TWI224842B - Lift-and support-equipment, processing method of a plate-formed substrate and equipment to process the plate-formed substrate - Google Patents

Lift-and support-equipment, processing method of a plate-formed substrate and equipment to process the plate-formed substrate Download PDF

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Publication number
TWI224842B
TWI224842B TW091115688A TW91115688A TWI224842B TW I224842 B TWI224842 B TW I224842B TW 091115688 A TW091115688 A TW 091115688A TW 91115688 A TW91115688 A TW 91115688A TW I224842 B TWI224842 B TW I224842B
Authority
TW
Taiwan
Prior art keywords
pin
plate
patent application
supporting device
scope
Prior art date
Application number
TW091115688A
Other languages
English (en)
Chinese (zh)
Inventor
Mustapha Elyaakoubi
Jacques Schmitt
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Application granted granted Critical
Publication of TWI224842B publication Critical patent/TWI224842B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7622—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
TW091115688A 2001-07-16 2002-07-15 Lift-and support-equipment, processing method of a plate-formed substrate and equipment to process the plate-formed substrate TWI224842B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10134513A DE10134513A1 (de) 2001-07-16 2001-07-16 Hebe-und Stützvorichtung

Publications (1)

Publication Number Publication Date
TWI224842B true TWI224842B (en) 2004-12-01

Family

ID=7691945

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091115688A TWI224842B (en) 2001-07-16 2002-07-15 Lift-and support-equipment, processing method of a plate-formed substrate and equipment to process the plate-formed substrate

Country Status (10)

Country Link
US (1) US7662302B2 (de)
EP (1) EP1435106B1 (de)
JP (1) JP2004535081A (de)
KR (1) KR100901999B1 (de)
CN (1) CN1298017C (de)
AT (1) ATE364899T1 (de)
DE (2) DE10134513A1 (de)
ES (1) ES2287313T3 (de)
TW (1) TWI224842B (de)
WO (1) WO2003008323A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10329976A1 (de) * 2003-06-26 2005-02-03 Sentech Instruments Gmbh Vorrichtung zum Fixieren von Substraten
KR101202151B1 (ko) 2003-09-10 2012-11-15 외를리콘 솔라 아게, 트뤼프바흐 직사각형 대면적 기판 처리용 고주파 플라즈마 반응기의전압 불균일성 보상 방법
US20080105201A1 (en) * 2006-11-03 2008-05-08 Applied Materials, Inc. Substrate support components having quartz contact tips
EP1953259B1 (de) 2007-02-02 2010-04-28 Applied Materials, Inc. Prozesskammer, Inline-Beschichtungsanlage und Verfahren zur Behandlung eines Substrats
US7781867B2 (en) * 2007-12-28 2010-08-24 Fujitsu Limited Method and system for providing an aligned semiconductor assembly
US8313612B2 (en) * 2009-03-24 2012-11-20 Lam Research Corporation Method and apparatus for reduction of voltage potential spike during dechucking
US9748077B2 (en) * 2012-05-29 2017-08-29 Jusung Engineering Co., Ltd. Substrate processing device and substrate processing method
CN103607836A (zh) * 2013-11-27 2014-02-26 苏州市奥普斯等离子体科技有限公司 一种新型等离子体处理装置
JP7203194B2 (ja) 2018-08-23 2023-01-12 エーエスエムエル ネザーランズ ビー．ブイ． 基板サポート、リソグラフィ装置、基板検査装置、デバイス製造方法
WO2022078743A1 (en) 2020-10-16 2022-04-21 Asml Netherlands B.V. Object table, stage apparatus, holding method and lithographic apparatus

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US614504A (en) * 1898-11-22 Switch-heddle
JP3249765B2 (ja) * 1997-05-07 2002-01-21 東京エレクトロン株式会社 基板処理装置
US5539609A (en) * 1992-12-02 1996-07-23 Applied Materials, Inc. Electrostatic chuck usable in high density plasma
TW277139B (de) * 1993-09-16 1996-06-01 Hitachi Seisakusyo Kk
US5491603A (en) * 1994-04-28 1996-02-13 Applied Materials, Inc. Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer
JP3005461B2 (ja) * 1995-11-24 2000-01-31 日本電気株式会社 静電チャック
US5669977A (en) * 1995-12-22 1997-09-23 Lam Research Corporation Shape memory alloy lift pins for semiconductor processing equipment
KR970052738A (ko) * 1995-12-23 1997-07-29 김광호 반도체소자 제조용 플라즈마를 이용한 건식식각 장치
JPH09246362A (ja) * 1996-03-05 1997-09-19 Dainippon Screen Mfg Co Ltd 回転式基板処理装置および回転式基板処理方法
US5796066A (en) * 1996-03-29 1998-08-18 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
US5879128A (en) 1996-07-24 1999-03-09 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
US6132517A (en) * 1997-02-21 2000-10-17 Applied Materials, Inc. Multiple substrate processing apparatus for enhanced throughput
US6174377B1 (en) * 1997-03-03 2001-01-16 Genus, Inc. Processing chamber for atomic layer deposition processes
US6214122B1 (en) 1997-03-17 2001-04-10 Motorola, Inc. Rapid thermal processing susceptor
US6287435B1 (en) * 1998-05-06 2001-09-11 Tokyo Electron Limited Method and apparatus for ionized physical vapor deposition
US6146504A (en) 1998-05-21 2000-11-14 Applied Materials, Inc. Substrate support and lift apparatus and method
US6228438B1 (en) 1999-08-10 2001-05-08 Unakis Balzers Aktiengesellschaft Plasma reactor for the treatment of large size substrates
US6572708B2 (en) * 2000-02-28 2003-06-03 Applied Materials Inc. Semiconductor wafer support lift-pin assembly
US6635117B1 (en) * 2000-04-26 2003-10-21 Axcelis Technologies, Inc. Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system

Also Published As

Publication number Publication date
US20040248391A1 (en) 2004-12-09
CN1298017C (zh) 2007-01-31
HK1066323A1 (en) 2005-03-18
ATE364899T1 (de) 2007-07-15
DE10134513A1 (de) 2003-01-30
US7662302B2 (en) 2010-02-16
DE50210325D1 (de) 2007-07-26
EP1435106A2 (de) 2004-07-07
JP2004535081A (ja) 2004-11-18
CN1533587A (zh) 2004-09-29
WO2003008323A3 (de) 2003-12-04
EP1435106B1 (de) 2007-06-13
WO2003008323A2 (de) 2003-01-30
ES2287313T3 (es) 2007-12-16
KR20040028930A (ko) 2004-04-03
KR100901999B1 (ko) 2009-06-11

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