TW593802B - Device for clamping single crystal - Google Patents

Device for clamping single crystal Download PDF

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Publication number
TW593802B
TW593802B TW87111819A TW87111819A TW593802B TW 593802 B TW593802 B TW 593802B TW 87111819 A TW87111819 A TW 87111819A TW 87111819 A TW87111819 A TW 87111819A TW 593802 B TW593802 B TW 593802B
Authority
TW
Taiwan
Prior art keywords
clamping
single crystal
claws
neck
claw
Prior art date
Application number
TW87111819A
Other languages
English (en)
Chinese (zh)
Inventor
Shigeki Kawashima
Hiroshi Inagaki
Shoei Kurosaka
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW593802B publication Critical patent/TW593802B/zh

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
TW87111819A 1997-09-25 1998-07-20 Device for clamping single crystal TW593802B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27805297A JP3949240B2 (ja) 1997-09-25 1997-09-25 単結晶保持装置

Publications (1)

Publication Number Publication Date
TW593802B true TW593802B (en) 2004-06-21

Family

ID=17591992

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87111819A TW593802B (en) 1997-09-25 1998-07-20 Device for clamping single crystal

Country Status (2)

Country Link
JP (1) JP3949240B2 (ja)
TW (1) TW593802B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114929948A (zh) * 2020-01-09 2022-08-19 Pva特普拉股份公司 晶体支撑装置和具有这种晶体支撑装置的拉晶设备

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3572998B2 (ja) * 1999-06-04 2004-10-06 三菱住友シリコン株式会社 単結晶シリコンの製造方法
CN116495471B (zh) * 2023-06-25 2023-09-01 苏州晨晖智能设备有限公司 一种单晶硅棒转移运输装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114929948A (zh) * 2020-01-09 2022-08-19 Pva特普拉股份公司 晶体支撑装置和具有这种晶体支撑装置的拉晶设备

Also Published As

Publication number Publication date
JPH11100291A (ja) 1999-04-13
JP3949240B2 (ja) 2007-07-25

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