TWI322953B - Optical proximity correction on hardware or software platforms with graphical processing units - Google Patents
Optical proximity correction on hardware or software platforms with graphical processing units Download PDFInfo
- Publication number
- TWI322953B TWI322953B TW095144746A TW95144746A TWI322953B TW I322953 B TWI322953 B TW I322953B TW 095144746 A TW095144746 A TW 095144746A TW 95144746 A TW95144746 A TW 95144746A TW I322953 B TWI322953 B TW I322953B
- Authority
- TW
- Taiwan
- Prior art keywords
- processing unit
- program
- processor
- calculation
- proximity correction
- Prior art date
Links
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Image Processing (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74168705P | 2005-12-02 | 2005-12-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200739377A TW200739377A (en) | 2007-10-16 |
| TWI322953B true TWI322953B (en) | 2010-04-01 |
Family
ID=38609991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095144746A TWI322953B (en) | 2005-12-02 | 2006-12-01 | Optical proximity correction on hardware or software platforms with graphical processing units |
Country Status (2)
| Country | Link |
|---|---|
| TW (1) | TWI322953B (fr) |
| WO (1) | WO2007120304A2 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8578313B2 (en) * | 2008-04-24 | 2013-11-05 | Synopsys, Inc. | Pattern-clip-based hotspot database system for layout verification |
| TWI448916B (zh) * | 2009-07-30 | 2014-08-11 | United Microelectronics Corp | 修正佈局圖案的方法 |
| TWI498698B (zh) * | 2014-03-27 | 2015-09-01 | Genesis Technology Inc | 使用者介面以及電腦程式產品 |
| US9772849B2 (en) | 2014-11-14 | 2017-09-26 | Intel Corporation | Four-dimensional morton coordinate conversion processors, methods, systems, and instructions |
| US9772848B2 (en) | 2014-11-14 | 2017-09-26 | Intel Corporation | Three-dimensional morton coordinate conversion processors, methods, systems, and instructions |
| US9772850B2 (en) | 2014-11-14 | 2017-09-26 | Intel Corporation | Morton coordinate adjustment processors, methods, systems, and instructions |
| CN119783605B (zh) * | 2024-12-31 | 2025-10-17 | 西安电子科技大学 | 一种强磁场脉冲环境数字集成电路电源网络的评估方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5682323A (en) * | 1995-03-06 | 1997-10-28 | Lsi Logic Corporation | System and method for performing optical proximity correction on macrocell libraries |
| US5553273A (en) * | 1995-04-17 | 1996-09-03 | International Business Machines Corporation | Vertex minimization in a smart optical proximity correction system |
| US5723233A (en) * | 1996-02-27 | 1998-03-03 | Lsi Logic Corporation | Optical proximity correction method and apparatus |
| US6467076B1 (en) * | 1999-04-30 | 2002-10-15 | Nicolas Bailey Cobb | Method and apparatus for submicron IC design |
| US7069534B2 (en) * | 2003-12-17 | 2006-06-27 | Sahouria Emile Y | Mask creation with hierarchy management using cover cells |
| US20060242618A1 (en) * | 2005-02-14 | 2006-10-26 | Yao-Ting Wang | Lithographic simulations using graphical processing units |
-
2006
- 2006-12-01 WO PCT/US2006/061518 patent/WO2007120304A2/fr not_active Ceased
- 2006-12-01 TW TW095144746A patent/TWI322953B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| TW200739377A (en) | 2007-10-16 |
| WO2007120304A3 (fr) | 2007-12-21 |
| WO2007120304A2 (fr) | 2007-10-25 |
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