TW201945571A - 框架一體型掩模的製造裝置 - Google Patents

框架一體型掩模的製造裝置 Download PDF

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Publication number
TW201945571A
TW201945571A TW108113411A TW108113411A TW201945571A TW 201945571 A TW201945571 A TW 201945571A TW 108113411 A TW108113411 A TW 108113411A TW 108113411 A TW108113411 A TW 108113411A TW 201945571 A TW201945571 A TW 201945571A
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TW
Taiwan
Prior art keywords
mask
frame
unit
clamping
template
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TW108113411A
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English (en)
Chinese (zh)
Inventor
李炳一
張澤龍
李裕進
Original Assignee
南韓商Tgo科技股份有限公司
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Application filed by 南韓商Tgo科技股份有限公司 filed Critical 南韓商Tgo科技股份有限公司
Publication of TW201945571A publication Critical patent/TW201945571A/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
TW108113411A 2018-04-20 2019-04-17 框架一體型掩模的製造裝置 TW201945571A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20180046330 2018-04-20
KR10-2018-0046330 2018-04-20
KR10-2018-0126078 2018-10-22
KR1020180126078A KR102011723B1 (ko) 2018-04-20 2018-10-22 프레임 일체형 마스크의 제조 장치

Publications (1)

Publication Number Publication Date
TW201945571A true TW201945571A (zh) 2019-12-01

Family

ID=67807272

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108113411A TW201945571A (zh) 2018-04-20 2019-04-17 框架一體型掩模的製造裝置

Country Status (4)

Country Link
KR (3) KR102011723B1 (fr)
CN (1) CN110385527B (fr)
TW (1) TW201945571A (fr)
WO (1) WO2019203510A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI771976B (zh) * 2020-04-09 2022-07-21 南韓商奧魯姆材料股份有限公司 掩模支撐模板及其製造方法、掩模製造方法及框架一體型掩模的製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210026168A (ko) * 2019-08-29 2021-03-10 주식회사 오럼머티리얼 마스크 지지 템플릿, 마스크 지지 템플릿의 제조 방법 및 프레임 일체형 마스크의 제조 방법
KR102882349B1 (ko) * 2020-05-04 2025-11-06 삼성디스플레이 주식회사 마스크 조립체의 제조장치, 마스크 조립체의 제조방법, 및 표시 장치의 제조방법
KR102833378B1 (ko) * 2020-06-03 2025-07-14 삼성디스플레이 주식회사 마스크 제조 설비 및 이를 이용한 마스크 제조 방법
KR102724543B1 (ko) * 2020-07-23 2024-11-04 삼성디스플레이 주식회사 마스크 척 및 이를 포함하는 마스크 제조 장치
JP7743186B2 (ja) * 2021-01-08 2025-09-24 株式会社Magnolia White 蒸着マスクの製造装置、及び蒸着マスクの製造方法
KR102908566B1 (ko) * 2023-12-19 2026-01-08 한국과학기술연구원 3d 모드 변환기 제작용 식각 마스크 구조물을 이용한 3d 모드 변환기를 구비한 광도파로 제조 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100534580B1 (ko) * 2003-03-27 2005-12-07 삼성에스디아이 주식회사 표시장치용 증착 마스크 및 그의 제조방법
KR100742385B1 (ko) * 2006-01-23 2007-07-24 삼성에스디아이 주식회사 마스크 정렬장치 및 그 정렬방법
JP2008115411A (ja) * 2006-11-01 2008-05-22 Seiko Epson Corp 蒸着マスクの製造方法、蒸着マスク、およびマスク蒸着方法
JP4985227B2 (ja) * 2007-08-24 2012-07-25 大日本印刷株式会社 蒸着マスク、蒸着マスク装置、蒸着マスクの製造方法、蒸着マスク装置の製造方法、および、蒸着マスク用シート状部材の製造方法
KR100947442B1 (ko) * 2007-11-20 2010-03-12 삼성모바일디스플레이주식회사 수직 증착형 마스크 제조장치 및 이를 이용한 수직 증착형마스크의 제조방법
KR101272299B1 (ko) * 2011-08-25 2013-06-07 (주)한 송 Ａｍｏｌｅｄ 패널 제작용 분할 마스크 프레임 어셈블리 제조 장치
CN104097027A (zh) * 2013-04-10 2014-10-15 昆山思拓机器有限公司 一种oled金属掩膜板的制作方法
JP2015127441A (ja) * 2013-12-27 2015-07-09 大日本印刷株式会社 蒸着マスク装置の製造方法
CN107425135A (zh) * 2017-05-05 2017-12-01 京东方科技集团股份有限公司 掩膜板固定底板及掩模板固定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI771976B (zh) * 2020-04-09 2022-07-21 南韓商奧魯姆材料股份有限公司 掩模支撐模板及其製造方法、掩模製造方法及框架一體型掩模的製造方法

Also Published As

Publication number Publication date
KR102152686B1 (ko) 2020-09-07
CN110385527B (zh) 2021-10-29
CN110385527A (zh) 2019-10-29
KR20190122598A (ko) 2019-10-30
KR102011723B1 (ko) 2019-08-19
WO2019203510A1 (fr) 2019-10-24
KR20190122599A (ko) 2019-10-30
KR102152687B1 (ko) 2020-09-07

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