TW344062B - Inspection method and device using pattern matching - Google Patents

Inspection method and device using pattern matching

Info

Publication number
TW344062B
TW344062B TW086113247A TW86113247A TW344062B TW 344062 B TW344062 B TW 344062B TW 086113247 A TW086113247 A TW 086113247A TW 86113247 A TW86113247 A TW 86113247A TW 344062 B TW344062 B TW 344062B
Authority
TW
Taiwan
Prior art keywords
under inspection
pattern
consistency
reference pattern
articles
Prior art date
Application number
TW086113247A
Other languages
English (en)
Chinese (zh)
Inventor
Yasuyoshi Suzuki
Takehiro Sugimoto
Yoshihiko Nakagawaji
Tetsu Inomoto
Original Assignee
Komatsu Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Mfg Co Ltd filed Critical Komatsu Mfg Co Ltd
Application granted granted Critical
Publication of TW344062B publication Critical patent/TW344062B/zh

Links

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/08Optical projection comparators
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30164Workpiece; Machine component

Landscapes

  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
TW086113247A 1996-09-17 1997-09-12 Inspection method and device using pattern matching TW344062B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8245172A JPH1091785A (ja) 1996-09-17 1996-09-17 パターンマッチングによる検査方法および検査装置

Publications (1)

Publication Number Publication Date
TW344062B true TW344062B (en) 1998-11-01

Family

ID=17129685

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086113247A TW344062B (en) 1996-09-17 1997-09-12 Inspection method and device using pattern matching

Country Status (4)

Country Link
JP (1) JPH1091785A (ja)
KR (1) KR19980024633A (ja)
TW (1) TW344062B (ja)
WO (1) WO1998012668A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4035978B2 (ja) * 2001-10-05 2008-01-23 コニカミノルタホールディングス株式会社 3次元形状モデルの評価方法および生成方法並びに装置
JP4566769B2 (ja) * 2005-02-04 2010-10-20 株式会社エム・アイ・エル 物品欠陥情報検出装置
JP7336285B2 (ja) * 2019-07-12 2023-08-31 三菱重工業株式会社 コネクタ撮影装置および撮影方法
WO2021010269A1 (ja) 2019-07-18 2021-01-21 三菱電機株式会社 検査装置、検査方法及びプログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240384A (ja) * 1985-04-17 1986-10-25 Hitachi Ltd 画像処理装置
JPH0546733A (ja) * 1991-08-19 1993-02-26 Mitsubishi Electric Corp 微生物認識装置

Also Published As

Publication number Publication date
JPH1091785A (ja) 1998-04-10
KR19980024633A (ko) 1998-07-06
WO1998012668A1 (en) 1998-03-26

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