TW303472B - - Google Patents

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Publication number: TW303472B
Authority: TW; Taiwan
Prior art keywords: layer; oxide; ceramic; item; dielectric
Prior art date: 1995-01-12

Application number

TW85100246A

Other languages

English (en)

Chinese (zh)

Original Assignee

Murata Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-01-12

Filing date

1996-01-10

Publication date

1997-04-21

1996-01-10 Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co

1997-04-21 Application granted granted Critical

1997-04-21 Publication of TW303472B publication Critical patent/TW303472B/zh

Links

239000000919 ceramic Substances 0.000 claims description 118
239000011521 glass Substances 0.000 claims description 52
239000003985 ceramic capacitor Substances 0.000 claims description 46
AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 45
239000000203 mixture Substances 0.000 claims description 42
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 36
239000000463 material Substances 0.000 claims description 36
238000011049 filling Methods 0.000 claims description 26
238000005245 sintering Methods 0.000 claims description 26
239000000843 powder Substances 0.000 claims description 22
JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 21
229910002113 barium titanate Inorganic materials 0.000 claims description 21
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 18
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 18
239000000395 magnesium oxide Substances 0.000 claims description 18
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 18
229910052759 nickel Inorganic materials 0.000 claims description 18
229910052788 barium Inorganic materials 0.000 claims description 16
DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 16
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
230000005611 electricity Effects 0.000 claims description 15
229910052737 gold Inorganic materials 0.000 claims description 15
239000010931 gold Substances 0.000 claims description 15
239000011777 magnesium Substances 0.000 claims description 15
239000001301 oxygen Substances 0.000 claims description 15
229910052760 oxygen Inorganic materials 0.000 claims description 15
229910052573 porcelain Inorganic materials 0.000 claims description 14
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 13
229910052749 magnesium Inorganic materials 0.000 claims description 13
229910052751 metal Inorganic materials 0.000 claims description 13
239000002184 metal Substances 0.000 claims description 13
239000011575 calcium Substances 0.000 claims description 11
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 9
229910052791 calcium Inorganic materials 0.000 claims description 9
239000011701 zinc Substances 0.000 claims description 8
239000012535 impurity Substances 0.000 claims description 7
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 6
230000002079 cooperative effect Effects 0.000 claims description 6
210000005069 ears Anatomy 0.000 claims description 6
229910000480 nickel oxide Inorganic materials 0.000 claims description 6
SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 6
GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 6
PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 5
238000003475 lamination Methods 0.000 claims description 5
229910052748 manganese Inorganic materials 0.000 claims description 5
239000011572 manganese Substances 0.000 claims description 5
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
229910052725 zinc Inorganic materials 0.000 claims description 4
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
238000000576 coating method Methods 0.000 claims description 3
239000010941 cobalt Substances 0.000 claims description 3
229910017052 cobalt Inorganic materials 0.000 claims description 3
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
229910000428 cobalt oxide Inorganic materials 0.000 claims description 3
IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims description 3
239000004615 ingredient Substances 0.000 claims description 3
239000011787 zinc oxide Substances 0.000 claims description 3
230000015572 biosynthetic process Effects 0.000 claims description 2
239000011248 coating agent Substances 0.000 claims description 2
229910052750 molybdenum Inorganic materials 0.000 claims description 2
239000011733 molybdenum Substances 0.000 claims description 2
229910052697 platinum Inorganic materials 0.000 claims description 2
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
229910052721 tungsten Inorganic materials 0.000 claims description 2
239000010937 tungsten Substances 0.000 claims description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 4
229910000272 alkali metal oxide Inorganic materials 0.000 claims 2
229910052742 iron Inorganic materials 0.000 claims 2
PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 1
WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
239000007787 solid Substances 0.000 claims 1
229910052712 strontium Inorganic materials 0.000 claims 1
CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
238000009413 insulation Methods 0.000 description 58
239000003990 capacitor Substances 0.000 description 54
235000013339 cereals Nutrition 0.000 description 27
238000007747 plating Methods 0.000 description 25
238000009713 electroplating Methods 0.000 description 20
239000000047 product Substances 0.000 description 18
239000003989 dielectric material Substances 0.000 description 17
230000001419 dependent effect Effects 0.000 description 14
238000000034 method Methods 0.000 description 13
239000013078 crystal Substances 0.000 description 11
239000010408 film Substances 0.000 description 11
230000003068 static effect Effects 0.000 description 11
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
239000002994 raw material Substances 0.000 description 8
229910052709 silver Inorganic materials 0.000 description 8
239000004332 silver Substances 0.000 description 8
229910000679 solder Inorganic materials 0.000 description 8
239000010936 titanium Substances 0.000 description 7
MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
238000007254 oxidation reaction Methods 0.000 description 6
229910052719 titanium Inorganic materials 0.000 description 6
230000003647 oxidation Effects 0.000 description 5
RUDFQVOCFDJEEF-UHFFFAOYSA-N oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 5
239000004065 semiconductor Substances 0.000 description 5
229910052710 silicon Inorganic materials 0.000 description 5
238000012360 testing method Methods 0.000 description 5
VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
239000007772 electrode material Substances 0.000 description 4
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
101100518501 Mus musculus Spp1 gene Proteins 0.000 description 3
239000002253 acid Substances 0.000 description 3
229910045601 alloy Inorganic materials 0.000 description 3
239000000956 alloy Substances 0.000 description 3
229910052799 carbon Inorganic materials 0.000 description 3
229910052802 copper Inorganic materials 0.000 description 3
239000010949 copper Substances 0.000 description 3
229910052593 corundum Inorganic materials 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
238000002156 mixing Methods 0.000 description 3
239000012299 nitrogen atmosphere Substances 0.000 description 3
SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 3
239000002244 precipitate Substances 0.000 description 3
239000000126 substance Substances 0.000 description 3
239000000758 substrate Substances 0.000 description 3
GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
229910001845 yogo sapphire Inorganic materials 0.000 description 3
229910052727 yttrium Inorganic materials 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 2
241000282346 Meles meles Species 0.000 description 2
229910000990 Ni alloy Inorganic materials 0.000 description 2
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
229910001252 Pd alloy Inorganic materials 0.000 description 2
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
KZNMRPQBBZBTSW-UHFFFAOYSA-N [Au]=O Chemical compound [Au]=O KZNMRPQBBZBTSW-UHFFFAOYSA-N 0.000 description 2
GXUARMXARIJAFV-UHFFFAOYSA-L barium oxalate Chemical compound [Ba+2].[O-]C(=O)C([O-])=O GXUARMXARIJAFV-UHFFFAOYSA-L 0.000 description 2
229940094800 barium oxalate Drugs 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
230000033228 biological regulation Effects 0.000 description 2
230000002542 deteriorative effect Effects 0.000 description 2
238000011161 development Methods 0.000 description 2
230000018109 developmental process Effects 0.000 description 2
239000007789 gas Substances 0.000 description 2
229910001922 gold oxide Inorganic materials 0.000 description 2
238000005259 measurement Methods 0.000 description 2
238000002844 melting Methods 0.000 description 2
230000008018 melting Effects 0.000 description 2
230000007935 neutral effect Effects 0.000 description 2
235000006408 oxalic acid Nutrition 0.000 description 2
VASIZKWUTCETSD-UHFFFAOYSA-N oxomanganese Chemical compound [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 2
230000036961 partial effect Effects 0.000 description 2
CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 2
238000007639 printing Methods 0.000 description 2
239000002002 slurry Substances 0.000 description 2
239000006104 solid solution Substances 0.000 description 2
239000000243 solution Substances 0.000 description 2
239000002904 solvent Substances 0.000 description 2
230000036962 time dependent Effects 0.000 description 2
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
-1 yttrium oxide cobalt oxide Chemical compound 0.000 description 2
ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
235000007516 Chrysanthemum Nutrition 0.000 description 1
244000189548 Chrysanthemum x morifolium Species 0.000 description 1
240000000560 Citrus x paradisi Species 0.000 description 1
229910000881 Cu alloy Inorganic materials 0.000 description 1
229910052692 Dysprosium Inorganic materials 0.000 description 1
240000005979 Hordeum vulgare Species 0.000 description 1
235000007340 Hordeum vulgare Nutrition 0.000 description 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
241001465754 Metazoa Species 0.000 description 1
240000007594 Oryza sativa Species 0.000 description 1
235000007164 Oryza sativa Nutrition 0.000 description 1
241000282320 Panthera leo Species 0.000 description 1
240000004808 Saccharomyces cerevisiae Species 0.000 description 1
229910052772 Samarium Inorganic materials 0.000 description 1
UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
RRPXXFMVPWMACY-UHFFFAOYSA-N [Co].O=[Co]=O Chemical compound [Co].O=[Co]=O RRPXXFMVPWMACY-UHFFFAOYSA-N 0.000 description 1
WNZPMZDPEDYPKZ-UHFFFAOYSA-M [OH-].[O--].[Y+3] Chemical compound [OH-].[O--].[Y+3] WNZPMZDPEDYPKZ-UHFFFAOYSA-M 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
239000003513 alkali Substances 0.000 description 1
229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
239000002585 base Substances 0.000 description 1
239000010953 base metal Substances 0.000 description 1
229910001570 bauxite Inorganic materials 0.000 description 1
KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
239000004327 boric acid Substances 0.000 description 1
239000005388 borosilicate glass Substances 0.000 description 1
238000003763 carbonization Methods 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
230000000694 effects Effects 0.000 description 1
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
238000005242 forging Methods 0.000 description 1
238000002309 gasification Methods 0.000 description 1
238000000227 grinding Methods 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
150000004679 hydroxides Chemical class 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
230000014759 maintenance of location Effects 0.000 description 1
235000012054 meals Nutrition 0.000 description 1
150000001247 metal acetylides Chemical class 0.000 description 1
229910044991 metal oxide Inorganic materials 0.000 description 1
150000004706 metal oxides Chemical class 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
210000003205 muscle Anatomy 0.000 description 1
238000006386 neutralization reaction Methods 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
QKKWJYSVXDGOOJ-UHFFFAOYSA-N oxalic acid;oxotitanium Chemical compound [Ti]=O.OC(=O)C(O)=O QKKWJYSVXDGOOJ-UHFFFAOYSA-N 0.000 description 1
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
229910052763 palladium Inorganic materials 0.000 description 1
229910052699 polonium Inorganic materials 0.000 description 1
HZEBHPIOVYHPMT-UHFFFAOYSA-N polonium atom Chemical compound [Po] HZEBHPIOVYHPMT-UHFFFAOYSA-N 0.000 description 1
229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
239000010970 precious metal Substances 0.000 description 1
108700023468 protein-bound SN-C polysaccharide Proteins 0.000 description 1
229910052761 rare earth metal Inorganic materials 0.000 description 1
235000009566 rice Nutrition 0.000 description 1
238000010079 rubber tapping Methods 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
238000004626 scanning electron microscopy Methods 0.000 description 1
238000007650 screen-printing Methods 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
239000000779 smoke Substances 0.000 description 1
KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
229910001948 sodium oxide Inorganic materials 0.000 description 1
239000002689 soil Substances 0.000 description 1
210000002784 stomach Anatomy 0.000 description 1
238000003860 storage Methods 0.000 description 1
238000010408 sweeping Methods 0.000 description 1
238000002560 therapeutic procedure Methods 0.000 description 1
239000010409 thin film Substances 0.000 description 1
238000003466 welding Methods 0.000 description 1
AEBQGBJXPRNAJF-UHFFFAOYSA-N zinc oxygen(2-) yttrium(3+) Chemical compound [O-2].[Y+3].[O-2].[Zn+2] AEBQGBJXPRNAJF-UHFFFAOYSA-N 0.000 description 1
229910052726 zirconium Inorganic materials 0.000 description 1

Landscapes

Ceramic Capacitors (AREA)
Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Inorganic Insulating Materials (AREA)
Compositions Of Oxide Ceramics (AREA)

TW85100246A 1995-01-12 1996-01-10 TW303472B (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP7003302A JP3018934B2 (ja)	1995-01-12	1995-01-12	積層セラミックコンデンサ

Publications (1)

Publication Number	Publication Date
TW303472B true TW303472B (de)	1997-04-21

Family

ID=11553576

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW85100246A TW303472B (de)	1995-01-12	1996-01-10

Country Status (2)

Country	Link
JP (1)	JP3018934B2 (de)
TW (1)	TW303472B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4826881B2 (ja) *	2005-05-25	2011-11-30	株式会社村田製作所	導電性ペースト、及び積層セラミック電子部品の製造方法、並びに積層セラミック電子部品
JP2007169088A (ja) *	2005-12-20	2007-07-05	Samsung Electro Mech Co Ltd	焼結体及びセラミックコンデンサ並びにこれらの製造方法
JP5224074B2 (ja) *	2010-08-04	2013-07-03	株式会社村田製作所	誘電体セラミック、及び積層セラミックコンデンサ

1995
- 1995-01-12 JP JP7003302A patent/JP3018934B2/ja not_active Expired - Lifetime
1996
- 1996-01-10 TW TW85100246A patent/TW303472B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
JP3018934B2 (ja)	2000-03-13
JPH08191031A (ja)	1996-07-23

Legal Events

Date	Code	Title	Description
2016-02-21	MK4A	Expiration of patent term of an invention patent

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