TWI650537B - 壓電感測器 - Google Patents

壓電感測器 Download PDF

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Publication number
TWI650537B
TWI650537B TW104107486A TW104107486A TWI650537B TW I650537 B TWI650537 B TW I650537B TW 104107486 A TW104107486 A TW 104107486A TW 104107486 A TW104107486 A TW 104107486A TW I650537 B TWI650537 B TW I650537B
Authority
TW
Taiwan
Prior art keywords
piezoelectric
plate
conductor
electrode
signal electrode
Prior art date
Application number
TW104107486A
Other languages
English (en)
Chinese (zh)
Other versions
TW201534880A (zh
Inventor
神谷信人
Original Assignee
日商積水化學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商積水化學工業股份有限公司 filed Critical 日商積水化學工業股份有限公司
Publication of TW201534880A publication Critical patent/TW201534880A/zh
Application granted granted Critical
Publication of TWI650537B publication Critical patent/TWI650537B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
TW104107486A 2014-03-10 2015-03-10 壓電感測器 TWI650537B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014046330 2014-03-10
JPJP2014-046330 2014-03-10

Publications (2)

Publication Number Publication Date
TW201534880A TW201534880A (zh) 2015-09-16
TWI650537B true TWI650537B (zh) 2019-02-11

Family

ID=54071697

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104107486A TWI650537B (zh) 2014-03-10 2015-03-10 壓電感測器

Country Status (3)

Country Link
JP (2) JPWO2015137251A1 (fr)
TW (1) TWI650537B (fr)
WO (1) WO2015137251A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9660610B2 (en) * 2014-05-30 2017-05-23 Kyocera Crystal Device Corporation Crystal device and mounting arrangement
JPWO2017126052A1 (ja) * 2016-01-20 2018-11-08 フジデノロ株式会社 ホウ素中性子捕捉療法用システム
JP6775211B2 (ja) * 2016-08-29 2020-10-28 積水化学工業株式会社 圧電センサ構造体
EP3694007A1 (fr) * 2019-02-05 2020-08-12 Koninklijke Philips N.V. Capteur comprenant une interconnexion ayant un film de support
WO2020170962A1 (fr) * 2019-02-18 2020-08-27 株式会社バルカー Capteur piézoélectrique et procédé de fabrication de capteur piézoélectrique
JP7519065B2 (ja) * 2019-02-25 2024-07-19 ロボセンサー技研株式会社 圧電センサ
JP7464247B2 (ja) * 2019-12-12 2024-04-09 国立大学法人山形大学 生体情報検出装置
EP3907769A1 (fr) * 2020-05-08 2021-11-10 Koninklijke Philips N.V. Capteur comprenant une interconnexion et dispositif médical d'intervention l'utilisant
CN119827853A (zh) * 2024-12-13 2025-04-15 北京中科飞龙传感技术有限责任公司 压电电极组件、加工方法及mems电场传感器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3894243A (en) * 1974-06-06 1975-07-08 Us Navy Polymeric transducer array
IT1224487B (it) * 1988-10-12 1990-10-04 Polysens Spa Trasduttore per la rivelazione di sforzi dinamici ed apparecchiatura di misurazione e o di controllo comprendente tale trasduttore
JP2733441B2 (ja) * 1994-03-01 1998-03-30 松下電器産業株式会社 在席検出装置
JP2734997B2 (ja) * 1994-09-02 1998-04-02 松下電器産業株式会社 圧電センサ
JP2000277825A (ja) * 1999-03-23 2000-10-06 Tokai Rubber Ind Ltd 圧電素子
JP2001291906A (ja) * 2000-04-07 2001-10-19 Matsushita Electric Ind Co Ltd 可撓性圧電素子
JP4761186B2 (ja) * 2005-03-10 2011-08-31 独立行政法人産業技術総合研究所 スイッチング素子とスイッチング素子を用いた競泳用タッチ板
JP5036412B2 (ja) * 2007-06-05 2012-09-26 エルメック電子工業株式会社 圧電センサおよび電子弦楽器
JP5083956B2 (ja) * 2007-09-19 2012-11-28 独立行政法人産業技術総合研究所 詰まり検出システム
JP2009260063A (ja) * 2008-04-17 2009-11-05 Kaneka Corp ポリフェニレンエーテル系発泡体からなるエレクトレット

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers

Also Published As

Publication number Publication date
JPWO2015137251A1 (ja) 2017-04-06
JP2019056710A (ja) 2019-04-11
JP6574889B2 (ja) 2019-09-11
TW201534880A (zh) 2015-09-16
WO2015137251A1 (fr) 2015-09-17

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