007517 polishing process Methods 0.000 description 1
229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
229920000058 polyacrylate Polymers 0.000 description 1
229920000573 polyethylene Polymers 0.000 description 1
229920001223 polyethylene glycol Polymers 0.000 description 1
238000006116 polymerization reaction Methods 0.000 description 1
229920001282 polysaccharide Polymers 0.000 description 1
239000005017 polysaccharide Substances 0.000 description 1
229940005642 polystyrene sulfonic acid Drugs 0.000 description 1
239000001267 polyvinylpyrrolidone Substances 0.000 description 1
229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
239000000843 powder Substances 0.000 description 1
238000002360 preparation method Methods 0.000 description 1
238000007639 printing Methods 0.000 description 1
230000008569 process Effects 0.000 description 1
230000001737 promoting effect Effects 0.000 description 1
150000003222 pyridines Chemical class 0.000 description 1
150000003242 quaternary ammonium salts Chemical class 0.000 description 1
238000002310 reflectometry Methods 0.000 description 1
238000009877 rendering Methods 0.000 description 1
238000005488 sandblasting Methods 0.000 description 1
238000001878 scanning electron micrograph Methods 0.000 description 1
238000000790 scattering method Methods 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
235000010413 sodium alginate Nutrition 0.000 description 1
239000000661 sodium alginate Substances 0.000 description 1
229940005550 sodium alginate Drugs 0.000 description 1
SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 1
MWNQXXOSWHCCOZ-UHFFFAOYSA-L sodium;oxido carbonate Chemical compound [Na+].[O-]OC([O-])=O MWNQXXOSWHCCOZ-UHFFFAOYSA-L 0.000 description 1
239000006104 solid solution Substances 0.000 description 1
239000000243 solution Substances 0.000 description 1
239000001593 sorbitan monooleate Substances 0.000 description 1
235000011069 sorbitan monooleate Nutrition 0.000 description 1
229940035049 sorbitan monooleate Drugs 0.000 description 1
230000001629 suppression Effects 0.000 description 1
238000004381 surface treatment Methods 0.000 description 1
239000004094 surface-active agent Substances 0.000 description 1
PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
239000011975 tartaric acid Substances 0.000 description 1
235000002906 tartaric acid Nutrition 0.000 description 1
238000010998 test method Methods 0.000 description 1
USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical class C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 1
150000003536 tetrazoles Chemical class 0.000 description 1
229910052723 transition metal Inorganic materials 0.000 description 1
238000011282 treatment Methods 0.000 description 1
150000003852 triazoles Chemical class 0.000 description 1
AQLJVWUFPCUVLO-UHFFFAOYSA-N urea hydrogen peroxide Chemical compound OO.NC(N)=O AQLJVWUFPCUVLO-UHFFFAOYSA-N 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
239000000230 xanthan gum Substances 0.000 description 1
235000010493 xanthan gum Nutrition 0.000 description 1
229920001285 xanthan gum Polymers 0.000 description 1
229940082509 xanthan gum Drugs 0.000 description 1
229910001928 zirconium oxide Inorganic materials 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Laminated Bodies (AREA)
Other Surface Treatments For Metallic Materials (AREA)
Paints Or Removers (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

TW103142851A 2013-12-13 2014-12-09 附有金屬氧化物膜的物品 TW201529890A (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2013258722		2013-12-13

Publications (1)

Publication Number	Publication Date
TW201529890A true TW201529890A (zh)	2015-08-01

Family

ID=53371077

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW103142851A TW201529890A (zh)	2013-12-13	2014-12-09	附有金屬氧化物膜的物品

Country Status (7)

Country	Link
US (1)	US20160355930A1 (fr)
EP (1)	EP3081377A4 (fr)
JP (1)	JPWO2015087771A1 (fr)
KR (1)	KR20160098230A (fr)
CN (1)	CN105829097B (fr)
TW (1)	TW201529890A (fr)
WO (1)	WO2015087771A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI869617B (zh) *	2020-07-31	2025-01-11	日商迪普索股份有限公司	化成處理液及使用該化成處理液的化成處理方法、以及化成皮膜

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JP6525035B2 (ja) *	2017-08-29	2019-06-05	日本軽金属株式会社	アルミニウム部材及びその製造方法
WO2020127564A2 (fr) *	2018-12-18	2020-06-25	Essilor International	Article optique comportant un revêtement réfléchissant présentant une résistance élevée à l'abrasion

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JPH02185365A (ja)	1989-01-12	1990-07-19	Kobe Steel Ltd	アルミニウム合金平板基盤の研磨方法
JPH0825137B2 (ja)	1990-11-29	1996-03-13	上村工業株式会社	研磨方法
JPH07256555A (ja)	1994-03-23	1995-10-09	Sumitomo Chem Co Ltd	軟質材料用研磨材
US5527423A (en) *	1994-10-06	1996-06-18	Cabot Corporation	Chemical mechanical polishing slurry for metal layers
JPH10121034A (ja) *	1996-03-18	1998-05-12	Showa Denko Kk	磁気ディスク基板の研磨用組成物
JP3831982B2 (ja)	1996-07-26	2006-10-11	日産化学工業株式会社	アルミニウムディスクの研磨用組成物
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2014
- 2014-12-04 EP EP14870370.5A patent/EP3081377A4/fr not_active Withdrawn
- 2014-12-04 CN CN201480068374.5A patent/CN105829097B/zh not_active Expired - Fee Related
- 2014-12-04 KR KR1020167015349A patent/KR20160098230A/ko not_active Withdrawn
- 2014-12-04 US US15/103,020 patent/US20160355930A1/en not_active Abandoned
- 2014-12-04 JP JP2015552407A patent/JPWO2015087771A1/ja active Pending
- 2014-12-04 WO PCT/JP2014/082099 patent/WO2015087771A1/fr not_active Ceased
- 2014-12-09 TW TW103142851A patent/TW201529890A/zh unknown

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* Cited by examiner, † Cited by third party
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TWI869617B (zh) *	2020-07-31	2025-01-11	日商迪普索股份有限公司	化成處理液及使用該化成處理液的化成處理方法、以及化成皮膜

Also Published As

Publication number	Publication date
US20160355930A1 (en)	2016-12-08
EP3081377A4 (fr)	2016-12-07
CN105829097A (zh)	2016-08-03
CN105829097B (zh)	2018-06-26
WO2015087771A1 (fr)	2015-06-18
JPWO2015087771A1 (ja)	2017-03-16
EP3081377A1 (fr)	2016-10-19
KR20160098230A (ko)	2016-08-18

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US20140308155A1 (en)	2014-10-16	Method for polishing alloy material and method for producing alloy material
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CN105829097B (zh)	2018-06-26	带有金属氧化物膜的物品
JP2009513834A (ja)	2009-04-02	ナノ粒子およびナノコンポジット薄膜
EP2407429A1 (fr)	2012-01-18	Oxyde de tantale de vanadium à manganèse et pigments dotés d'un effet métallique noir revêtu de celui-ci
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JP2012522128A (ja)	2012-09-20	アルミニウム合金製の部品を被覆する方法及び前記方法からえられる部品
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WO2020012890A1 (fr)	2020-01-16	Élément métallique à base de magnésium, son procédé de production et article décoratif utilisant ledit élément métallique
Tsai et al.	2015	Spontaneous growth of ultra-thin titanium oxides shell on Ag nanowires: an electron energy loss spectroscope observation
WO2014111608A1 (fr)	2014-07-24	Frittes colorées à effet de brillance
JP3650292B2 (ja)	2005-05-18	イエロー色粉体およびその製造方法

TW201529890A - 附有金屬氧化物膜的物品 - Google Patents

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Classifications

Landscapes

Applications Claiming Priority (1)

Publications (1)

Family

ID=53371077

Family Applications (1)

Country Status (7)

Cited By (1)

Families Citing this family (2)

Family Cites Families (22)

Cited By (1)

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