TWI344525B - Combination manual/pneumatics valve for fluid control assembly - Google Patents

Combination manual/pneumatics valve for fluid control assembly Download PDF

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Publication number
TWI344525B
TWI344525B TW98139786A TW98139786A TWI344525B TW I344525 B TWI344525 B TW I344525B TW 98139786 A TW98139786 A TW 98139786A TW 98139786 A TW98139786 A TW 98139786A TW I344525 B TWI344525 B TW I344525B
Authority
TW
Taiwan
Prior art keywords
control assembly
fluid control
pimfc
combination manual
pneumatics valve
Prior art date
Application number
TW98139786A
Other languages
English (en)
Other versions
TW201009228A (en
Inventor
Balarabe Nuhu Mohammed
Phillip Barros
Raul A Martin
Mark Adam Crockett
Eric S Sklar
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW201009228A publication Critical patent/TW201009228A/zh
Application granted granted Critical
Publication of TWI344525B publication Critical patent/TWI344525B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/14—Actuating devices; Operating means; Releasing devices actuated by fluid for mounting on, or in combination with, hand-actuated valves
    • F16K31/143—Actuating devices; Operating means; Releasing devices actuated by fluid for mounting on, or in combination with, hand-actuated valves the fluid acting on a piston
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0379—By fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86638—Rotary valve
    • Y10T137/86646—Plug type
    • Y10T137/86662—Axial and radial flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Measuring Fluid Pressure (AREA)

Description

1344525 h(Jl. 壓力調節器所產生的屑片濾除掉，所以也不再需要一獨立 的過濾器。因此，該過濾器可被簡化並直接併入到piMFc91 中用以保護感應器及引動器以免上游其它地方所產生的微 粒堆積於其上。而且，因為該piMFC已包含一壓力感應器， 所以不再需要一外部的壓力轉換器，且與該壓力轉換器相 關連的顯示功能可直接結合到該pIMFC中，亦即，可為該 PIMFC提供一顯示器用以顯示已被該壓力感應器測得的壓 φ 力）。 第10圖顯示本發明所揭示之pIMFC在沒有使用一外部 壓力調節器的情況下，在消除處理流體控制組件中的干擾 上的效果。與第9圖表所代表的傳統MFC相同般，本發明 的PIMFC亦接受一約3psi(20.7kPa)的最初壓力擾動，在此 之後該壓力擾動緩和至約2psi(13.8kPa)的壓力差。然而， 與傳統的MFC不同的是，該PIMFC在整個擾動期間都緊隨 • 著通過該處理流體控制組件之實際的流體流量。這顯示了 與傳統的MFC不同地’本發明的piMFC不會過補償壓力擾 動’因此無需使用一額外的壓力調節器。 第11圖顯示一依據本文所教導的内容所製造的一處理 流體控制組件1 3 1 ’其適合使用在有毒流體上且與上文中所 述的結合式手動/氣動閥及PIMFC結合使用。該處理流體控 制組件包含第2-4圖所示的結合式手動/氣動閥133、第一氣 動閥135及第二氣動閥137及一 PIMFC 139。可藉由送出一 19 1344525 號專利案綠正
1344525 第 號專利案1。丨.丨丨.u蠔正 5 1 5 0 5 9 1 3°·39·2 3 3 2{(ojsd)-^^ Φ 28.5- 28-27.5- 3c£ ——XDOR6 -指示流量 ......RoR流量 ι I I i 10 15 20 25 時間（s)第10圖 30 35 40 E〇os)#^ 0 5 0 5 0 5 0 433221150 139 141 KZf 133'
135
第ll圖
137 A
TW98139786A 2003-01-17 2004-01-16 Combination manual/pneumatics valve for fluid control assembly TWI344525B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US44092803P 2003-01-17 2003-01-17

Publications (2)

Publication Number Publication Date
TW201009228A TW201009228A (en) 2010-03-01
TWI344525B true TWI344525B (en) 2011-07-01

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ID=34619247

Family Applications (2)

Application Number Title Priority Date Filing Date
TW98139786A TWI344525B (en) 2003-01-17 2004-01-16 Combination manual/pneumatics valve for fluid control assembly
TW93101259A TWI386578B (zh) 2003-01-17 2004-01-16 避免一質量流量控制器涉及一質量流量控制器陣列中之干擾的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW93101259A TWI386578B (zh) 2003-01-17 2004-01-16 避免一質量流量控制器涉及一質量流量控制器陣列中之干擾的方法

Country Status (4)

Country Link
US (3) US20050000570A1 (zh)
KR (1) KR101291236B1 (zh)
CN (2) CN100378397C (zh)
TW (2) TWI344525B (zh)

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US20050000570A1 (en) 2005-01-06
CN100378397C (zh) 2008-04-02
US8127783B2 (en) 2012-03-06
CN101230925A (zh) 2008-07-30
TW201009228A (en) 2010-03-01
TW200506257A (en) 2005-02-16
TWI386578B (zh) 2013-02-21
US8656953B2 (en) 2014-02-25
US20120161043A1 (en) 2012-06-28
CN1590832A (zh) 2005-03-09
US20070131282A1 (en) 2007-06-14

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