TWI362078B - Gold bonding wire for semiconductor elements - Google Patents

Gold bonding wire for semiconductor elements Download PDF

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Publication number
TWI362078B
TWI362078B TW094141270A TW94141270A TWI362078B TW I362078 B TWI362078 B TW I362078B TW 094141270 A TW094141270 A TW 094141270A TW 94141270 A TW94141270 A TW 94141270A TW I362078 B TWI362078 B TW I362078B
Authority
TW
Taiwan
Prior art keywords
mass
ppm
alloy
gold
balance
Prior art date
Application number
TW094141270A
Other languages
English (en)
Chinese (zh)
Other versions
TW200618146A (en
Inventor
Satoshi Teshima
Michitaka Mikami
Original Assignee
Tanaka Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Electronics Ind filed Critical Tanaka Electronics Ind
Publication of TW200618146A publication Critical patent/TW200618146A/zh
Application granted granted Critical
Publication of TWI362078B publication Critical patent/TWI362078B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/02—Alloys based on gold
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H10W72/01565—Thermally treating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07531—Techniques
    • H10W72/07532—Compression bonding, e.g. thermocompression bonding
    • H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/59—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12431—Foil or filament smaller than 6 mils

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Wire Bonding (AREA)
  • Arc Welding In General (AREA)
TW094141270A 2004-11-26 2005-11-24 Gold bonding wire for semiconductor elements TWI362078B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004343154 2004-11-26

Publications (2)

Publication Number Publication Date
TW200618146A TW200618146A (en) 2006-06-01
TWI362078B true TWI362078B (en) 2012-04-11

Family

ID=36497967

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094141270A TWI362078B (en) 2004-11-26 2005-11-24 Gold bonding wire for semiconductor elements

Country Status (8)

Country Link
US (1) US8440137B2 (fr)
EP (1) EP1830398A4 (fr)
JP (1) JP4117331B2 (fr)
KR (1) KR100929432B1 (fr)
CN (1) CN100501956C (fr)
MY (1) MY140911A (fr)
TW (1) TWI362078B (fr)
WO (1) WO2006057230A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4641248B2 (ja) * 2004-12-21 2011-03-02 田中電子工業株式会社 接合性、直進性および耐樹脂流れ性に優れたボンディングワイヤ用金合金線
JP4134261B1 (ja) * 2007-10-24 2008-08-20 田中電子工業株式会社 ボールボンディング用金合金線
JP4195495B1 (ja) * 2007-11-06 2008-12-10 田中電子工業株式会社 ボールボンディング用金合金線
JP4212641B1 (ja) * 2008-08-05 2009-01-21 田中電子工業株式会社 超音波ボンディング用アルミニウムリボン
CN102589753B (zh) 2011-01-05 2016-05-04 飞思卡尔半导体公司 压力传感器及其封装方法
US8643169B2 (en) 2011-11-09 2014-02-04 Freescale Semiconductor, Inc. Semiconductor sensor device with over-molded lid
US9029999B2 (en) 2011-11-23 2015-05-12 Freescale Semiconductor, Inc. Semiconductor sensor device with footed lid
US9297713B2 (en) 2014-03-19 2016-03-29 Freescale Semiconductor,Inc. Pressure sensor device with through silicon via
US9362479B2 (en) 2014-07-22 2016-06-07 Freescale Semiconductor, Inc. Package-in-package semiconductor sensor device
CN107527874B (zh) 2016-06-20 2023-08-01 恩智浦美国有限公司 腔式压力传感器器件

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154242A (ja) * 1982-03-10 1983-09-13 Mitsubishi Metal Corp 半導体素子ボンデイング用金合金細線
GB2116208B (en) 1981-12-04 1985-12-04 Mitsubishi Metal Corp Fine gold alloy wire for bonding of a semiconductor device
JPS62228440A (ja) 1986-03-28 1987-10-07 Matsuda Kikinzoku Kogyo Kk 半導体素子ボンデイング用金線
JP2778093B2 (ja) 1988-09-29 1998-07-23 三菱マテリアル株式会社 金バンプ用金合金細線
GB2231336B (en) * 1989-04-28 1993-09-22 Tanaka Electronics Ind Gold wire for the bonding of a semiconductor device
JP2814660B2 (ja) 1990-03-06 1998-10-27 三菱マテリアル株式会社 半導体装置のボンディング用金合金線
JP3143755B2 (ja) 1992-01-06 2001-03-07 新日本製鐵株式会社 ボンディング用金合金細線
JPH07335686A (ja) * 1994-06-09 1995-12-22 Nippon Steel Corp ボンディング用金合金細線
JP3475511B2 (ja) * 1994-09-16 2003-12-08 住友金属鉱山株式会社 ボンディングワイヤー
JP3337049B2 (ja) * 1995-05-17 2002-10-21 田中電子工業株式会社 ボンディング用金線
JPH08325657A (ja) 1995-05-26 1996-12-10 Tanaka Denshi Kogyo Kk ボンディング用金線
JP3367544B2 (ja) * 1995-08-23 2003-01-14 田中電子工業株式会社 ボンディング用金合金細線及びその製造方法
JP3535657B2 (ja) 1996-04-30 2004-06-07 タツタ電線株式会社 半導体素子用金合金線
JP3328135B2 (ja) * 1996-05-28 2002-09-24 田中電子工業株式会社 バンプ形成用金合金線及びバンプ形成方法
US5945065A (en) * 1996-07-31 1999-08-31 Tanaka Denshi Kogyo Method for wedge bonding using a gold alloy wire
JP3126926B2 (ja) * 1996-09-09 2001-01-22 新日本製鐵株式会社 半導体素子用金合金細線および半導体装置
JP3669809B2 (ja) * 1997-04-25 2005-07-13 田中電子工業株式会社 半導体素子ボンディング用金合金線
JP2000040710A (ja) * 1998-07-24 2000-02-08 Sumitomo Metal Mining Co Ltd ボンディング用金合金細線
JP3356082B2 (ja) * 1998-11-09 2002-12-09 三菱マテリアル株式会社 半導体装置のボンディング用金合金細線
JP3323185B2 (ja) * 2000-06-19 2002-09-09 田中電子工業株式会社 半導体素子接続用金線
JP2003007757A (ja) 2001-06-18 2003-01-10 Sumitomo Metal Mining Co Ltd 半導体素子ボンディング用金合金ワイヤ
TWI237334B (en) * 2002-04-05 2005-08-01 Nippon Steel Corp A gold bonding wire for a semiconductor device and a method for producing the same
JP3907534B2 (ja) * 2002-06-18 2007-04-18 田中電子工業株式会社 ボンディング用金合金線
JP3994113B2 (ja) * 2004-09-30 2007-10-17 田中電子工業株式会社 ワイヤバンプ
KR100899322B1 (ko) * 2004-09-30 2009-05-27 타나카 덴시 코오교오 카부시키가이샤 Ａｕ 합금 본딩·와이어
JP4195495B1 (ja) * 2007-11-06 2008-12-10 田中電子工業株式会社 ボールボンディング用金合金線
JP6360105B2 (ja) 2016-06-13 2018-07-18 ファナック株式会社 ロボットシステム

Also Published As

Publication number Publication date
US20070298276A1 (en) 2007-12-27
EP1830398A4 (fr) 2012-06-06
JPWO2006057230A1 (ja) 2008-06-05
TW200618146A (en) 2006-06-01
MY140911A (en) 2010-01-29
KR100929432B1 (ko) 2009-12-03
CN101065838A (zh) 2007-10-31
WO2006057230A1 (fr) 2006-06-01
JP4117331B2 (ja) 2008-07-16
EP1830398A1 (fr) 2007-09-05
KR20070084296A (ko) 2007-08-24
US8440137B2 (en) 2013-05-14
CN100501956C (zh) 2009-06-17

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